New trends in ion beam processing from ions and cluster ion beams to engineering issues: proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22 - 26, 1995
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Bibliographic Details
Format: Conference Proceeding Book
Language:English
Published: Amsterdam North-Holland 1996
Series:Nuclear instruments and methods in physics research / B 112
Subjects:
Item Description:Einzelaufnahme eines Zs.-Bandes
Physical Description:XV, 356 S. graph. Darst.

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