Semiconductor technology: processing and novel fabrication techniques
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York [u.a.]
Wiley
1997
|
| Series: | A Wiley-Interscience publication
|
| Subjects: | |
| Physical Description: | XVIII, 240 S. graph. Darst. |
| ISBN: | 0471127922 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV011991363 | ||
| 003 | DE-604 | ||
| 007 | t| | ||
| 008 | 980605s1997 xx d||| |||| 00||| eng d | ||
| 020 | |a 0471127922 |9 0-471-12792-2 | ||
| 035 | |a (OCoLC)636813623 | ||
| 035 | |a (DE-599)BVBBV011991363 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-83 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2 |2 21 | |
| 084 | |a UP 2800 |0 (DE-625)146366: |2 rvk | ||
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 245 | 1 | 0 | |a Semiconductor technology |b processing and novel fabrication techniques |c ed. by Mikhail E. Levinshtein ... |
| 264 | 1 | |a New York [u.a.] |b Wiley |c 1997 | |
| 300 | |a XVIII, 240 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a A Wiley-Interscience publication | |
| 650 | 4 | |a Semiconductor doping | |
| 650 | 4 | |a Semiconductors | |
| 650 | 4 | |a Semiconductors |x Defects | |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Levinštein, Michail E. |e Sonstige |4 oth | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-008114727 | |
Record in the Search Index
| _version_ | 1826838876465922048 |
|---|---|
| adam_text | |
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV011991363 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 2800 ZN 4100 |
| ctrlnum | (OCoLC)636813623 (DE-599)BVBBV011991363 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV011991363</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="007">t|</controlfield><controlfield tag="008">980605s1997 xx d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0471127922</subfield><subfield code="9">0-471-12792-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)636813623</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011991363</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 2800</subfield><subfield code="0">(DE-625)146366:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Semiconductor technology</subfield><subfield code="b">processing and novel fabrication techniques</subfield><subfield code="c">ed. by Mikhail E. Levinshtein ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York [u.a.]</subfield><subfield code="b">Wiley</subfield><subfield code="c">1997</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVIII, 240 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">A Wiley-Interscience publication</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor doping</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Defects</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Levinštein, Michail E.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008114727</subfield></datafield></record></collection> |
| id | DE-604.BV011991363 |
| illustrated | Illustrated |
| indexdate | 2025-03-17T11:01:56Z |
| institution | BVB |
| isbn | 0471127922 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008114727 |
| oclc_num | 636813623 |
| open_access_boolean | |
| owner | DE-703 DE-83 |
| owner_facet | DE-703 DE-83 |
| physical | XVIII, 240 S. graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Wiley |
| record_format | marc |
| series2 | A Wiley-Interscience publication |
| spelling | Semiconductor technology processing and novel fabrication techniques ed. by Mikhail E. Levinshtein ... New York [u.a.] Wiley 1997 XVIII, 240 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier A Wiley-Interscience publication Semiconductor doping Semiconductors Semiconductors Defects Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s DE-604 Levinštein, Michail E. Sonstige oth |
| spellingShingle | Semiconductor technology processing and novel fabrication techniques Semiconductor doping Semiconductors Semiconductors Defects Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 |
| title | Semiconductor technology processing and novel fabrication techniques |
| title_auth | Semiconductor technology processing and novel fabrication techniques |
| title_exact_search | Semiconductor technology processing and novel fabrication techniques |
| title_full | Semiconductor technology processing and novel fabrication techniques ed. by Mikhail E. Levinshtein ... |
| title_fullStr | Semiconductor technology processing and novel fabrication techniques ed. by Mikhail E. Levinshtein ... |
| title_full_unstemmed | Semiconductor technology processing and novel fabrication techniques ed. by Mikhail E. Levinshtein ... |
| title_short | Semiconductor technology |
| title_sort | semiconductor technology processing and novel fabrication techniques |
| title_sub | processing and novel fabrication techniques |
| topic | Semiconductor doping Semiconductors Semiconductors Defects Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Semiconductor doping Semiconductors Semiconductors Defects Halbleitertechnologie |
| work_keys_str_mv | AT levinsteinmichaile semiconductortechnologyprocessingandnovelfabricationtechniques |