High density plasma sources: design, physics and performance
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Park Ridge, NJ
Noyes
1995
|
| Series: | Materials science and process technology series
|
| Subjects: | |
| Physical Description: | XX, 445 S. graph. Darst. |
| ISBN: | 0815513771 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV011398989 | ||
| 003 | DE-604 | ||
| 005 | 20091117 | ||
| 007 | t | ||
| 008 | 970625s1995 d||| |||| 00||| eng d | ||
| 020 | |a 0815513771 |9 0-8155-1377-1 | ||
| 035 | |a (OCoLC)32666280 | ||
| 035 | |a (DE-599)BVBBV011398989 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-92 | ||
| 050 | 0 | |a QC718.5.D4 | |
| 082 | 0 | |a 621.044 |2 20 | |
| 084 | |a UR 8000 |0 (DE-625)146642: |2 rvk | ||
| 245 | 1 | 0 | |a High density plasma sources |b design, physics and performance |c ed. by Oleg A. Popov |
| 264 | 1 | |a Park Ridge, NJ |b Noyes |c 1995 | |
| 300 | |a XX, 445 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Materials science and process technology series | |
| 650 | 7 | |a Générateurs de plasmas |2 ram | |
| 650 | 7 | |a Plasmas (gaz ionisés) - Densité |2 ram | |
| 650 | 7 | |a Plasmas chauds |2 ram | |
| 650 | 4 | |a High temperature plasmas | |
| 650 | 4 | |a Plasma density | |
| 650 | 4 | |a Plasma generators | |
| 650 | 0 | 7 | |a Plasmaerzeugung |0 (DE-588)4174826-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Heißes Plasma |0 (DE-588)4350270-2 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Heißes Plasma |0 (DE-588)4350270-2 |D s |
| 689 | 0 | 1 | |a Plasmaerzeugung |0 (DE-588)4174826-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Popov, Oleg A. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-007663381 | ||
Record in the Search Index
| _version_ | 1804125912618237952 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV011398989 |
| callnumber-first | Q - Science |
| callnumber-label | QC718 |
| callnumber-raw | QC718.5.D4 |
| callnumber-search | QC718.5.D4 |
| callnumber-sort | QC 3718.5 D4 |
| callnumber-subject | QC - Physics |
| classification_rvk | UR 8000 |
| ctrlnum | (OCoLC)32666280 (DE-599)BVBBV011398989 |
| dewey-full | 621.044 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.044 |
| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01408nam a2200433 c 4500</leader><controlfield tag="001">BV011398989</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20091117 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">970625s1995 d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815513771</subfield><subfield code="9">0-8155-1377-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)32666280</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011398989</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-92</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC718.5.D4</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.044</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UR 8000</subfield><subfield code="0">(DE-625)146642:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">High density plasma sources</subfield><subfield code="b">design, physics and performance</subfield><subfield code="c">ed. by Oleg A. Popov</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Park Ridge, NJ</subfield><subfield code="b">Noyes</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XX, 445 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Materials science and process technology series</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Générateurs de plasmas</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Plasmas (gaz ionisés) - Densité</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Plasmas chauds</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">High temperature plasmas</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Plasma density</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Plasma generators</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaerzeugung</subfield><subfield code="0">(DE-588)4174826-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Heißes Plasma</subfield><subfield code="0">(DE-588)4350270-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Heißes Plasma</subfield><subfield code="0">(DE-588)4350270-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Plasmaerzeugung</subfield><subfield code="0">(DE-588)4174826-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Popov, Oleg A.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-007663381</subfield></datafield></record></collection> |
| id | DE-604.BV011398989 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:09:06Z |
| institution | BVB |
| isbn | 0815513771 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007663381 |
| oclc_num | 32666280 |
| open_access_boolean | |
| owner | DE-703 DE-92 |
| owner_facet | DE-703 DE-92 |
| physical | XX, 445 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Noyes |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | High density plasma sources design, physics and performance ed. by Oleg A. Popov Park Ridge, NJ Noyes 1995 XX, 445 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and process technology series Générateurs de plasmas ram Plasmas (gaz ionisés) - Densité ram Plasmas chauds ram High temperature plasmas Plasma density Plasma generators Plasmaerzeugung (DE-588)4174826-8 gnd rswk-swf Heißes Plasma (DE-588)4350270-2 gnd rswk-swf Heißes Plasma (DE-588)4350270-2 s Plasmaerzeugung (DE-588)4174826-8 s DE-604 Popov, Oleg A. Sonstige oth |
| spellingShingle | High density plasma sources design, physics and performance Générateurs de plasmas ram Plasmas (gaz ionisés) - Densité ram Plasmas chauds ram High temperature plasmas Plasma density Plasma generators Plasmaerzeugung (DE-588)4174826-8 gnd Heißes Plasma (DE-588)4350270-2 gnd |
| subject_GND | (DE-588)4174826-8 (DE-588)4350270-2 |
| title | High density plasma sources design, physics and performance |
| title_auth | High density plasma sources design, physics and performance |
| title_exact_search | High density plasma sources design, physics and performance |
| title_full | High density plasma sources design, physics and performance ed. by Oleg A. Popov |
| title_fullStr | High density plasma sources design, physics and performance ed. by Oleg A. Popov |
| title_full_unstemmed | High density plasma sources design, physics and performance ed. by Oleg A. Popov |
| title_short | High density plasma sources |
| title_sort | high density plasma sources design physics and performance |
| title_sub | design, physics and performance |
| topic | Générateurs de plasmas ram Plasmas (gaz ionisés) - Densité ram Plasmas chauds ram High temperature plasmas Plasma density Plasma generators Plasmaerzeugung (DE-588)4174826-8 gnd Heißes Plasma (DE-588)4350270-2 gnd |
| topic_facet | Générateurs de plasmas Plasmas (gaz ionisés) - Densité Plasmas chauds High temperature plasmas Plasma density Plasma generators Plasmaerzeugung Heißes Plasma |
| work_keys_str_mv | AT popovolega highdensityplasmasourcesdesignphysicsandperformance |