Ion implantation technology - 94: proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994
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Bibliographic Details
Format: Conference Proceeding Book
Language:English
Published: Amsterdam [u.a.] Elsevier 1995
Subjects:
Item Description:Teilw. in: Nuclear instruments and methods in physics research, Section B, vol. B96, 1 - 2
Physical Description:XVII, 1012 S. zahlr. Ill. und graph. Darst.
ISBN:0444821945

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