Ferroelectric thin films V: symposium held April 7-12, 1996, San Francisco, California, U.S.A
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Pittsburgh, Pa.
MRS
1996
|
| Series: | Materials Research Society: Materials Research Society symposia proceedings
433 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XV, 449 S. Ill., graph. Darst. |
| ISBN: | 1558993363 |
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| 245 | 1 | 0 | |a Ferroelectric thin films V |b symposium held April 7-12, 1996, San Francisco, California, U.S.A |c eds.: Seshu B. Desu ... |
| 264 | 1 | |a Pittsburgh, Pa. |b MRS |c 1996 | |
| 300 | |a XV, 449 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 433 | |
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| _version_ | 1804125676090949632 |
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| adam_text | CONTENTS
Preface
.................................................................xiii
Acknowledgments
......................................................xv
Materials Research Society Symposium Proceedings
....................xvi
PARTI: HIGH DIELECTRIC CONSTANT THIN FILMS
FOR DRAM APPLICATIONS
Low Temperature Fabrication of (Ba,Sr)TiO3 Thin Films by
ECR Plasma CVD
.........................................................3
Y.
Kato,
H.
Yabuta,
S.
Sone,
H. Yamaguchi, T.
iizuka,
S. Yamamichi,
P-Y. Lesaicherre, S. nishimoto, and M. Yoshida
Preparation and Characterization of
(Sr,.xTix)O3
and
(Ba,.xSrx)TiO3
Thin Films Using ECR Plasma Assisted MOCVD
...............9
Kwangsoo
По,
Joon
Sung Lee, Han Wook Song, Won Jong Lee,
Byoung
Gon Yu,
and Zhong-Tao Jiang
Defects and Electronic Transport in Rare Earth Doped
Epitaxial SrTiO3 Thin Films
................................................21
S.R. Gilbert, B. W. Wessels, P. W. Brazis, T.P. tiogan,
and C.R.
Kannewurf
Influence of Strontium Concentration on the
Microstructure
and Electrical Properties of Sol-Gel
Derived Barium Strontium Titanate Thin Films
.............................27
Л/.С.
Gust, L.A. Momoda, and
14.
L. Mecartney
Characterization of MIS Capacitor of BST Thin Films
Deposited on Si by RF Magnetron Sputtering
..............................33
S.H. Paek, C.S. Park, J.H. Won, and K.S. Lee
Thin Films of (Ba,Sr)TiO3 by Aerosol Combustion
..........................39
A. Kussmaul,
A.C.
Greenwald, C.H. Wei, and T.F. Morse
Microstructural
Control of R11O2 Electrode and the Related
Properties of (Ba,Sr)TiO3 Thin Films
.......................................45
D.K. Choi, J.Y. Choi, J.H. Won, and S.H. Paek
The Investigations of Dielectric Properties of BaTiO3
Thin Films on Polycrystalline Pt Substrates by RF
Magnetron Sputtering
...................................................51
Jin Wook Jang,
Woon
Jo Cho, Taek Sang
Hahn, Sang
Sam Choi,
and
Su
Jin Chung
Invited Paper
Leakage Current Behaviors of Bao.5Sro.5nO3 Thin Films on Pt,
RuO2,
and
М/КиОг
Bottom Electrodes
....................................57
W. Jo, D.C. Kim,
U.M.
Lee, andK.Y. Kim
Characterization of SrxBai.xTiO3 Pulsed Laser Deposition
Thin Films
...............................................................63
W.
Pérez,
Sampriti Sen, J.
Cordero,
E.
Ching-Prado,
R.
S.
Katiyar,
J.S. ttorwitz, and L.A. Knauss
The Effects of the Precursor Solutions on the Structure and
the Properties of Sol-Gel Derived BST Thin Films
..........................69
Jeong Seon Ryoo, Seong
Jun
Hang,
and Yung Sup Yoon
PARTII:
LAYERED PEROVSKITES FOR MEMORIES
Some New Results on Strontium Bismuth
Tantalate
Thin-Film Ferroelectric Memory Materials
................................77
Ј.Г.
Scott,
Л.Ј.
Hartmann,
R.n. Lamb,
Г.М.
Ross, A. DeVHbis,
CA. Paz de Araújo,
M.C.
Scott,
and O. Derbenwick
*SrBi2Ta2O9
Capacitors for a Mega-Bit Ferroelectric
Non-Volatile Memory
....................................................85
Kazushi Amanuma, Takemitsu Kunio, and Joe Cuchiaro
Preparation of Self-Patterned SrBi2Ta2O9 Thin Films from
Photo-Sensitive Solutions
...............................................91
Nobuyuki Soyama, Hiroto
lichida,
Kensuke Kageyama,
Katsumi
Оді,
Michael C. Scott. J.D. Cuchiaro, Q.F. Derbenwick,
Larry D. McMillan, and Carlos
A. Paz de Araújo
Integration Aspects and Electrical Properties of SrBi2Ta2O9
for Non-Volatile Memory Applications
...................................97
D.J. Taylor, R.E. Jones, Y.T.
Lii,
P.
Zürcher,
P.
Y. Chu,
and S.J. Qillespie
The Evaluation of SrBi2Ta2O9 Films for
Ferroelectric Memories
.................................................109
CD. Outleben
Fabrication of YMnO3 Films: New Candidate for
Non-Volatile Memory Devices
..........................................119
norifumi
Fujimura,
Tadashi Ishida, Takeshi Yoshimura, and Taichiro
Ito
Large Area Pulsed Laser Deposition of Aurivillius-Type
Layered Perovskite Thin Films
...........................................125
A. Pignolet,
С
Curran,
S.
Welke,
S.
Senz,
M.
Alexe,
D.
tiesse,
and U.
Oősele
Dielectric and Ferroelectric Properties of Pulsed Laser
Deposited Strontium Barium
Niobáte
Thin Films
..........................131
Y. Liu, CW. Ong, CX. Choy, andP.W. Chan
Invited Paper
vi
PARTIM:
ELECTRODE
SYSTEMS
Electrode Materials for Ferroelectric Capacitors:
Properties of Reactive DC Sputtered lrO2 Thin Films
.....................139
Venkatasubramani
Balu,
TungSheng Chen, Bo Jiang,
Shao-tlong Kuan, Jack C. Lee, Peir
Chu,
Robert E. Jones,
Peter
Zürcher,
Deborah J, Taylor, and Sherry Gillespie
RF Magnetron Sputter-Deposition of Lao.sSro.sCoOa/ZPt
Composite Electrodes for Pb(Zr,Ti)O3 Thin Film Capacitors
..............145
M.V. Raymond,
Н.П.
AlShareef,
В.Л.
Tuttle, D.
Dimos,
and
J.T.
Evans
Dependence of Composition and
Microstructure
of RuOx
Films on Target Status and Substrate Temperature in
Reactive Sputtering Deposition
.........................................151
Q. Wang,
К.-Л.
Yang,
A. Franciosi,
D.F.
Evans, and W.L. Oladfelter
Microstructure
of Pulsed-Laser Deposited PZT on Polished
and Annealed MgO Substrates
.........................................157
Simon L. King,
Luigi
Q.
Coccia,
J.O.E. Oardeniers,
and Ian
W. Boyd
Effect of Electrodes on Crystallization and Electrical
Properties of Ferroelectric PZT Films Deposited by RF
Magnetron Sputtering
..................................................163
B. Ea-Kim, F. Vamiere, M.C.
Hugon,
В.
Agius,
R.
Bisaro,
and
J.
Olivier
Effects of Sputter-Deposited LaNiO3 Electrode on the
Deposition and Properties of Ferroelectric Thin Films
....................169
T.B. Wu, J.M. Wu, CM. Wu, M.J. Shyu, M.S. Chen, J.S. Dorng.
andC.C. Yang
Microstructural
Characterization of
Pt
/Ті
and RuO2
Electrodes on SiO2/Si Annealed in the Oxygen Ambient
.................175
Jeong
Soo
Lee, tlyun
Ja
Kwon, Young Woo Jeong, tiyun Ha Kim,
Kyu Ho Park, and
Cha Yeon
Kim
Effect of Surface Morphology of NiCr-Bottom Electrode
on Preparation of Ferroelectric PZT Thin Film Capacitor
..................181
K.B.
Lee, B.R.
Rhee, and S.K.
Ото
PART IV: PROCESS INTEGRATION. PZT
Dry Etching Issues in the Integration of Ferroelectric Thin
Film Capacitors
........................................................189
O.E.
Menk, S.B.
Desu, W.
Pan, and D.P. Vijay
Step Coverage of Pb(Zr,Ti)O3 Thin Films Grown
by MOCVD
............................................................ 201
M. Shimizu, S. Hyodo, H. Fujisawa, H.
Пій,
and T. Shiosaki
Vii
С
-Axis Oriented Thin Films of PbZrO3 on Silicon Substrate
by Pulsed Laser Ablation
...............................................207
S. Chattopadhyay,
V.R.
Palkar, P. Ayyub, S.C.
Purandare, S.P.
Pai,
P.R.
Apte,
R.
Pinto, and M.S. Multani
Microstructure
Control in MOCVD PZT Thin Films
........................213
Daesig Kim, Tae-Young Kim, June Key Lee, W. Tao,
and Seshu B.
Desu
Analysis of Pulsed Excimer Laser Ablation of PZT,
Pb and
Γι
in an Oxygen Ambient Using Energy Dispersive
Mass Spectrometry
....................................................225
L.Q.
Coccia, G.C.
Tyrrell, and
I.W. Boyd
Multilayer Lead Zirconate
manate
and Barium Titanate
Ferroelectric Capacitors
...............................................231
L.H. Chang and W.A. Anderson
Preparation of PbZrxTii.xO3 Thin Films by KrF Excimer Laser
Ablation Technique
....................................................237
Hiromitsu Kurogi, Yukihiko Yamagata, Tomoaki Ikegami,
Kenji Ebihara, and
Bok Yin Tong
Low Temperature Growth of PZT(52/48) Thin Films Using RF
Magnetron Sputtering Method
..........................................243
Tae Song
Kim, Dong Joo Kim, Jeon Kook
Lee, and Hyung Jin Jung
Microstructural
Characterisation of Pb(Zro.s2Tio.48)03 Thin
Films Deposited on RuO2 Electrodes by Laser Ablation
...................249
A. De
Benedittis,
A. Di
Cristoforo, P. Mengucci, O. Majni,
A. Diodati,
F.
Leccabue,
B.E.
Watts,
D.
Seuret,
and
J.
Sweets
PART V: DEFECTS. STRUCTURE-PROPERTY RELATIONSHIPS
Voltage Shifts and Defect-Dipoles in
Ferroelectric Capacitors
...............................................257
W.L. Warren,
O.E.
Pike, D.
Dimos.
К.
Vanheusden,
H.1Ï.
Al-Shareef,
B.A. Tuttie, R. Ramesh. andJ.T. Evans, Jr.
Polarization Relaxation in PZT/PLZT Thin Film Capacitors
.................267
Bo Jiang, Venkatasubramani
Balu,
Tung-Sheng Chen,
Shao-Hong Kuah, and Jack C. Lee
Retentivity Studies on Lead Zirconate Titanate Thin
Film Capacitors
........................................................273
In K. Yoo, Chang J. Kim, and Seshu B.
Desu
Invited Paper
viii
Electronic
Structure
of the Layered Ferroelectric
Perovskite SrBi2Ta2O9
..................................................279
J. Robertson.
С
W.
Chen, and W.L. Warren
Leakage Currents in CVD (Ba,Sr)TiO3 Thin Films
..........................285
C. Basceri, S.K. Streiffer, A.I. Kingon, S. Bilodeau, R. Carl,
P.C.
van Buskirk, S.R.
Summerfeit,
P. Mclntyre, and R. Waser
Influence of
РЬТіОз
Buffer Layers on
Microstructural
Properties of Pb(Zr,Ti)O3 Films Deposited by Sputtering
..................291
E. Caftan,
R.
Кота,
a. Velu,
B. Jaber. D.
Remiens,
and
В.
Thierry
Х
-Ray Texture Analysis of Oriented
ΡΖΓ
Thin Films
........................297
C.R. Peterson,
ГІ.
W. Medendorp, Jr.,
Ł.B.
Slámovích,
and
K.J.
Bowman
PART VI: THEORY. DOMAINS AND SIZE EFFECTS
Integrated Decoupling Capacitors Using Pb(Zr,Ti)O3
Thin Films
..............................................................305
D.
Dimos,
S.J.
Lockwood,
T.J. Garino,
Н.П.
Ai-Shareef,
and R. W. Schwartz
Piezoelectric Characterization of Bulk and Thin Film
Ferroelectric Materials Using Fiber Optics
...............................317
J.T. Dawley, Q. Teowee, B.J.J. Zelinski, and D.R. Uhimann
Thickness-Dependent Electrical Properties in
Lanthanum-Doped PZT Thick Films
......................................325
H.D. Chen, K.K.
Li, C.J.
Qaskey, and L.E. Cross
Domain Structure of Tetragonal PLT Epitaxial Thin Films on
MgO
(001)
Single Crystal Substrates
....................................333
Y.M. Kang, J.K. Ku, and S. Baik
Study of Thin Film Ferroelectric Superlattices
...........................339
Y. Kim, A. Erbil, E. VI. Thomas, A. Kushwaha, and R.
Gerhardt
The Phase Diagram of Epitaxial BaTiO3 Films Under
Bi-Axial Stress
..........................................................345
S.B.
Desu, Z.J.
Chen, V.P. Dudkevich, P.V. Dudkevich,
І.П.
Zakharchenko, and Q.L. Kushlyan
In Situ Investigation of Crystallization Kinetics in PZT Films
by Light Scattering
.....................................................351
V.Ya. Shur,
S.A.
Megashev, A.L. Subbotin, E.A.
Borisova,
and S. Troiier-McKinstry
Invited Paper
Processing
and Piezoelectric Properties of MOO PZT Films
and PZT/Polymer Composite Coatings
..................................357
J.S. Wright and L.F. Francis
Size Effects and Domains in Ferroelectric Thin
Film Actuators
.........................................................363
S. Trolier-McKinstry,
С.Л.
Randall, J.P. Maria, C. Theis,
D.O.
Schlom,
J. Shepard, Jr., and K. Yamakawa
PART
VII: PYROELECTRIC.
OPTICAL AND FIELD EFFECT DEVICES
Preparation and Pyroelectric Properties of La-Modified
РЬТЮз
Thin Films by RF-Magnetron Sputtering
...........................377
T. Kamada, R. Takayama, A. Tomozawa, S.
Fujii.
К.
lijima, and T. tlirao
Structure, Composition and Properties of (Pb,La)TiO3 Thin
Films by RF Magnetron Sputtering
.......................................389
C.E. Murphy, H.
Hata,
and K. Tsutsumi
Growth of Metal Alkoxide Solution Derived Epitaxial
UNbO3 Thin Films for Optical Waveguides
...............................395
Keiichi riashimoto, Shigetoshi liakamura, and Hiroaki Moriyama
Epitaxial KNbO3 and Fe-Doped KNbO3 Thin Films Prepared
by the Sol-Gel Technique
...............................................401
Yuhuan Xu, Chih-tising Cheng, and John D. MacKenzie
Optical and Electrical Characterizations of PZT Films with
Different O/Pb Stoichiometry
...........................................407
M.C.
Hugon,
В.
Ea
Kim,
F. Varniere,
В.
Agius, and
E. nasetti
Pyroelectric
Properties of the
PLT(IO)
Thin Film on the
P-Doped Poly Silicon
...................................................413
Seong
Jun líang,
Yung Sup Yoon, and Dong II Kim
Effect of Rapid Thermal Processing on the Crystallization
Properties of
РЬТЮз
Ferroelectric Thin Film
..............................419
Jianguo Zhu,
Meng
Chen, Wenbing Peng, Fahua
Lan.
E.
V. Sviridov,
and Dingquan Xiao
Photoelectric Properties of
РЬТіОз
/Si
Heterostructures
.................425
M.
Мехе.
L.
Pintìlie,
1.
Pintilie. A. Pignolet,
S.
Senz. and
D.
Hesse
Dielectric and Ferroelectric Characterization of Sol-Gel
Derived Ca-Doped PbTiO3 Thin Films
....................................431
Q. Teowee,
U.C.
McCarthy, E.K.
Franke,
J.M. Boulton,
T.P. Alexander, T.J. Bukowski. and D.R. Uhlmann
•Invited Paper
Characterization
of PZT Films by Scanning Force
Microscopy (SFM)
......................................................437
denaro
Zavala,
Susan
E.
Trolier-McKinstry, and
Janos
H. Fendler
Author Index
...........................................................443
Subject Index
..........................................................447
|
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| bvnumber | BV011180675 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
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| classification_tum | ELT 066f |
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| dewey-ones | 621 - Applied physics |
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| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1996 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1996 San Francisco Calif. |
| id | DE-604.BV011180675 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:05:20Z |
| institution | BVB |
| isbn | 1558993363 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007497730 |
| oclc_num | 36056059 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-703 DE-29T |
| owner_facet | DE-91G DE-BY-TUM DE-703 DE-29T |
| physical | XV, 449 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | MRS |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Ferroelectric thin films V symposium held April 7-12, 1996, San Francisco, California, U.S.A eds.: Seshu B. Desu ... Pittsburgh, Pa. MRS 1996 XV, 449 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 433 Ferroelectric thin films Congresses Ferroelektrikum (DE-588)4154121-2 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1996 San Francisco Calif. gnd-content Ferroelektrikum (DE-588)4154121-2 s Dünne Schicht (DE-588)4136925-7 s DE-604 Desu, Seshu B. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 433 (DE-604)BV001899105 433 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007497730&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Ferroelectric thin films V symposium held April 7-12, 1996, San Francisco, California, U.S.A Materials Research Society: Materials Research Society symposia proceedings Ferroelectric thin films Congresses Ferroelektrikum (DE-588)4154121-2 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4154121-2 (DE-588)4136925-7 (DE-588)1071861417 |
| title | Ferroelectric thin films V symposium held April 7-12, 1996, San Francisco, California, U.S.A |
| title_auth | Ferroelectric thin films V symposium held April 7-12, 1996, San Francisco, California, U.S.A |
| title_exact_search | Ferroelectric thin films V symposium held April 7-12, 1996, San Francisco, California, U.S.A |
| title_full | Ferroelectric thin films V symposium held April 7-12, 1996, San Francisco, California, U.S.A eds.: Seshu B. Desu ... |
| title_fullStr | Ferroelectric thin films V symposium held April 7-12, 1996, San Francisco, California, U.S.A eds.: Seshu B. Desu ... |
| title_full_unstemmed | Ferroelectric thin films V symposium held April 7-12, 1996, San Francisco, California, U.S.A eds.: Seshu B. Desu ... |
| title_short | Ferroelectric thin films V |
| title_sort | ferroelectric thin films v symposium held april 7 12 1996 san francisco california u s a |
| title_sub | symposium held April 7-12, 1996, San Francisco, California, U.S.A |
| topic | Ferroelectric thin films Congresses Ferroelektrikum (DE-588)4154121-2 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Ferroelectric thin films Congresses Ferroelektrikum Dünne Schicht Konferenzschrift 1996 San Francisco Calif. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007497730&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT desuseshub ferroelectricthinfilmsvsymposiumheldapril7121996sanfranciscocaliforniausa |