Handbook of microlithography, micromachining, and microfabrication:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE Optical Engineering Pr. u.a.
|
| Series: | Society of Photo-Optical Instrumentation Engineers: SPIE press monograph
... Institution of Electrical Engineers: [IEE materials and devices series] ... |
| Subjects: |
Staff View
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Record in the Search Index
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| discipline | Physik Elektrotechnik Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
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| id | DE-604.BV011462597 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T19:54:08Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012612604 |
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| publishDateSort | 0000 |
| publisher | SPIE Optical Engineering Pr. u.a. |
| record_format | marc |
| series2 | Society of Photo-Optical Instrumentation Engineers: SPIE press monograph Institution of Electrical Engineers: [IEE materials and devices series] |
| spelling | Handbook of microlithography, micromachining, and microfabrication P. Rai-Choudhury, ed. Bellingham, Wash. SPIE Optical Engineering Pr. u.a. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: SPIE press monograph ... Institution of Electrical Engineers: [IEE materials and devices series] ... Mikromechanik (DE-588)4205811-9 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Mikromechanik (DE-588)4205811-9 s Rai-Choudhury, Prosenjit Sonstige oth |
| spellingShingle | Handbook of microlithography, micromachining, and microfabrication Mikromechanik (DE-588)4205811-9 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4174516-4 |
| title | Handbook of microlithography, micromachining, and microfabrication |
| title_auth | Handbook of microlithography, micromachining, and microfabrication |
| title_exact_search | Handbook of microlithography, micromachining, and microfabrication |
| title_full | Handbook of microlithography, micromachining, and microfabrication P. Rai-Choudhury, ed. |
| title_fullStr | Handbook of microlithography, micromachining, and microfabrication P. Rai-Choudhury, ed. |
| title_full_unstemmed | Handbook of microlithography, micromachining, and microfabrication P. Rai-Choudhury, ed. |
| title_short | Handbook of microlithography, micromachining, and microfabrication |
| title_sort | handbook of microlithography micromachining and microfabrication |
| topic | Mikromechanik (DE-588)4205811-9 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Mikromechanik Fotolithografie Halbleitertechnologie |
| work_keys_str_mv | AT raichoudhuryprosenjit handbookofmicrolithographymicromachiningandmicrofabrication |