APA (7th ed.) Citation

Riedel, U. (1997). Numerical simulation of chemical downstream etching. IWR.

Chicago Style (17th ed.) Citation

Riedel, Uwe. Numerical Simulation of Chemical Downstream Etching. Heidelberg: IWR, 1997.

MLA (9th ed.) Citation

Riedel, Uwe. Numerical Simulation of Chemical Downstream Etching. IWR, 1997.

Warning: These citations may not always be 100% accurate.