APA (7th ed.) Citation

Handbook of microlithography, micromachining, and microfabrication. SPIE Optical Engineering Pr. u.a.

Chicago Style (17th ed.) Citation

Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham, Wash: SPIE Optical Engineering Pr. u.a.

MLA (9th ed.) Citation

Handbook of Microlithography, Micromachining, and Microfabrication. SPIE Optical Engineering Pr. u.a.

Warning: These citations may not always be 100% accurate.