Papers from the Eighth Canadian Semiconductor Technology Conference: 12 - 15 August 1997, Ottawa, Canada
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1998
|
| Schriftenreihe: | Journal of vacuum science & technology / A
16,2 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. e. Zs.-Heftes |
| Beschreibung: | S. 769 - 909 graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV011921516 | ||
| 003 | DE-604 | ||
| 005 | 19990630 | ||
| 007 | t | ||
| 008 | 980506s1998 d||| |||| 10||| eng d | ||
| 035 | |a (OCoLC)632893483 | ||
| 035 | |a (DE-599)BVBBV011921516 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T |a DE-91G |a DE-384 | ||
| 084 | |a ELT 270f |2 stub | ||
| 084 | |a ELT 300f |2 stub | ||
| 111 | 2 | |a Canadian Semiconductor Technology Conference |n 8 |d 1997 |c Ottawa |j Verfasser |0 (DE-588)5284588-6 |4 aut | |
| 245 | 1 | 0 | |a Papers from the Eighth Canadian Semiconductor Technology Conference |b 12 - 15 August 1997, Ottawa, Canada |c special eds. for the proceedings: Siegfried Janz ... |
| 264 | 1 | |a New York |b American Inst. of Physics |c 1998 | |
| 300 | |a S. 769 - 909 |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology / A |v 16,2 | |
| 500 | |a Einzelaufn. e. Zs.-Heftes | ||
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1997 |z Ottawa |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Janz, Siegfried |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008059008 | ||
Datensatz im Suchindex
| _version_ | 1804126510263566336 |
|---|---|
| any_adam_object | |
| author_corporate | Canadian Semiconductor Technology Conference Ottawa |
| author_corporate_role | aut |
| author_facet | Canadian Semiconductor Technology Conference Ottawa |
| author_sort | Canadian Semiconductor Technology Conference Ottawa |
| building | Verbundindex |
| bvnumber | BV011921516 |
| classification_tum | ELT 270f ELT 300f |
| ctrlnum | (OCoLC)632893483 (DE-599)BVBBV011921516 |
| discipline | Elektrotechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01317nam a2200349 cb4500</leader><controlfield tag="001">BV011921516</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19990630 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">980506s1998 d||| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)632893483</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011921516</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-384</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 270f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 300f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Canadian Semiconductor Technology Conference</subfield><subfield code="n">8</subfield><subfield code="d">1997</subfield><subfield code="c">Ottawa</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5284588-6</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the Eighth Canadian Semiconductor Technology Conference</subfield><subfield code="b">12 - 15 August 1997, Ottawa, Canada</subfield><subfield code="c">special eds. for the proceedings: Siegfried Janz ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 769 - 909</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology / A</subfield><subfield code="v">16,2</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufn. e. Zs.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1997</subfield><subfield code="z">Ottawa</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Janz, Siegfried</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008059008</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1997 Ottawa gnd-content |
| genre_facet | Konferenzschrift 1997 Ottawa |
| id | DE-604.BV011921516 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:18:36Z |
| institution | BVB |
| institution_GND | (DE-588)5284588-6 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008059008 |
| oclc_num | 632893483 |
| open_access_boolean | |
| owner | DE-29T DE-91G DE-BY-TUM DE-384 |
| owner_facet | DE-29T DE-91G DE-BY-TUM DE-384 |
| physical | S. 769 - 909 graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology / A |
| spelling | Canadian Semiconductor Technology Conference 8 1997 Ottawa Verfasser (DE-588)5284588-6 aut Papers from the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, Ottawa, Canada special eds. for the proceedings: Siegfried Janz ... New York American Inst. of Physics 1998 S. 769 - 909 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / A 16,2 Einzelaufn. e. Zs.-Heftes Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 Ottawa gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Janz, Siegfried Sonstige oth |
| spellingShingle | Papers from the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, Ottawa, Canada Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Papers from the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, Ottawa, Canada |
| title_auth | Papers from the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, Ottawa, Canada |
| title_exact_search | Papers from the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, Ottawa, Canada |
| title_full | Papers from the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, Ottawa, Canada special eds. for the proceedings: Siegfried Janz ... |
| title_fullStr | Papers from the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, Ottawa, Canada special eds. for the proceedings: Siegfried Janz ... |
| title_full_unstemmed | Papers from the Eighth Canadian Semiconductor Technology Conference 12 - 15 August 1997, Ottawa, Canada special eds. for the proceedings: Siegfried Janz ... |
| title_short | Papers from the Eighth Canadian Semiconductor Technology Conference |
| title_sort | papers from the eighth canadian semiconductor technology conference 12 15 august 1997 ottawa canada |
| title_sub | 12 - 15 August 1997, Ottawa, Canada |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Halbleitertechnologie Konferenzschrift 1997 Ottawa |
| work_keys_str_mv | AT canadiansemiconductortechnologyconferenceottawa papersfromtheeighthcanadiansemiconductortechnologyconference1215august1997ottawacanada AT janzsiegfried papersfromtheeighthcanadiansemiconductortechnologyconference1215august1997ottawacanada |