Photo ASICs: integrated optical metrology systems with industrial CMOS technology
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Bibliographic Details
Main Author: Kramer, Jörg (Author)
Format: Microfilm Book
Language:Undetermined
Published: 1993
Edition:[Mikrofiche-Ausg.]
Subjects:
Item Description:Zürich, Techn. Hochsch., Diss. - 1993. - Mikrofiche-Ausg.: 1 Mikrofiche : 24x. - Zsfassung in dt. Sprache
Physical Description:91 S. graph. Darst.

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