(1996). New trends in ion beam processing from ions and cluster ion beams to engineering issues: Proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22 - 26, 1995. North-Holland.
Chicago-Zitierstil (17. Ausg.)New Trends in Ion Beam Processing from Ions and Cluster Ion Beams to Engineering Issues: Proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22 - 26, 1995. Amsterdam: North-Holland, 1996.
MLA-Zitierstil (9. Ausg.)New Trends in Ion Beam Processing from Ions and Cluster Ion Beams to Engineering Issues: Proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22 - 26, 1995. North-Holland, 1996.