Rapid thermal and integrated processing VI: symposium held April 1 - 4, 1997, San Francisco, California, U.S.A.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Pittsburgh, Pa.
MRS
1997
|
| Series: | Materials Research Society: Materials Research Society symposia proceedings
470 |
| Subjects: | |
| Physical Description: | IX, 434 S. graph. Darst. |
| ISBN: | 1558993746 |
Staff View
MARC
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| genre | (DE-588)1071861417 Konferenzschrift 1997 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1997 San Francisco Calif. |
| id | DE-604.BV011932704 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:18:45Z |
| institution | BVB |
| isbn | 1558993746 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008065862 |
| oclc_num | 38468850 |
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| owner | DE-29T DE-703 |
| owner_facet | DE-29T DE-703 |
| physical | IX, 434 S. graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | MRS |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Rapid thermal and integrated processing VI symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. ed.: Terrence J. Riley ... Pittsburgh, Pa. MRS 1997 IX, 434 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 470 Rapid thermal processing Congresses Semiconductor doping Congresses Semiconductors Heat treatment Congresses Vapor-plating Congresses CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Rapid thermal processing (DE-588)4347011-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 San Francisco Calif. gnd-content Rapid thermal processing (DE-588)4347011-7 s DE-604 CVD-Verfahren (DE-588)4009846-1 s Riley, Terrence J. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 470 (DE-604)BV001899105 470 |
| spellingShingle | Rapid thermal and integrated processing VI symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Rapid thermal processing Congresses Semiconductor doping Congresses Semiconductors Heat treatment Congresses Vapor-plating Congresses CVD-Verfahren (DE-588)4009846-1 gnd Rapid thermal processing (DE-588)4347011-7 gnd |
| subject_GND | (DE-588)4009846-1 (DE-588)4347011-7 (DE-588)1071861417 |
| title | Rapid thermal and integrated processing VI symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. |
| title_auth | Rapid thermal and integrated processing VI symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. |
| title_exact_search | Rapid thermal and integrated processing VI symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. |
| title_full | Rapid thermal and integrated processing VI symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. ed.: Terrence J. Riley ... |
| title_fullStr | Rapid thermal and integrated processing VI symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. ed.: Terrence J. Riley ... |
| title_full_unstemmed | Rapid thermal and integrated processing VI symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. ed.: Terrence J. Riley ... |
| title_short | Rapid thermal and integrated processing VI |
| title_sort | rapid thermal and integrated processing vi symposium held april 1 4 1997 san francisco california u s a |
| title_sub | symposium held April 1 - 4, 1997, San Francisco, California, U.S.A. |
| topic | Rapid thermal processing Congresses Semiconductor doping Congresses Semiconductors Heat treatment Congresses Vapor-plating Congresses CVD-Verfahren (DE-588)4009846-1 gnd Rapid thermal processing (DE-588)4347011-7 gnd |
| topic_facet | Rapid thermal processing Congresses Semiconductor doping Congresses Semiconductors Heat treatment Congresses Vapor-plating Congresses CVD-Verfahren Rapid thermal processing Konferenzschrift 1997 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT rileyterrencej rapidthermalandintegratedprocessingvisymposiumheldapril141997sanfranciscocaliforniausa |