Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | German |
| Published: |
1996
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | 93 S. graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV011331931 | ||
| 003 | DE-604 | ||
| 005 | 19980417 | ||
| 007 | t | ||
| 008 | 970429s1996 gw d||| m||| 00||| ger d | ||
| 016 | 7 | |a 949897531 |2 DE-101 | |
| 035 | |a (OCoLC)614097354 | ||
| 035 | |a (DE-599)BVBBV011331931 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a ger | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-91 |a DE-355 |a DE-29T |a DE-703 |a DE-11 |a DE-188 | ||
| 084 | |a PHY 658d |2 stub | ||
| 084 | |a PHY 688d |2 stub | ||
| 084 | |a PHY 690d |2 stub | ||
| 100 | 1 | |a Goebel, Harald M. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen |c Harald M. Goebel |
| 264 | 1 | |c 1996 | |
| 300 | |a 93 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Kaiserslautern, Univ., Diss., 1996 | ||
| 650 | 0 | 7 | |a ECR-Heizung |0 (DE-588)4333887-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Wasserstoff |0 (DE-588)4064784-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Germanium |0 (DE-588)4135644-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Amorpher Zustand |0 (DE-588)4306087-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a PECVD-Verfahren |0 (DE-588)4267316-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Amorpher Zustand |0 (DE-588)4306087-0 |D s |
| 689 | 0 | 2 | |a Wasserstoff |0 (DE-588)4064784-5 |D s |
| 689 | 0 | 3 | |a PECVD-Verfahren |0 (DE-588)4267316-1 |D s |
| 689 | 0 | 4 | |a ECR-Heizung |0 (DE-588)4333887-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Germanium |0 (DE-588)4135644-5 |D s |
| 689 | 1 | 1 | |a Amorpher Zustand |0 (DE-588)4306087-0 |D s |
| 689 | 1 | 2 | |a Wasserstoff |0 (DE-588)4064784-5 |D s |
| 689 | 1 | 3 | |a PECVD-Verfahren |0 (DE-588)4267316-1 |D s |
| 689 | 1 | 4 | |a ECR-Heizung |0 (DE-588)4333887-2 |D s |
| 689 | 1 | |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007613920&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-007613920 | ||
Record in the Search Index
| _version_ | 1804125840442654720 |
|---|---|
| any_adam_object | 1 |
| author | Goebel, Harald M. |
| author_facet | Goebel, Harald M. |
| author_role | aut |
| author_sort | Goebel, Harald M. |
| author_variant | h m g hm hmg |
| building | Verbundindex |
| bvnumber | BV011331931 |
| classification_tum | PHY 658d PHY 688d PHY 690d |
| ctrlnum | (OCoLC)614097354 (DE-599)BVBBV011331931 |
| discipline | Physik |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02165nam a2200553 c 4500</leader><controlfield tag="001">BV011331931</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19980417 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">970429s1996 gw d||| m||| 00||| ger d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">949897531</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)614097354</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011331931</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 658d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 688d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 690d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Goebel, Harald M.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen</subfield><subfield code="c">Harald M. Goebel</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1996</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">93 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Kaiserslautern, Univ., Diss., 1996</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">ECR-Heizung</subfield><subfield code="0">(DE-588)4333887-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Wasserstoff</subfield><subfield code="0">(DE-588)4064784-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Germanium</subfield><subfield code="0">(DE-588)4135644-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Amorpher Zustand</subfield><subfield code="0">(DE-588)4306087-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">PECVD-Verfahren</subfield><subfield code="0">(DE-588)4267316-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Amorpher Zustand</subfield><subfield code="0">(DE-588)4306087-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Wasserstoff</subfield><subfield code="0">(DE-588)4064784-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">PECVD-Verfahren</subfield><subfield code="0">(DE-588)4267316-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">ECR-Heizung</subfield><subfield code="0">(DE-588)4333887-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Germanium</subfield><subfield code="0">(DE-588)4135644-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Amorpher Zustand</subfield><subfield code="0">(DE-588)4306087-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Wasserstoff</subfield><subfield code="0">(DE-588)4064784-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="3"><subfield code="a">PECVD-Verfahren</subfield><subfield code="0">(DE-588)4267316-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="4"><subfield code="a">ECR-Heizung</subfield><subfield code="0">(DE-588)4333887-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007613920&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-007613920</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV011331931 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:07:57Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007613920 |
| oclc_num | 614097354 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-29T DE-703 DE-11 DE-188 |
| owner_facet | DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-29T DE-703 DE-11 DE-188 |
| physical | 93 S. graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| record_format | marc |
| spelling | Goebel, Harald M. Verfasser aut Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen Harald M. Goebel 1996 93 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Kaiserslautern, Univ., Diss., 1996 ECR-Heizung (DE-588)4333887-2 gnd rswk-swf Wasserstoff (DE-588)4064784-5 gnd rswk-swf Germanium (DE-588)4135644-5 gnd rswk-swf Amorpher Zustand (DE-588)4306087-0 gnd rswk-swf PECVD-Verfahren (DE-588)4267316-1 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Amorpher Zustand (DE-588)4306087-0 s Wasserstoff (DE-588)4064784-5 s PECVD-Verfahren (DE-588)4267316-1 s ECR-Heizung (DE-588)4333887-2 s DE-604 Germanium (DE-588)4135644-5 s DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007613920&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Goebel, Harald M. Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen ECR-Heizung (DE-588)4333887-2 gnd Wasserstoff (DE-588)4064784-5 gnd Germanium (DE-588)4135644-5 gnd Amorpher Zustand (DE-588)4306087-0 gnd PECVD-Verfahren (DE-588)4267316-1 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4333887-2 (DE-588)4064784-5 (DE-588)4135644-5 (DE-588)4306087-0 (DE-588)4267316-1 (DE-588)4077445-4 (DE-588)4113937-9 |
| title | Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen |
| title_auth | Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen |
| title_exact_search | Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen |
| title_full | Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen Harald M. Goebel |
| title_fullStr | Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen Harald M. Goebel |
| title_full_unstemmed | Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen Harald M. Goebel |
| title_short | Abscheidung von hydrogenisierten amorphen Halbleiterschichten aus ECWR-Plasmen |
| title_sort | abscheidung von hydrogenisierten amorphen halbleiterschichten aus ecwr plasmen |
| topic | ECR-Heizung (DE-588)4333887-2 gnd Wasserstoff (DE-588)4064784-5 gnd Germanium (DE-588)4135644-5 gnd Amorpher Zustand (DE-588)4306087-0 gnd PECVD-Verfahren (DE-588)4267316-1 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | ECR-Heizung Wasserstoff Germanium Amorpher Zustand PECVD-Verfahren Silicium Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007613920&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT goebelharaldm abscheidungvonhydrogenisiertenamorphenhalbleiterschichtenausecwrplasmen |