Handbook of microlithography, micromachining, and microfabrication: 2 Micromachining and microfabrication
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE Optical Engineering Pr. u.a.
1997
|
| Series: | Society of Photo-Optical Instrumentation Engineers: SPIE Press monograph
40 Institution of Electrical Engineers: IEE materials & devices series 12,B |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | VIII, 692 S. Ill., graph. Darst. |
| ISBN: | 0819423793 0852969112 |
Staff View
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Record in the Search Index
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| adam_text | HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION
VOLUME 2: MICROMACHINING AND MICROFABRICATION P. RAI-CHOUDHURY, EDITOR
SPIE OPTICAL ENGINEERING PRESS A PUBLICATION OF SPIE*THE INTERNATIONAL
SOCIETY FOR OPTICAL ENGINEERING BELLINGHAM, WASHINGTON USA EEE THE
INSTITUTION OF ELECTRICAL ENGINEERS LONDON, UK CONTENTS PREFACE VUE I
MICROMACHINING AND TRENDS FOR THE TWENTY-FIRST CENTURY 3 PAUL J.
MCWHORTER, A. BRUNO FRAZIER, P. RAI-CHOUDHURY 2 WET CHEMICAL ETCHING OF
SILICON AND SI0 2 , AND TEN CHALLENGES FOR MICROMACHINERS 41 DON L.
KENDALL AND ROBERT A. SHOULTZ 3 APPLICATIONS OF DRY ETCHING TO
MICROSENSORS, FIELD EMITTERS, 99 AND OPTICAL DEVICES STELLA W. PANG 4
FOCUSED ION BEAMS FOR MICROMACHINING AND MICROCHEMISTRY I 53 DIANE K.
STEWART AND J. DAVID CASEY, JR. 5 PLATING TECHNIQUES 197 LUBOMYRT.
ROMANKIWAND EUGENE J. M. O SULLIVAN 6 HIGH ASPECT RATIO PROCESSING 299
CRAIG R. FRIEDRICH, ROBERT WARRINGTON, WALTER BACHER, WERNER BAUER,
PHILIP J. COANE, JOST GOETTERT, THOMAS HANEMANN, JUERGEN HAUSSELT, MATHIAS
HECKELE, REGINA KNITTER, JUERGEN MOHR, VOLKER PIOTTER, HANS-JOACHIM
RITZHAUPT-KLEISSL, ROBERT RUPRECHT 7 SENSORS AND ACTUATORS 379 HAL
JERMAN AND STEPHEN TERRY 8 MICRO-OPTICAL DEVICES 435 HIROYUKI FUJITA,
HIROSHI TOSHIYOSHI 9 MICROMACHINED SYSTEMS FOR NEUROPHYSIOLOGICAL
APPLICATIONS 5 17 KHALIL NAJAFI I 0 THIN-FILM-TRANSISTOR-ADDRESSED
LIQUID CRYSTAL DISPLAYS 57 I FANG-CHEN LUO I I MICROSENSORS, ACTUATORS,
MEMS, AND ELECTRONICS FOR SMART STRUCTURES 617 VIJAY *. VARADAN AND
VASUNDARA V VARADAN INDEX 689
|
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| isbn | 0819423793 0852969112 |
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| physical | VIII, 692 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
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| publisher | SPIE Optical Engineering Pr. u.a. |
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| series | Society of Photo-Optical Instrumentation Engineers: SPIE Press monograph Institution of Electrical Engineers: IEE materials & devices series |
| series2 | Society of Photo-Optical Instrumentation Engineers: SPIE Press monograph Institution of Electrical Engineers: IEE materials & devices series Society of Photo-Optical Instrumentation Engineers: SPIE press monograph Institution of Electrical Engineers: [IEE materials and devices series] |
| spelling | Handbook of microlithography, micromachining, and microfabrication 2 Micromachining and microfabrication P. Rai-Choudhury, ed. Bellingham, Wash. SPIE Optical Engineering Pr. u.a. 1997 VIII, 692 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: SPIE Press monograph 40 Institution of Electrical Engineers: IEE materials & devices series 12,B Society of Photo-Optical Instrumentation Engineers: SPIE press monograph ... Institution of Electrical Engineers: [IEE materials and devices series] ... Rai-Choudhury, Prosenjit Sonstige oth (DE-604)BV011462597 2 Society of Photo-Optical Instrumentation Engineers: SPIE Press monograph 40 (DE-604)BV011462585 40 Institution of Electrical Engineers: IEE materials & devices series 12,B (DE-604)BV001898004 12,B GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007829260&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Handbook of microlithography, micromachining, and microfabrication Society of Photo-Optical Instrumentation Engineers: SPIE Press monograph Institution of Electrical Engineers: IEE materials & devices series |
| title | Handbook of microlithography, micromachining, and microfabrication |
| title_auth | Handbook of microlithography, micromachining, and microfabrication |
| title_exact_search | Handbook of microlithography, micromachining, and microfabrication |
| title_full | Handbook of microlithography, micromachining, and microfabrication 2 Micromachining and microfabrication P. Rai-Choudhury, ed. |
| title_fullStr | Handbook of microlithography, micromachining, and microfabrication 2 Micromachining and microfabrication P. Rai-Choudhury, ed. |
| title_full_unstemmed | Handbook of microlithography, micromachining, and microfabrication 2 Micromachining and microfabrication P. Rai-Choudhury, ed. |
| title_short | Handbook of microlithography, micromachining, and microfabrication |
| title_sort | handbook of microlithography micromachining and microfabrication micromachining and microfabrication |
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