Polycrystalline thin films: structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A.
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| Language: | English |
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Pittsburgh, Pa.
Materials Research Soc.
1996
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| Series: | Materials Research Society: Materials Research Society symposia proceedings
403 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XVII, 772 S. Ill., graph. Darst. |
| ISBN: | 1558993061 |
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| 245 | 1 | 0 | |a Polycrystalline thin films |b structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. |c eds.: Harold J. Frost ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1996 | |
| 300 | |a XVII, 772 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 403 | |
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1995 |z Boston Mass. |2 gnd-content | |
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| 700 | 1 | |a Frost, Harold J. |e Sonstige |4 oth | |
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| adam_text | TABLE
OF
CONTENTS
Preface
................................................................ xvii
Materials Research Society Symposium
Proceedings
....................xviii
PART
I
-
MICROSTRUCTURAL EVOLUTION
Thermodynamics of Hole and Hillock Growth in Thin Films
...................3
D.J. Srolovitz, W. Yang, and
Λί.Ο.
Qoldiner
Grain Rotation in Thin Films of Gold
....................................... 15
Alexander H. King and Karen E. Harris
Evolution of the Surface Structure of CVD Tungsten
During Annealing
......................................................... 21
C.L.
Briant,
R.H.
Wilson,
L.
Bigio,
and W.G. Morris
Microstructural Characterization of Platinum Films Grown
by MOCVD
...............................................................27
Λί.
Vellaikal, S.K. Streiffer, R.R. Woolcott, Jr., and A.I. Kingon
Origin of In-Plane Texturing in Sputtered Mo Films
......................... 33
A.K. Malhotra, S.M. Yalisove, and J.C. Bilello
Growth and Texture of Polycrystalline Thin Films
.......................... 39
Richard W. Smith, Feng Ying, and David J. Srolovitz
Engineering Desired Grain Orientation and Boundaries
Separating Adjacent Grains in Polycrystalline Thin Films
................... 45
I.A. Rauf
and M. Sayer
Reactive Phase Formation in Thin Films: Evolution of
Grain Structure
.......................................................... 51
K. Barmak, C.
Michaelsen,
J. Rickman, and M. Dahms
Texture Maps for Orientation Evolution during Grain Growth
in Thin Films
.............................................................. 63
Steven C. Seel, Roland
Carel,
and Carl V. Thompson
Using Principle of Virtual Motion and Galerkin
Approximation to Analyze Surface Diffusion
...............................71
B. Sun, Z.
Suo,
and
A.C.F.
Cocks
Grain Growth Simulation of
(001)
Textured YBCO Films
Grown on
(001)
Substrates with Large Lattice Misfit:
Prediction of Misorientations of the Remaining Boundaries
.................77
Julio
С
Rodriguez,
5.
Ling, J. Tsai. and Siu-Wai Chan
Invited Paper
Growth and Thermal Stability of Thin Niobium Overlayers
on
(0001)
Sapphire Substrates
........................................... 83
T. Wagner, M.
Lorenz, P.A. Langjahr,
and
M.
Růhle
Features of the Metal Nuclei Spatial Distribution on the
Glassy Carbon Surface during the Receipt of Thin Films
by Electrolysis
........................................................... 89
T.A. Arzhanova,
N.
Ya.
Kovářsky,
and T. V. Radchenkova
Mechanisms of
Hydrothermal
Barium Titanate Thin
Film Formation
........................................................... 95
F. Dogan and M. Sarikaya
Controlled Nucleation and Growth in the Hydrothermal-
Electrochemical Formation of BaTiO3 Films
.............................. 101
I. Escobar,
С
Silva,
J.
Lorca, V.M. Fuenzalida,
Judit.
G. Lisoni,
and T.
Vargas
The Use of Disordered Interlayers to Enhance Nucleation
of Silicon Nitride during Chemical Vapor Deposition
..................... 107
Rachel E. Boekenhauer, Frederick S.
Lauten,
and Brian W. Sheldon
Controlled Grain Size and Location in Ge Thin Films on
Silicon Dioxide by Low Temperature Selective Solid Phase
Crystallization
.......................................................... 113
CM. Yang and harry A. Atwater
Microstructure
and Stress in Mo Films Sputter-Deposited on
Glass Substrates
....................................................... 119
Tsang-Shaw Lee, Oin-Lern
Ou,
and Bae-tieng Tseng
PARTII:
INTERFACES AND MECHANICAL PROPERTIES
Depth Dependence of Residual Strains in Textured Mo Thin
Films Using High-Resolution X-ray Diffraction
............................. 127
S.O.
Malhotra.
Z.U.
Rek, S.M.
Yalisove, and J.C. Bilello
Steady-State Creep of Thick and Thin-Film Multilayers
.................. 133
Y.-L. Shen and S. Suresh
Tensile Tests of Low Density Multilayer Thin Films
........................ 139
D. van
Heerden,
D.
Josell, and D. Shechtman
Properties and Fracture Resistance of Thin Polycrystalline
Aluminum Films on Sapphire Substrates
.................................. 145
n.R. Moody, D. Medlin, S. Quthrie. R.Q. Hwang, and K.F. McCarty
Measurement of the
Interfacial
Shear Strength of Thin
Copper Films on Sapphire by Microindentation Experiments
............. 151
Q. Dehm, R. Raj, and M.
Rühle
Vi
Study of the Hall-Petch Dependence in an Annealed
Nanocrystalline Iron Ttiin Film
............................................ 157
J.B. Savader, M.R.
Scanion,
R.C. Cammarata, D.T. Smith,
and
С
Hayzelden
Giant Magnetoresistivity in Electrochemically Produced
Cobalt-Copper Multilayers
............................................. 161
David S. Lashmore and Susan Z.
Hua
Elastic Property Estimation in Polycrystalline Films with
Crystallographic Texture and Grain Shape
............................... 171
B.C. tiendrix, L.O. Yu, K.W. Xu, and J.W. tie
X-ray Residual Stress Measurement in Films with
Crystallographic Texture and Grain Shape
................................177
L.Q. Yu, B.C. Hendrix, K.W. Xu, J.W. He, and H.C.
Ou
Ultrasmooth, Conducting Films Composed of
Mo/Si Multilayers
....................................................... 183
D.O.
Stearns, S.L. Baker, and M.A. Wall
Materials Compatibility between Si/SiC^ Substrates and
BaTO3Thin Films
........................................................ 189
J.V.
Caballero,
V.M.
Fuenzalida, R.
Ávila,
and I. Eisele
PARTIM:
CHARACTERIZATION OF
MICROSTRUCTURE
Investigation of Aluminum Thin Films Using Electron
Backscatter Diffraction and the New Technique of
Orientation Imaging Microscopy
........................................ 197
D.J. Dingley and D.P. Field
Rodrigues-Frank Space Representations of Fiber Texture
................ 207
Krishna
Rajan
and Ronald Petkie
Grain Orientation Mapping and Spatially Resolved Strain
Measurements for Polycrysfalline Films by X-ray
Microdiffraction
....... 213
P.
-С.
Wang, G.S. Cargill, III, I.C.
Поуап,
and E.G. Liniger
Characterizing Surfaces and Overlying Multilayer
Structures Using Grazing Incidence X-ray Reflectivity
.................... 219
Joseph Pedulla, Richard D.
Deslattes,
Karsten
D. Joensen,
and Paul Gorenstein
PART IV: HARD AND REFRACTORY FILMS
Synthesis and Properties of Crystalline Carbon Nitride
Composite Superhard Coatings
......................................... 227
Yip-Wah Chung
Invited Paper
VII
Surface
Morphology
and Microstructure
of
Al-O
Alloys
Grown by ECR Plasma Deposition
........................................ 235
D.A. Marshall J.C.
Barbom,
D.M.
Follstaedt, A.J. Howard,
and
K.J.
Lad
Indentation Fracture Studies of
a
ВаТіОз
Thin Film on a
Silicon Substrate
....................................................... 241
Wai-Ming
tlo,
Ran
Fu,
Kai-Tak Wan, Ji
Chou,
and Tong-Yi Zhang
On Superstoichiometric Ti-C,
Si
-С
and
Ta
-С
PVD Coatings
............... 247
O. Knotek,
E.
Lugscheider,
F. Löffler,
and
C. Barímani
Microstructural
Characterization of a Zirconia-Titania-Yttria
Thermal Barrier Coating
................................................. 253
P. Diaz, B. Ralph, and M.J. Edirisinghe
Effect of Thickness and Substrates on the Mechanical
Properties of Tantalum and Tantalum Nitride Thin Films
.................. 259
Ranjana Saha, Rama
β.
Intuii,
and John A. Barnard
Evaluation of Mechanical Properties of Sputtered Ceramic
Films from Nanoindentation and Wafer Curvature
Techniques
.............................................................265
Rama B.
Intuii
and John A. Barnard
Polycrystalline
ß-SiC
Film Growth on Si by ECR-CVD at
178 - 500°
С
............................................................ 271
Kuan-Lun Cheng, Chih-Chien Liu, Chung-Min
Fu,
Huang-Chung Cheng, Chiapyng Lee, and Tri-Rung Yew
Microstructure
and Mechanical Properties of
Plasma Assisted CVD Ti(C,N) Films as a Function
of Carbon Content
......................................................277
K.W. Xu, ti.L. Sun,
П.Ѕ.
Ни,
and B.C. Hendrix
Growth and Characterization of Hard Nitrides Films
Prepared by Pulsed Laser Deposition
.................................... 283
R.B. ¡nturi, Ashok Kumar, U. Ekanayake,
П.
Shu, and
Ј.Л.
Barnard
ТЕМ
Study of Diamond Films Grown from
Fullerene
Precursors
....................................................291
R. Csencsits.
D.M.
Qruen, A.R. Krauss, and C. Zuiker
High Resolution Electron Microscopy of Sputter-Deposited
Zirconia-Alumina Nanolaminates
........................................ 297
M.A.
Schoneid,
R. Whig, C.R.
Aita,
and M. Qajdardziska-Josifovska
PARTV: POLYCRYSTALLINE SILICON
Laser Crystallized PolysHicon Thin Films and Applications
...............305
J.B. Boy
ce,
P.
Mei,
D.
К.
Fork,
Q.B.
Anderson, and R.I. Johnson
Invited Paper
viii
Effect of the Grain Growth Process on the Characteristics
for the Excimer Laser Crystallized Poly-Si Thin Film
Transistors
.............................................................315
Hiroshi Okumura, Hiroshi Tanabe, and
ľujio Okumura
Polycrystalline Silicon Films for Microelectromechanical
Devices
................................................................ 321
H.
Kahn,
S.
Stemmer,
R.L. Mullen,
M.A.
Huff, and
А.П.
Heuer
Polysilicon Waveguides for Silicon Photonics
............................ 327
Anuradha M. Agarwal,
Marcie
R.
Black, James S.
Foresi,
Ling Liao,
Yaping Liu, and L.
C. Kimerling
Rapid Thermal Chemical Vapor Deposition of
Polycrystalline Silicon-Germanium Films on SiO2
and Their Properties
.................................................... 333
V.Z-Q Li, M.K Mirabedini, R.T. Kuehn, D. Gladden, D. Batchelor,
K. Christenson, J.J. Wortman, M.C. Ozturk, and
D.M.
Maher
Surface Morphology of P-Doped LPCVD Silicon Films
.....................339
Rodiča
Plugarii,
E.
Vasile, P. Cosmin, Silvia Cosmin, C. Cobianu,
and D. Dascalu
Growth of Polycrystalline Silicon Films at Low Temperature
by Plasma Enhanced Chemical Vapor Deposition
........................345
Y. rlatanaka, A.tl. Jayatissa, K. ¡shikawa, and Y. fiakanishi
Silicon Recrystallization in
SIPOS
Material Obtained
by Disilane
.............................................................351
J.J. Pedroviejo, B.
Garrido, J.C.
Ferrer, A. Cornet, E.
Scheid,
andJ.R.
Morante
Effect of Substrate Heating during Excimer Laser
Annealing on Poly-Si TFT
................................................ 357
T. Noguchi, A.J. Tang, J.A. Tsai, and R.
Reif
Ar+ Implantation Effects on Polycrystalline Thin Films
.................... 363
J.H. Lee, C.W. Hwang, J.E. Shin, Y.S. Jin, and S.B.
Mah
Boron Induced Changes in the Structural Properties of
Amorphous Silicon Boron Alloys
......................................... 369
G-R. Yang, M.
Abbuii,
and B. Y.
Tong
Effects of Deposition Parameters on Crystallization of
PECVD Amorphous Silicon Films
......................................... 373
Yaozu Wang, Reece
Kingi,
Osama O. Awadelkarim,
and Stephen J. Fonash
Mechanical Properties of Thermally Crystallized
Boron-Doped Silicon Thin Films
.......................................... 379
P.
Scaľidi, J.
Caii,
and
E.
Bustarret
Effects of Impurities on the Crystallization and Grain
Growth of Polycrystalline Si Films
........................................ 385
Jae-Cheol Paih, Kwang-Hyun Park,
Woon
Choi, Seung-Eui
Пат,
and tlyoung-June Kim
Fabrication of Polycrystalline Silicon on Glass from
Fluorinated
Precursors with the Aid of Atomic Hydrogen
..................391
T. Akasaka, D. tie, and I. Shimizu
PART VI: ELECTRICAL PROPERTIES
Application of Rapid Thermal Annealing on LPCVD
Polysilicon Films for Piezoresistivity
..................................... 399
P. Kieimann,
M. Le
Berre, D.
Barbier, and P. Pinard
Resistance Decrease of Phosphorus Ion Implanted Poly-Si
Thin Films during Low Temperature Annealing
............................405
H. Tokioka, Y. Masutani, Y. Qoto, S. Nagao, and H. Kurokawa
Selective Deposition of Polycrystalline Silicon Thin Films by
Hot-Wire CVD
..........................................................411
Shuangying Yu, Erdogan Oulari, and
Jerzy Kanicki
High Performances of Low Temperature
(< 600^)
Unhydrogenated Polysilicon Thin Film Transistors
........................ 417
L.
Pichón,
ľ.
Raouit, K. Mourgues, and O. Bonnaud
Damageless Magnetron Sputtering Deposition of SnO2:Sb
Thin Films with Compensation Methods
.................................. 423
Sung ho Shin, Kug-Hyun Song, Hwang
Ja
Park, Tadashi Ishida.
and
Osamu
Jabata
Annealing Effects of Indium-Tin Oxide Films Produced by
Atmospheric RF Plasma Deposition Technique
...........................429
R.W. Moss,
D.H.
Lee, K.D.
Vuong, J. Ryan, J. Pagan,
Я.А
Condrate, Sr.. and X.W. Wang
Improved Spray-Pyrolysis Deposition System for
Polycrysfalline Conductive SnO2 Thin Films
.............................. 435
V.
Foglietti,
Л.
Ga/bato,
A. Bearzotti,
Α.
Galloppa,
and P. Maltese
Crystalline Grains and Electrical Properties of Vacuum-Evaporated
SnO2 Thin Films
......................................................... 441
W.K. Man,
П.
Yan, S.P. Wong, T.K.S. Wong, and
IM.
Wilson
Effective Conductivity Modelling of Polycrystalline ZnO
Thin Films
............................................................... 447
M.
Robles,
J.
Tagúeña-Martínez,
and J.A. Del Rio
Growth and Structural Studies of Thin Films in the
Mo-Bi-O System
........................................................453
L.E.
Depero,
L. Sangaletti,
M. Zocchi,
and
O.A.
Rizzi
Sol-Gel
Route to Oxygen Ion Conductors in Thin Film Form
................459
J.W. Pell,
K.M.
Delak, and ti.-C.
zur
Loye
Microstructure
and Electrical Properties of Zinc Films on InP
.............. 465
E.
Kamińska
,
A. Piotrowska, A. Barcz, S. Kasjaniuk, E.
Mizera,
and E. Dynowska
Electric and Optical Properties of
цс-5і,Єе:Н
Alloys
Deposited by Reactive Magnetron Sputtering (RMS)
..................... 471
S.W.
С/ю,
D. Wolfe, K. Christensen, G. Lucovsky, and
D.M.
Maher
Structure and Properties of
W
and Mo-Subcontact Layers
Influenced by Thermal Annealing
.........................................477
K.A. Qesheva, Q. Stoyanov, A. tiarizanova, and
R. Štefanov
Development of High-Performance GaAs Solar Cells on
Large-Grain Polycrystalline Ge Substrates
...............................483
R. Venkatasubramanian, B. O Quinn, J.S. Hills, M.L. Timmons,
O.P.
Malta, B. Key
es,
and R. Ahrenkiel
Thermodynamics and
Microstructure
Development in the
Thin Film Reaction of Aluminum on Silicon Carbide
.......................489
T.S. Hayes, F.T. Ray,
K.P.
Trumble and E.P. Kvam
Thin Ti/T N Barriers for ULSI Application
.................................. 495
C.K. Huang and Shi-Qing Wang
Effectiveness and Reliability of Metal Diffusion Barriers for
Copper Interconnects
..................................................501
G. Bai, S.
Wittenbrock, V. Ochoa, R.
Villasol, C.
Chiang,
T. Marieb,
D.
Gardner,
C. Mu, D.
Fraser,
and
M.
Bohr
Effects of
Cu
and Si Dopants on Electromigration Mass
Transport in
Al
Interconnects for VLSI
................................... 507
C.H. Lee, P.L.
Fejes,
B.R. York,
S.A.
Elwell, R.O.
Carnes, J.Y.
Lee,
Q.M. Qrivna,
S.W.
Bauguess, M.L. Dreyer, and S.R. Edwards
Stress Induced during the Solid-Phase Crystallization of
Amorphous Silicon Deposited by LPCVD
................................. 513
T. Mohammed-Brahim, K. Kis-Sion, D. Briand, M. Sarret, F. Lebihan,
and
B. Fortin
PART
VII:
OPTICAL PROPERTIES
Crystallinity Effects in the Optical Modulation of
Electrochromic Devices
................................................ 521
J.D. Klein and S.L. Clauson
Optical and Electrical Real-Time Characterization of
the Color-Switching Process in Thin Film Electrochromic
Devices
................................................................ 527
J. Marti, S.
dimeno,
Λ.
Lousa,
and
E.
Bertrán
Optical Transmittance of Thin Films of
ЅгРеОг.ѕ+х
at
Elevated Temperatures and Applications to Gas Sensing
................ 533
Michael Post and Jianhua Yao
Microstructure
and Optical Properties of Aluminum Nitride
Thin Films
............................................................... 539
Yoshihisa Watanabe, Yoshikazu
Пакатига,
Shigekazu
Hirayama,
and Yuusaku
fíaota
Size Effects in BaTiO3 Thin Films
......................................... 545
X.M.
Lu,
J.S. Zhu, P. Li, W. Jiang, X. Liu, and
Υ.Π.
Wang
Optical Indices of Tin-Doped Indium Oxide and Tungsten
Oxide Electrochromic Coatings
......................................... 551
K.
Von Rottkay,
M.
Rubin, and
fí. Ozer
PART
VIII: GAS SENSORS
Microstructure
and Activity of Thin Films for a
Microelectronic Gas Sensor
............................................559
Sanjay
V. Patel
Michael
Dibattista,
John L.
Öland,
and Johannes W.
Schwank
Significance of
Microstructure
for a MOCVD-Grown YSZ
Thin Film Gas Sensor
.................................................... 565
J.
Vetrone,
С.
Foster, and Q.
Bai
The Phase Diagram of Hydrogen in Ultra Thin Films
....................... 571
n.M.
Jisrawi, M.W. Ruckman, Q.
Reisfeld,
ti.
Wiesmann, F. Loeb,
E.
Gallego,
Y.
Oorelik,
Т.К.
Thurston, and Myron Strongin
X-ray Diffraction and Modelling Studies of Multilayer SnO2
Thin Film Gas Sensors
....................................................577
L.Ľ.
Depero,
C. Perego,
L. Sangaletti. and G. Sberveglieri
PART
IX: FERROELECTRIC FILMS
Morphology and Domain Structure of Unsupported PbTiO3
Thin Films Prepared by Sol-Gel Process
.................................. 585
C.J.
Lu, S.B. Ren,
n.M. Shen, and
Υ.Π.
Wang
Composition Control of Lead or Bismuth Based Ferroelectric
Thin Films Prepared by Sputtering Method
............................... 591
K. Yamakawa, S. Trolier-McKinstry, and J.P. Dougherty
xii
Characteristics
of a Reactively Sputtered Indium Tin Oxide
Thin Film Strain Gage for Use at Elevated Temperatures
................. 597
Orto
J.
Gregory, Stephen E. Dyer, Paul S. Amons,
and Arnout Bruins Slot
Dielectric and Pyroelectric Characteristics of
PLZT
(9.5/65/35)
Relaxor Thin Films
...................................... 603
K.K. Deb
Piezoresistance Gauge Factors in Heavily Boron-Doped
Polysilicon from Infrared Piezoreflectance
.............................. 609
J.
Cali, E.
Bustarret,
P.
Kleimann,
M. Le
Berre, and D.
Barbier
PART
X: METALLIZATION
Blanket and Local Crystallographic Texture Determination
in Layered
Al
Metallization
.............................................. 617
K.P.
Rod bell, J.L. tiurd, and P.W.
Derla ven
A Microstructural
Model of the Electrical Failure of an
Interconnect Resulting from Flux Divergences
........................... 627
J.M. Rickman, D.A. Smith, and C.S. rUchols
Electron Transport in Highly Textured Metal Films Grown
by Partially Ionized Beam Deposition
....................................633
S.R. Soss, B. Qittleman, K.E.
Mello,
T.-M.
Lu,
and S.L. Lee
Strain Measurement and Calculation in
Passivated
Cu
Lines Deposited by Three Different Methods
............................ 639
T. Marieb, A.S. Mack, n. Cox, D. Gardner, and X.C.
Ми
Annealing Characteristics of Al-Light-Rare-Earth Alloy Thin
Films for Microelectronic Conductor Lines
...............................645
Shinji Takayama and
Гіадапогі
Tsutsui
Direct Observation of the Effects of Cu Distribution on
Electromigration Phenomena in
Submicron Al
Interconnects
..........................................................651
Silva
К.
Theiss and
J.
A. Prybyla
Stress-Temperature Behavior and Stress Relaxation in
Ti/AI-O.SXCuAiN and TiN/W Thin Films
.................................. 657
L. Doucet,
A. Brun, H. Jaouen, M.
Dupeux, and M.
Ignat
Characterization of Copper Diffusion into
Al
and AI-1% Si
Polycrystalline Thin Films
................................................663
L.H. Walsh, G.O. Ramseyer, J.V. Beasock, H.F. tielbig,
and
K.P.
Mac Williams
Invited paper
xiii
Structural Processes
in Gold-Based Metallization during the
Formation of Ohmic Contacts to GaSb
.................................. 669
Л.
Piotrowska, E.
Kamińska,
M.
Quziewicz,
E.
Mizera,
E.
Dynowska,
X.
W.
Lin, S.
Rouvimov,
Z.
Liliental-Weber, and
S.
Kwiatkowski
Low Resistivity Mo-W Alloy for
α
-Si
TFT Gate Electrode
................... 675
Y. tiara, M. Atsuta, T. Oka, Y. Tsuji, Y. Ogawa, M.
Takemura,
M.
íkeda,
and K. Suzuki
Initial Stage of CVD Copper Deposition on TEOS Oxide
...................681
Tue
Гідиуеп,
Shusheng He, and Lawrence J. Charnesky
Diffusion Barrier Property of Sputtered Molybdenum Nitride
Films for Dram Copper Metallization
..................................... 687
Jong-Wan Park and Jeong-Youb Lee
PART XI: MAGNETIC AND MEMS APPLICATIONS
Microstructural
and
Magnetotransport (EHE)
Properties
of Epitaxial
τ-ΜηΑΙ
on (lOO)GaAs Substrates by Pulsed
Laser Deposition
........................................................695
T.M. Rosier, Y. He, and
H.A.
El-Masry
Magnetic Properties of Sputtered
Fe
-О
and
Co
-О
Thin Films
............. 701
D.V.
Dimitrov,
A.S. Murthy, Q.C. Hadjipanayis, and C.P. Swann
Preferred Crystal Orientation and Its Effect on the
Magnetization Reversal Property of CoCrTa Thin Films
....................707
T. Yeh, Q. Wang, J.C. Lin, andJ.M. Sivertsen
Independent Optimization of Nucleation and Growth
Processes of Titanium-Alloy Underlayers for Cobalt-Alloy
Perpendicular Recording Media
......................................... 713
T.P.
Поіап,
Y.
ììirayama,
and
M. Futamoto
GMR and Structure in Sputtered
CovţjFeţo/Ag
Multilayers
................ 719
J.D. Jarratt and J.A. Barnard
Structural and Magnetic Properties of Y-Fe2O3 Particles
Coated with TSO2
....................................................... 725
KO.
Borodko, Bokhimi, D.
Acosta,
L.M.
¡offe,
T.
Viveros,
P. Bosch,
and
П.
riava
Energy-Filtered
ТЕМ
of Ag-Co Thin Films
................................. 731
John Henry J. Scott and Sara. A. Majetich
Magnetic Coupling in Spin-Valves from Magnetic
Circular Dichroism
.......................................................737
P.J. Bedrossian. J.O.
Tobin,
О.О.
Waddill,
A.F. Jankowski,
T.C.
Anthony,
and J.A. Brug
XIV
Structural
and Magnetic Features of Fe-Based
Multilayers With Thick Non-Magnetic Layers
............................. 739
Y. Naga
and O. ¡iittono
Author Index
............................................................ 745
Subject Index
........................................................... 749
XV
|
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| genre | (DE-588)1071861417 Konferenzschrift 1995 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1995 Boston Mass. |
| id | DE-604.BV011088421 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:03:47Z |
| institution | BVB |
| isbn | 1558993061 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007427900 |
| oclc_num | 634301085 |
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| owner_facet | DE-384 DE-91G DE-BY-TUM DE-703 |
| physical | XVII, 772 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Polycrystalline thin films structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. eds.: Harold J. Frost ... Pittsburgh, Pa. Materials Research Soc. 1996 XVII, 772 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 403 Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Polykristall (DE-588)4188261-1 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Boston Mass. gnd-content Dünne Schicht (DE-588)4136925-7 s Polykristall (DE-588)4188261-1 s DE-604 Frost, Harold J. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 403 (DE-604)BV001899105 403 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007427900&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Polycrystalline thin films structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Dünne Schicht (DE-588)4136925-7 gnd Polykristall (DE-588)4188261-1 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4188261-1 (DE-588)1071861417 |
| title | Polycrystalline thin films structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. |
| title_auth | Polycrystalline thin films structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. |
| title_exact_search | Polycrystalline thin films structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. |
| title_full | Polycrystalline thin films structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. eds.: Harold J. Frost ... |
| title_fullStr | Polycrystalline thin films structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. eds.: Harold J. Frost ... |
| title_full_unstemmed | Polycrystalline thin films structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. eds.: Harold J. Frost ... |
| title_short | Polycrystalline thin films |
| title_sort | polycrystalline thin films structure texture properties and applications ii symposium held november 27 december 1 1995 boston massachusetts u s a |
| title_sub | structure, texture, properties and applications II ; symposium held November 27 - December 1, 1995, Boston, Massachusetts, U.S.A. |
| topic | Dünne Schicht (DE-588)4136925-7 gnd Polykristall (DE-588)4188261-1 gnd |
| topic_facet | Dünne Schicht Polykristall Konferenzschrift 1995 Boston Mass. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007427900&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT frostharoldj polycrystallinethinfilmsstructuretexturepropertiesandapplicationsiisymposiumheldnovember27december11995bostonmassachusettsusa |