Optical diagnostics for thin film processing:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
San Diego [u.a.]
Acad. Press
1996
|
| Subjects: | |
| Physical Description: | XXIX, 783 S. Ill., graph. Darst. |
| ISBN: | 0123420709 |
Staff View
MARC
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| author | Herman, Irving P. |
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| dewey-search | 621.3815/2/0287 |
| dewey-sort | 3621.3815 12 3287 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV011220546 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:06:02Z |
| institution | BVB |
| isbn | 0123420709 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007528007 |
| oclc_num | 32508558 |
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| physical | XXIX, 783 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Acad. Press |
| record_format | marc |
| spelling | Herman, Irving P. Verfasser aut Optical diagnostics for thin film processing Irving P. Herman San Diego [u.a.] Acad. Press 1996 XXIX, 783 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Spectrum analysis Industrial applications Thin films Surfaces Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Optische Eigenschaft (DE-588)4123887-4 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s Optische Eigenschaft (DE-588)4123887-4 s DE-604 |
| spellingShingle | Herman, Irving P. Optical diagnostics for thin film processing Spectrum analysis Industrial applications Thin films Surfaces Dünne Schicht (DE-588)4136925-7 gnd Optische Eigenschaft (DE-588)4123887-4 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4123887-4 |
| title | Optical diagnostics for thin film processing |
| title_auth | Optical diagnostics for thin film processing |
| title_exact_search | Optical diagnostics for thin film processing |
| title_full | Optical diagnostics for thin film processing Irving P. Herman |
| title_fullStr | Optical diagnostics for thin film processing Irving P. Herman |
| title_full_unstemmed | Optical diagnostics for thin film processing Irving P. Herman |
| title_short | Optical diagnostics for thin film processing |
| title_sort | optical diagnostics for thin film processing |
| topic | Spectrum analysis Industrial applications Thin films Surfaces Dünne Schicht (DE-588)4136925-7 gnd Optische Eigenschaft (DE-588)4123887-4 gnd |
| topic_facet | Spectrum analysis Industrial applications Thin films Surfaces Dünne Schicht Optische Eigenschaft |
| work_keys_str_mv | AT hermanirvingp opticaldiagnosticsforthinfilmprocessing |