Ferroelectric thin films IV: symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Pittsburgh, Pa.
MRS
1995
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| Series: | Materials Research Society: Materials Research Society symposia proceedings
361 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XV, 624 S. Ill., graph. Darst. |
| ISBN: | 1558992626 |
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| 245 | 1 | 0 | |a Ferroelectric thin films IV |b symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. |c eds.: Bruce A. Tuttle ... |
| 264 | 1 | |a Pittsburgh, Pa. |b MRS |c 1995 | |
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| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 361 | |
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| 650 | 4 | |a Ferroelectric thin films |v Congresses | |
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| adam_text | MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOLUME 361
FERROELECTRIC THIN FILMS IV SYMPOSIUM HELD NOVEMBER 29-DECEMBER 2, 1994,
BOSTON, MASSACHUSETTS, U.S.A. EDITORS: BRUCE A. TUTTLE SANDIA NATIONAL
LABORATORIES ALBUQUERQUE, NEW MEXICO, U.S.A. SESHU B. DESU VIRGINIA TECH
BLACKSBURG, VIRGINIA, U.S.A. R. RAMESH BELLCORE REDBANK, NEW JERSEY,
U.S.A. *. SHIOSAKI KYOTO UNIVERSITY KYOTO, JAPAN IMIRISI MATERIALS
RESEARCH SOCIETY PITTSBURGH, PENNSYLVANIA CONTENTS PREFACE . .* XIII
ACKNOWLEDGMENTS XV MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS XVI
PART I: LAYERED STRUCTURE FERROELECTRICS »LAYERED STRUCTURE OXIDES FOR
FATIGUE FREE FERROELECTRIC APPLICATIONS 3 DILIP P. VIJAY, SESHU B. DESU,
MASAYA NAGATA, XUBAI ZHANG, AND TZE C. CHEN CRYSTALLIZATION AND TEXTURE
OF BI-CONTAINING LAYERED PEROVSKITE THIN FILMS 15 S-Y. CHEN, X-F. DU,
AND I-W. CHEN STRUCTURAL AND FERROELECTRIC PROPERTIES OF SRBI,TA,0 9
THIN FILMS 21 KAZUSHI AMANUMA, TAKASHI HASE, AND YOICHI MIYASAKA PULSED
LASER DEPOSITION OF BI.TLO., THIN FILMS ON SAPPHIRE SUBSTRATES 27
WILLIAM JO AND T.W. NOH STRUCTURAL AND LEAKAGE CURRENT BEHAVIOR OF BI 4
TI 3 0 12 THIN FILMS ON LA 05 SR 0 5 CO0 3 BOTTOM ELECTRODES GROWN BY
PULSED LASER DEPOSITION 33 WILLIAM JO, K.H. KIM, T.W. NOH, S.D. KWON,
B.D. CHOE, AND B.D. YOU PREPARATION AND USE OF MOSAIC TARGET FOR THE
DEPOSITION OF FERROELECTRIC BISMUTH TITANATE THIN FILMS 39 P.K. GHOSH
AND M.E. AZIMI ORIENTATION AND PHASE FORMATION OF BI 4 TI 3 0,, FILM ON
(100) SILICON BY AMPOCVD AND RTA 45 H. WANG, X.J. SU, J.M. ZENG, Z.
WANG, S.X. SHANG, AND M. WANG PART II: CHARACTERIZATION *MECHANISM(S)
FOR THE SUPPRESSION OF THE SWITCHABLE POLARIZATION IN PZT AND BATI0 3 51
WILLIAM L. WARREN, DUANE DIMOS, BRUCE A. TUTTLE, GORDON E. PIKE, MARK V.
RAYMOND, ROBERT D. NASBY, R. RAMESH, AND JOSEPH T. EVANS, JR. »IMPRINT
OF LA-SR-CO-O/PB-LA-ZR-TI-O/LA-SR-CO-OHETERO- STRUCTURES GROWN BY PULSED
LASER DEPOSITION 67 J. LEE, R. RAMESH, AND V.G. KERAMIDAS CAN WE EXPLOIT
IMPRINT IN FERROELECTRIC THIN FILM CAPACITORS FOR MEMORY APPLICATIONS?
79 IN KYEONG YOO AND SESHU B. DESU EFFECTS OF ELECTRON BEAM IRRADIATION
ON PZT/PLZT THIN FILM CAPACITORS 85 BO JIANG, JIYOUNG KIM, RAJESH
KHAMANKAR, INSUP LEE, AND JACK C. LEE »INVITED PAPER V REACTIVE ION
ETCHING DAMAGE TO FERROELECTRIC THIN FILMS CAPACITORS 93 W. PAN, C.L.
THIO, S.B. DESU, AND CHEEWON CHUNG HETEROEPITAXIAL GROWTH OF BA 0 ,SR 0
,TI0 3 /SRRU0 3 ON YSZ/SI BY OFF-AXIS SPUTTERING . ... 99 S.Y. HOU, J.
KWO, R.K. WATTS, J.-Y. CHENG, R.J. CAVA, W.F. PECK, JR., AND D.K. FORK
MICROSTRUCTURES OF ULTRATHIN FILM OF SPUTTERED PBTI0 3 105 KIYOTAKA
WASA, T. SATOH, K. TABATA, H. ADACHI, Y. ICHIKAWA, AND K. SETSUNE A
STUDY OF SWITCHING BEHAVIOR IN PB(ZR,TI)0, THIN FILMS USING X-RAY
DIFFRACTION ILL MICHAEL O. EATOUGH, DUANE DIMOS, BRUCE A. TUTTLE,
WILLIAM L. WARREN, AND R. RAMESH NUCLEAR REACTION PROBE OF OXYGEN
VACANCY MIGRATION IN ELECTRICALLY FATIGUED PZT THIN FILM CAPACITORS 117
R.L. PFEFFER AND W.D. WILBER ENERGY LEVELS OF POINT DEFECTS IN
PERVOSKITE OXIDES 123 J. ROBERTSON AND W.L. WARREN VACANCY RELATED
DEFECTS IN THIN FILM PB(ZRTI)0 3 MATERIALS 129 A. KRISHNAN, D.J. KEEBLE,
R. RAMESH, W.L. WARREN, B.A. TUTTLE, R.L. PFEFFER, *. NIELSEN, AND K.G.
LYNN PHYSICAL PHENOMENA IN FERROELECTRIC THIN FILMS: STUDY AND MODELING
135 VLADIMIR I. PETROVSKY, EUGENIY PH. PEVTSOV, AND ALEXSANDER S. SIGOV
FERROELECTRIC FILM SELF-POLARIZATION 141 E. SVIRIDOV, I. SEM, V.
ALYOSHIN, S. BIRYUKOV, AND V. DUDKEVICH OPTICAL BAND GAP IMPLICATIONS
FOR FERROELECTRIC MEMORY APPLICATIONS 147 J.D. KLEIN AND S.L. CLAUSON
PART III: PHOTONIC PHENOMENA OPTICAL LOSSES IN FERROELECTRIC OXIDE THIN
FILMS: IS THERE LIGHT AT THE END OF THE TUNNEL? 155 D.K. FORK, F.
ARMANI-LEPLINGARD, AND J.J. KINGSTON DEPOSITION OF STRONTIUM BARIUM
NIOBATE THIN FILMS BY METAL-ORGANIC CHEMICAL VAPOR DEPOSITION AND THEIR
NONLINEAR OPTICAL PROPERTIES 167 M.J. NYSTROM, B.W. WESSELS, D.A.
NEUMAYER, T.J. MARKS, W.P. LIN, AND G.K. WONG PULSED LASER DEPOSITION OF
EPITAXIAL SR 0 6 ,BA 0 39 NB,0 6 THIN FILMS FOR WAVEGUIDE APPLICATIONS
...... 7 173 K.E. YOUDEN, S. SCHWYN THOENY, L. HESSELINK, AND J.S.
HARRIS, JR. CONTROL OF HETEROEPITAXY IN SOL-GEL DERIVED LINB0 3 THIN
LAYERS 179 P.G. CLEM AND D.A. PAYNE *INVITED PAPER VI LIGHT INFLUENCE ON
FATIGUE IN PZT FILMS WITH PLANAR ELECTRODES 185 V.P. DUDKEVICH, I.M.
SEM, E.V. SVIRIDOV, AND Z. SUROWIAK OPTICAL STUDY OF PBTIO, THIN FILMS
GROWN BY SOL-GEL TECHNIQUE 191 E. CHING-PRADO, R.W. TAO, R.S. KATIYAR,
AND A.S. BHALLA SPECTROSCOPIC ELLIPSOMETRY CHARACTERIZATION OF LA,TL,0 7
THIN FILMS 197 BRYAN D. DICKERSON, MASAYA NAGATA, Y.J. SONG, H.D. NAM,
AND SESHU B. DESU PHOTOFERROELECTRIC PHENOMENA IN SN 2 P,S 6 SINGLE
CRYSTALS AND THIN FILMS 203 E. ARNAUTOVA, N. KOSONOGOV, E. ROGACH, A.
PAVLOV, N. PROTSENKO, AND A. GREKOV PHOTOFERROELECTRIC EFFECTS OF
UNDOPED AND EXTRINSIC ION-DOPED PZT THIN FILMS 209 LI LI, CHHIU-TSU LIN,
MARTIN S. LEUNG, PAUL M. ADAMS, AND RUSSELL A. LIPELES INFLUENCE OF THE
FERROELECTRIC PHASE TRANSITION ON THE PHOTOELECTRICAL PROPERTIES OF THE
P-N JUNCTIONS 215 ANATOL T. LUPU AND SVETLANA P. GRISHECHKINA PART IV:
PROCESS INTEGRATION ISSUES IMPACT OF A TI ADHESION LAYER ON PT/PZT/PT
CAPACITORS . 223 R.E. JONES, JR., P.D. MANIAR, J.L. DUPUIE, J. KIM, R.
MOAZZAMI, J. WITOWSKI, M.L. KOTTKE, N.C. SAHA, AND R.B. GREGORY
MICROSTRUCTURAL AND ELECTRICAL PROPERTIES OF FERROELECTRIC CAPACITORS
WITH PT/RUO, HYBRID ELECTRODES 229 H.N. AL-SHAREEF, Y.L. CHEN, O.
AUCIELLO, AND A.I. KINGON EFFECTS OF ANNEALINGS ON PT/TIN/TI INTERFACIAL
REACTIONS 235 F. VARNIERE, B. EA KIM, B. AGIUS, R. BISARO, J. OLIVIER,
G. CHEVRIER, H. ACHARD, H. MACE, AND L. PEECOUD ELECTRODE CONTACTS ON
PZT THIN FILMS AND THEIR INFLUENCE ON FATIGUE PROPERTIES 241 J.J. LEE,
C.L. THIO, M. BHATTACHARYA, AND S.B. DESU STUDY ON MULTILAYERED
ELECTRODES FOR FERROELECTRIC THIN FILM CAPACITORS 249 ILSUB CHUNG, J.K.
LEE, WAN IN LEE, C.W. CHUNG, AND SESHU B. DESU PART V: DRAM THIN FILM
TECHNOLOGY PT HILLOCK FORMATION AND DECAY 257 SCOTT R. SUMMERFELT, DAVE
KOTECKI, ANGUS KINGON, AND H.N. AL-SHAREEF EFFECTS OF A.C. STRESS ON
CHARGE AND VOLTAGE DECAY RATES OF PZT THIN FILM CAPACITORS FOR DRAM
APPLICATIONS 263 RAJESH B. KHAMANKAR, JIYOUNG KIM, BO JIANG, AND JACK *
LEE VII MICROSTRUCTURAL AND ELECTRICAL CHARACTERIZATION OF BARIUM
STRONTIUM TITANATE THIN FILMS 269 YUJING WU, ELIZABETH G. JACOBS,
RUSSELL F. PINIZZOTTO, ROBERT TSU, HUNG-YU LIU, SCOTT R. SUMMERFELT, AND
BRUCE E. GNADE CORRELATIONS OF BA. X SR X TIO, MATERIALS AND DIELECTRIC
PROPERTIES . 275 ROBERT TSU, HUNG-YU LIU, WEI-YUNG HSU, SCOTT
SUMMERFELT, KATSUHIRO AOKI, AND BRUCE GNADE THE EFFECTS OF LA
CONCENTRATION ON THE PROPERTIES OF PLT THIN FILMS: FROM THE PERSPECTIVE
OF DRAM APPLICATIONS 281 SEONG JUN KANG, JEONG SEON RYOO, AND YUNG SUP
YOON SRTI0 3 FILMS PREPARED BY MOCVD USING NOVEL SR SOURCE 287 HIDEAKI
YAMAUCHI, TAKAFUMI KIMURA, AND MASAO YAMADA PART VI: CHEMICAL VAPOR
DEPOSITION »MOCVD OF FERROELECTRIC PB(ZR,TI)0, THIN FILMS FOR MEMORY
DEVICE APPLICATIONS 295 MASARU SHIMIZU AND TADASHI SHIOSAKI EPITAXIAL
PB(ZR 0 40 TI 0 60 )O 3 /SRRUO 3 AND PBTI0 3 /SRRU0 3 MULTILAYER THIN
FILMS PREPARED BY MOCVD AND RF SPUTTERING 307 CM. FOSTER, R. CSENCSITS,
P.M. BALDO, G.R. BAI, Z. LI, L.E. REHN, L.A. WILLS, R. HISKES, D. DIMOS,
AND M.B. SINCLAIR GROWTH AND PROPERTIES OF PBTI0 3 /PLT HETEROSTRUCTURES
313 YEONGKWAN KIM, Y.H. HAN, A. ERBIL, AND L.A. BOATNER LIQUID DELIVERY
CVD OF FERROELECTRIC (PB,LA)(ZR,TI)0 3 THIN FILMS 319 W. TAO, S.B. DESU,
C.H. PENG, B. DICKERSON, *.*. LI, C.L. THIO, J.J. LEE, AND W. HENDRICKS
IMPROVED ELECTRICAL PROPERTIES OF SRTI0 3 THIN FILMS BY ELECTRON
CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR DEPOSITION 325 HISATO YABUTA,
KOICHI TAKEMURA, HIROMU YAMAGUCHI, SHUJI SONE, TOSHIYUKI SAKUMA, AND
MASAJI YOSHIDA FERROELECTRIC (PB,LA)TI0 3 THIN FILMS PREPARED BY
METALORGANIC CHEMICAL DEPOSITION 331 Z.C. FENG, B.S. KWAK, AND A. ERBIL
GROWTH AND CHARACTERIZATION OF PBTI0 3 AND PB(ZR,TI)0, THIN FILMS BY
MOCVD 337 Y. GAO, W. DONG, AND B.A. TUTTLE ELECTRICAL AND
MICROSTRUCTURAL PROPERTIES OF LEAD TITANATE THIN FILMS DEPOSITED BY
METALORGANIC CHEMICAL VAPOR DEPOSITION 343 M. VELLAIKAL AND A. KINGON A
LOW TEMPERATURE VAPORIZATION OF PB(THD), WITH NH 3 349 JUNE KEY LEE, WAN
IN LEE, AND SESHU B. DESU »INVITED PAPER VIII GROWTH OF EPITAXIAL BATI0
3 THIN FILMS AT 600C BY METALORGANIC CHEMICAL VAPOR DEPOSITION 355 D.L.
KAISER, M.D. VAUDIN, L.D. ROTTER, Z.L. WANG, J.P. CLINE, CS. HWANG, R.B.
MARINENKO, AND J.G. GILLEN INFLUENCE OF TI SOURCES ON PROPERTIES OF
(BA,SR)TI0 3 FILMS PREPARED BY LIQUID SOURCE CVD 361 T. KAWAHARA, M.
YAMAMUKA, T. MAKITA, A. YUUKI, N. MIKAMI, AND K. ONO AUTOSTOICHIOMETRIC
VAPOR DEPOSITION OF MULTICOMPONENT OXIDES 367 K.W. CHOUR AND R. XU PART
VII: SOLUTION DEPOSITION »EFFECTS OF ACETYLACETONE ADDITIONS ON PZT THIN
FILM PROCESSING 377 ROBERT W. SCHWARTZ, R.A. ASSINK, D. DIMOS, M.B.
SINCLAIR, T.J. BOYLE, AND CD. BUCHHEIT RAPID THERMAL PROCESSING AND
CRYSTALLIZATION KINETICS IN LEAD ZIRCONATE TITANATE (PZT) THIN FILMS 389
E.M. GRISWOLD, L. WEAVER, I.D. CALDER, AND M. SAYER THE
PYROCHLORE-TO-PEROVSKITE TRANSFORMATION IN SOLUTION- DERIVED LEAD
ZIRCONATE TITANATE THIN FILMS 395 JAMES A. VOIGT, *.A. TUTTLE, T.J.
HEADLEY, AND D.L. LAMPPA EFFECTS OF RHEOLOGICAL CHARACTERISTICS OF SOL
ON PREFERENTIAL ORIENTATION OF PB(MG,ZN), ; ,NB 2/ ,0, THIN FILMS . . .
. . . 403 HYUN M. JANG AND MUN K. CHO EFFECT OF MICROSTRUCTURE ON THE
ELECTRICAL CHARACTERISTICS OF SOL-GEL DERIVED PZT THIN FILMS 409 JIYOUNG
KIM, RAJESH KHAMANKAR, BO JIANG, PAPU MANIAR, REZA MOAZZAMI, ROBERT E.
JONES, AND JACK * LEE PREPARATION AND CHARACTERIZATION OF METAL ALKOXIDE
DERIVED EPITAXIAL LEAD TITANATE BASED THIN FILMS 415 KEIICHI NASHIMOTO
AND SHIGETOSHI NAKAMURA THE CHARACTERIZATION AND ELECTRICAL PROPERTIES
OF DOPED PZT THIN FILMS PREPARED BY SOL-GEL PROCESSING 421 WAN IN LEE,
J.K. LEE, ILSUB CHUNG, C.W. CHUNG, I.K. YOO, AND SESHU B. DESU
PREPARATION OF PBZRJI, X 0 3 FILMS ON SI SUBSTRATES USING SRTIOJ BUFFER
LAYERS 427 EISUKE TOKUMITSU, KENSUKE ITANI, BUM-KI MOON, AND HIROSHI
ISHIWARA DIELECTRIC AND FERROELCTRIC PROPERTIES OF SOL-GEL DERIVED PLZT
FILMS 433 G. TEOWEE, E.L. QUACKENBUSH, CD. BAERTLEIN, J.M. BOULTON, E.A.
KNEER, AND D.R. UHLMANN INFLUENCE OF THE SOL-GEL SYNTHESIS CONDITIONS ON
THE ERTIES OF THIN PBTI0 3 FILMS P.J. RETUERT, T.P. VELILLA, V. DEL *
MARTIN, AND R.E. AVILA PROPERTIES OF THIN PBTI0 3 FILMS 439 »INVITED
PAPER IX PREPARATION AND ELECTRICAL CHARACTERISTICS OF (100), (111), AND
RANDOMLY ORIENTED PZT THIN FILMS 445 CHANG JUNG **, DAE SUNG YOON, JOON
SUNG LEE, CHAUN GI CHOI, WON JONG LEE, AND KWANGSOO NO PART VIII: VAPOR
DEPOSITION *CONSTRUCTION OF STRAINED SRTI0 3 /BATI0 3 SUPERLATTICES AND
THEIR DIELECTRIC PROPERTIES 453 HITOSHI TABATA, HIDEKAZU TANAKA, AND
TOMOJI KAWAI THICKNESS DEPENDENCE OF INDUCED FERROELECTRICITY IN
EPITAXIALLY GROWN BA 0 M SR 0 56 TI0 3 THIN FILMS KAZUHIDE ABE AND
SHUICHI KOMATSU THE INFLUENCE OF THE CRYSTALLINE STRUCTURE ON THE
ELECTRICAL *ERTIES OF BATI0 3 /SRRU0 3 L.A. WILLS AND JUN AMANO
PROPERTIES OF BATI0 3 /SRRU0 3 HETEROSTRUCTURES 471 EFFECTS OF EXCESS PB
ON CRYSTALLIZATION AND ELECTRICAL PROPERTIES OF FERROELECTRIC PZT FILMS
DEPOSITED BY REACTIVE RF MAGNETRON SPUTTERING 477 S.D. BERNSTEIN, T.Y.
WONG, S.R. COLLINS, YANINA KISLER, AND R.W. TUSTISON PREPARATION AND
CHARACTERIZATION OF PMN (PBMG X NB, _O Z FILMS BY SPUTTERING 483 J.S.
CROSS, M. TSUKUDA, K. KURIHARA, N. KAMEHARA, AND K. NIWA ENHANCEMENT OF
THE ELECTRICAL PROPERTIES OF BATI0 3 FILMS ON GAAS USING DOUBLE LAYER
STRUCTURES 489 L.H. CHANG AND W.A. ANDERSON PHYSICOCHEMICAL AND
ELECTRICAL PROPERTIES OF RF MAGNETRON SPUTTERED LEAD ZIRCONATE TITANATE
THIN FILMS 495 B. EA. KIM, M.C. HUGON, F. VARNIERE, B. AGIUS, H. ACHARD,
AND M. PUECH MICROSTRUCTURE EVOLUTION OF EPITAXIAL (BA,SR)TIO 3
/(001)MGO THIN FILMS 501 V.A. ALYOSHIN, E.V. SVIRIDOV, VI.M. MUKHORTOV,
I.N. ZAKHARCHENKO, AND V.P. DUDKEVICH STRUCTURE AND FERROELECTRIC
BEHAVIOUR OF STEP-CRYSTALLIZED PBZR 05 TI 05 O 3 THIN FILMS PREPARED BY
ELECTRON BEAM EVAPORATION OF MULTI-COMPONENT OXIDES 507 SHABAN R.
DARVISH AND A.C. RASTOGI PART IX: PULSED LASER DEPOSITION SR X BA (1 .
X) TI0 3 THIN FILMS FOR ACTIVE MICROWAVE APPLICATIONS 515 J.S. HORWITZ,
J.M. POND, B. TADAYAN, R.C.Y. AUYEUNG, P.C. DORSEY, D.B. CHRISEY, S.C.
QADRI, AND C. MULLER EPITAXIAL GROWTH OF BA, X SR X TI0 3 FILMS ON SI BY
PULSED LASER DEPOSITION AND THEIR DIELECTRIC PROPERTIES 521 MYUNG-BOK
LEE, MASASHI KAWASAKI, MAMORU YOSHIMOTO, BUM-KI MOON, HIROSHI ISHIWARA,
AND HIDEOMI KOINUMA *INVITED PAPER X IN SITU MONITORING IN THE PULSED
LASER DEPOSITION OF FERROELECTRIC THIN FILMS 527 PETER K. SCHENCK, MARK
D. VAUDIN, BYEONG W. LEE, DAVID W. BONNELL, JOHN W. HASTIE, AND ALBERT
J. PAUL THIN FILM FORMATION OF PEROVSKITE TYPE DIELECTRIC AND
FERROELECTRIC MATERIALS (MTI0 3 ;M=CA,SR,BA AND PB) 533 HITOSHI TABATA,
HIDEKAZU TANAKA, AND TOMOJI KAWAI PULSED LASER DEPOSITION OF
FERROELECTRIC MULTILAYER CAPACITORS WA 2 CU,0 7 JBATIO,/YBA,CU,0 7 ,ON
SI(100) SUBSTRATES . . . . ..... 539 J. LUO, Q. LI, D.B. FENNER, S. LIU,
W.D. HAMBLEN, AND X.D. WU INVESTIGATION OF THE CHARACTERISTICS OF
FERROELECTRIC THIN FILMS DEPOSITED BY PULSED LASER ABLATION 545 S.
SENGUPTA, D.P. VIJAY, AND S.B. DESU ELECTRICAL PROPERTIES OF PZT
PREPARED BY PULSED LASER ABLATION ON VARIOUS ELECTRODES 551 AKIHARU
MORIMOTO, YASUHIRO YAMANAKA, TOSHIHARU MINAMIKAWA, AND TATSUO SHIMIZU
STRONTIUM BARIUM NIOBATE THIN FILMS PREPARED BY PULSED LASER DEPOSITION
557 Y. LIU, C.W. ONG, P.W. CHAN, AND C.L. CHOY PULSED EXCIMER LASER
DEPOSITION AND RAPID THERMAL ANNEALING OF FERROELECTRIC PB(ZR 0 *TL 48
)0, THIN FILMS ON SI-ON-INSULATOR . 563 YIQING CHEN, LIRONG ZHENG,
CHENGLU LIN, XINGLONG XU, AND SHICHANG ZOU GROWTH OF FERROELECTRIC PLT
THIN FILMS ON VARIOUS SINGLE CRYSTAL SUBSTRATES 569 Y.M. KANG, J.K. KU,
AND S. BAIK PULSED LASER DEPOSITION OF EPITAXIAL LINBO, FILMS ON
SAPPHIRE SUBSTRATES USING A SINGLE CRYSTAL TARGET 575 SEE-HYUNG LEE, TAE
W. NOH, JAI-HYUNG LEE, AND YOUNG-GI KIM CHARACTERIZATION OF
POST-ANNEALED PZT THIN FILMS DEPOSITED USING PULSED LASER ABLATION 581
JYRKI LAPPALAINEN, JOHANNES FRANTTI, AND SEPPO LEPPAEVUORI PART X:
PIEZOELECTRIC AND IR THIN FILM TECHNOLOGY LIQUID PHASE EPITAXY OF NA,
KTA, _NB X 0 3 FOR PYROELECTRIC APPLICATIONS 589 Z. SITAR, R. GUTMANN,
H. PIERHOEFER, AND P. GUENTER PROPERTIES OF REACTIVELY SPUTTER DEPOSITED
SRTIO, FILMS FOR IR DETECTOR READOUT ELECTRONICS 595 S.D. BERNSTEIN,
T.Y. WONG, J.K. RAWSON, AND R.W. TUSTISON PREPARATION OF TEXTURED SN,P,S
6 FILMS AND THEIR PIEZO- ELECTRIC PROPERTIES . . 601 E. ARNAUTOVA, N.
PROTSENKO, D. SANDJIEV, I. ZAKHARCHENKO, AND L. ZADOROGNAYA
Y-BA-CU-0/PZT CURRENT CONTROLLABLE DISTRIBUTED RC-ELEMENT 607 J.
HAGBERG, J. LEVOSKA, S. LEPPAEVUORI, AND T. MURTONIEMI XI ANISOTROPIC
DYNAMIC STRAIN SENSORS BASED ON FERROELECTRIC PZT FILMS 613 A.A.
BAKIROV, E.V. SVIRIDOV, AND V.P. DUDKEVICH AUTHOR INDEX 619 SUBJECT
INDEX 623 XII
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| any_adam_object | 1 |
| building | Verbundindex |
| bvnumber | BV010462967 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.9.T45 |
| callnumber-search | TA418.9.T45 |
| callnumber-sort | TA 3418.9 T45 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UD 8400 UP 7750 |
| ctrlnum | (OCoLC)33029723 (DE-599)BVBBV010462967 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1994 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1994 Boston Mass. |
| id | DE-604.BV010462967 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:52:55Z |
| institution | BVB |
| isbn | 1558992626 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006971405 |
| oclc_num | 33029723 |
| open_access_boolean | |
| owner | DE-384 DE-29T DE-703 |
| owner_facet | DE-384 DE-29T DE-703 |
| physical | XV, 624 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | MRS |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Ferroelectric thin films IV symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. eds.: Bruce A. Tuttle ... Pittsburgh, Pa. MRS 1995 XV, 624 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 361 Couches ferroélectriques ram Ferroelectric thin films Congresses Ferroelektrikum (DE-588)4154121-2 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1994 Boston Mass. gnd-content Ferroelektrikum (DE-588)4154121-2 s Dünne Schicht (DE-588)4136925-7 s DE-604 Tuttle, Bruce A. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 361 (DE-604)BV001899105 361 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006971405&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Ferroelectric thin films IV symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Couches ferroélectriques ram Ferroelectric thin films Congresses Ferroelektrikum (DE-588)4154121-2 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4154121-2 (DE-588)4136925-7 (DE-588)1071861417 |
| title | Ferroelectric thin films IV symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_auth | Ferroelectric thin films IV symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_exact_search | Ferroelectric thin films IV symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_full | Ferroelectric thin films IV symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. eds.: Bruce A. Tuttle ... |
| title_fullStr | Ferroelectric thin films IV symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. eds.: Bruce A. Tuttle ... |
| title_full_unstemmed | Ferroelectric thin films IV symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. eds.: Bruce A. Tuttle ... |
| title_short | Ferroelectric thin films IV |
| title_sort | ferroelectric thin films iv symposium held november 29 december 2 1994 boston massachusetts u s a |
| title_sub | symposium held November 29 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| topic | Couches ferroélectriques ram Ferroelectric thin films Congresses Ferroelektrikum (DE-588)4154121-2 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Couches ferroélectriques Ferroelectric thin films Congresses Ferroelektrikum Dünne Schicht Konferenzschrift 1994 Boston Mass. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006971405&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT tuttlebrucea ferroelectricthinfilmsivsymposiumheldnovember29december21994bostonmassachusettsusa |