Ätzverfahren für die Mikrotechnik:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | German |
| Published: |
Weinheim [u.a.]
Wiley-VCH
1998
|
| Subjects: | |
| Physical Description: | XVI, 398 S. Ill., graph. Darst. |
| ISBN: | 3527288694 |
Staff View
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| 100 | 1 | |a Köhler, Michael |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Ätzverfahren für die Mikrotechnik |c Michael Köhler |
| 264 | 1 | |a Weinheim [u.a.] |b Wiley-VCH |c 1998 | |
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Record in the Search Index
| _version_ | 1822399607570694144 |
|---|---|
| adam_text | |
| any_adam_object | |
| author | Köhler, Michael |
| author_facet | Köhler, Michael |
| author_role | aut |
| author_sort | Köhler, Michael |
| author_variant | m k mk |
| building | Verbundindex |
| bvnumber | BV011725945 |
| classification_rvk | UQ 2800 ZM 7660 ZN 3750 ZN 4150 ZM 8340 |
| classification_tum | ELT 285f FER 792f |
| ctrlnum | (OCoLC)245631184 (DE-599)BVBBV011725945 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| id | DE-604.BV011725945 |
| illustrated | Illustrated |
| indexdate | 2025-01-27T11:01:39Z |
| institution | BVB |
| isbn | 3527288694 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007909111 |
| oclc_num | 245631184 |
| open_access_boolean | |
| owner | DE-29T DE-355 DE-BY-UBR DE-703 DE-M347 DE-19 DE-BY-UBM DE-92 DE-91 DE-BY-TUM DE-91G DE-BY-TUM DE-1046 DE-1047 DE-1050 DE-20 DE-859 DE-858 DE-522 DE-523 DE-634 DE-83 DE-11 |
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| physical | XVI, 398 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Köhler, Michael Verfasser aut Ätzverfahren für die Mikrotechnik Michael Köhler Weinheim [u.a.] Wiley-VCH 1998 XVI, 398 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Ätzen - Mikrosystemtechnik Microlithography Semiconductors Etching Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Ätzen (DE-588)4000648-7 s DE-604 |
| spellingShingle | Köhler, Michael Ätzverfahren für die Mikrotechnik Ätzen - Mikrosystemtechnik Microlithography Semiconductors Etching Mikrosystemtechnik (DE-588)4221617-5 gnd Ätzen (DE-588)4000648-7 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4000648-7 |
| title | Ätzverfahren für die Mikrotechnik |
| title_auth | Ätzverfahren für die Mikrotechnik |
| title_exact_search | Ätzverfahren für die Mikrotechnik |
| title_full | Ätzverfahren für die Mikrotechnik Michael Köhler |
| title_fullStr | Ätzverfahren für die Mikrotechnik Michael Köhler |
| title_full_unstemmed | Ätzverfahren für die Mikrotechnik Michael Köhler |
| title_short | Ätzverfahren für die Mikrotechnik |
| title_sort | atzverfahren fur die mikrotechnik |
| topic | Ätzen - Mikrosystemtechnik Microlithography Semiconductors Etching Mikrosystemtechnik (DE-588)4221617-5 gnd Ätzen (DE-588)4000648-7 gnd |
| topic_facet | Ätzen - Mikrosystemtechnik Microlithography Semiconductors Etching Mikrosystemtechnik Ätzen |
| work_keys_str_mv | AT kohlermichael atzverfahrenfurdiemikrotechnik |