Evolution of thin film and surface structure and morphology: symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A.
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| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Pittsburgh, Pa.
Materials Research Soc.
1995
|
| Series: | Materials Research Society: Materials Research Society symposia proceedings
355 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XV, 668 S. Ill., graph. Darst. |
| ISBN: | 1558992561 |
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MARC
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| 245 | 1 | 0 | |a Evolution of thin film and surface structure and morphology |b symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |c ed.: B. G. Demczyk ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1995 | |
| 300 | |a XV, 668 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 355 | |
| 650 | 4 | |a Thin films |v Congresses | |
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1994 |z Boston Mass. |2 gnd-content | |
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| adam_text | Contents
PREFACE
....................................................xiü
ACKNOWLEDGMENTS
............................................xv
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
................xvi
PART I: THIN FILMS: NUCLEATION AND GROWTH
SURFACE ENERGY DRIVEN CRYSTALLIZATION OF AMORPHOUS
Νΐ6^Γ14Ρ,7
ALLOY
...............................................3
G. Schumacher,
N.
Wanderka, and R.P. Wahi
STRUCTURE, MORPHOLOGY AND EVOLUTION OF INTERFACES
IN Si/Sh-xGe* SUPERLATTICES
.......................................9
J.-M. Baribeau,
DJ. Lockwood,
and R.L. Headrick
SURFACE DIFFUSION OF LARGE Ag CLUSTERS ON
Ag(100)
...................15
J.-M. Wen, J.W. Evans, S.-L. Chang, J.W. Burnett,
and
P.A. Thiel
ATOMIC FORCE MICROSCOPY AND RAMAN SPECTROSCOPY
STUDY OF STRAIN RELAXATION IN InGaAs ON GaAs(100)
GROWN BY CHEMICAL BEAM EPITAXY USING UNPRECRACKED
MONOETHYLARSINE
.............................................21
Seong-Iu Park, Seung-Bock Kim, Jeong Sook Ha, Jeong-Rae Ro,
El-Hang Lee, and Eun-Kyung Sub
MANIPULATION OF NUCLEATION DURING Si MOLECULAR
BEAM EPITAXY
.................................................27
Mals I. Larsson,
Wei-Xin
Ni,
and
Göran V. Hansson
STRUCTURAL EVOLUTION OR RAPID THERMAL CARBONIZED
Si SURFACES
..................................................33
Volker Cimalla
and
Jörg Pezoldt
PULSED LASER DEPOSITION AND CHARACTERIZATION OF NOVEL
Cu/TiN/SiilOO)
HETEROSTRUCTURES GROWN VIA DOMAIN EPITAXY
............39
Rina
Chowdhury, R.D. Vispute, and J. Narayan
GROWTH MORPHOLOGY OF VICINAL HILLOCKS ON THE
{101}
FACE
OF KHLPO«: EVIDENCE OF SURFACE DIFFUSION
..........................45
T.A. Land, J.J.
De
Yoreo, J.D. Lee, and J.R. Ferguson
•THE MORPHOLOGY OF Cu CLUSTERS ON SrTiQ,(001) AT INITIAL
STAGES OF METAL FILM GROWTH
................................... 51
Y. Liang, D.L. Carroll, and D.A. Bonnell
MICROSTRUCTURAL
EVOLUTION DURING THE EPITAXIAL GROWTH
OP Ag/mP
(100) .................................................59
Mohan Krishnamurtby
aed
Jeff S.
Drucker
STRUCTURAL EVOLUTION OF HIGHLY CROSSUNKED POLYMER
NETWORKS
...................................................65
Kristi
S.
Алѕеш
and Christopher
N.
Bowman
MORPHOLOGY OF THIN FILMS
............... ... . ... . . ._____. .......71
Paweł Kebłinski,
Amos
Marhán,
Russell
Messier, Flavio Toigo,
and Jayanth R. Banavar
•Invited Paper
NUCLEATION AND GROWTH OF CVD Si THIN FILMS:
AFM,
SE
AND
ТЕМ
ANALYSIS
.......................................
77
W.M. Paulson, R.I. Hegde, B.B. Doris, V. Kaushik,
P.J.
Tobin,
J.
Fitch, W.A. McGahan, and J.A. Woollam
PROBING THE NUCLEATION OF A THIN METAL FILM: ATOM
DEPOSITION VS. CLUSTER BEAM DEPOSITION
...........................83
W. Mahoney, S.T. Lin, and R.P. Andres
MORPHOLOGY AND STEP COVERAGE OF IN-SITU DOPED
POLYSILICON
FILMS DEPOSITED BY SINGLE WAFER CVD
...................89
Jon T. Fitch, Rama I. Hegde, Israel Beinglass, and
Mali Venkatesan
MICROSTRUCTURAL
EVOLUTION OF Ag/GaAs
(110)........................95
Jeff Drucker
and Mohan Krishnamurthy
GROWTH MORPHOLOGY OF Ag ISLANDS ON GaAs
(110)
AT
LOW COVERAGE: MONTE CARLO SIMULATIONS
.........................101
Ashok
Challa,
Timothy S.
Cale,
and
Jeff Drucker
PATTERNS OF COMPETITIVE CRYSTAL GROWTH
........................107
Juan M. Garcfa-Ruiz and
A. Rodríguez-Navarro
PART II: SURFACE STRUCTURAL
REARRANGEMENTS, DEFECTS
•A DYNAMIC VIEW OF STEP CONFIGURATIONS ON Ag(llO) AND
THEIR ROLE IN THE FORMATION OF OXYGEN OVERLAYERS
................115
J.S. Ozcomert, W.W.
Pai, N.C.
Bartelt,
and
J.E. Reutt-Robey
•EPITAXIAL GROWTH OF METASTABLE Sn.Ge,-, ALLOY
FILMS BY ION-ASSISTED MOLECULAR BEAM EPITAXY
....................123
Harry A. Alwater, G. He, and K. Saipetch
MORPHOLOGY MAPS OF SMALL PARTICLES
............................135
N.
Doraiswamy and L.D. Marks
STRUCTURE OF
N
ANOPHASE GOLD PARTICLES ON IRON
OXIDE SUPPORTS
..............................................141
B.G. Demczyk,
Chien
Sze, and Erdogan Gulari
USING ATOMIC FORCE MICROSCOPY TO IMAGE LANGMUIR
BLODGETT FILMS OF DISK SHAPED MOLECULES
........................147
Nicholas C. Maliszewskyj, Jack Y. Josefowicz, Paul A. Heiney,
John P. McCauley, Jr., and Amos B. Smith
m
A SOFT INCOMMENSURATE RECONSTRUCTION ON Pb/Si<lll)
................153
Ing-Shouh Hwang, Robert E. Martinez,
Chien
Liu, and
Jene
A. Golovchenko
MEASURING VACANCY DIFFUSIVITY AND VACANCY ASSISTED
CLUSTERING BY NTTRIDATION ENHANCED DIFFUSION OF Sb
IN SidOO) DOPING SUPERLATTICES
.............................157
Toshiharu
К.
Mogi,
H.-].
Gossmann, C.S. Rafferty, HS. Luftman,
F.C.
Umerwald,
T.
Boone, Michael O. Thompson, and J.M.
Poate
Co,O4
EPITAXIAL
FORMATION
ON
СоОЦЩ...................
163
G.
A. Carson,
M.H.
Nassir,
and M.A. LangeU
•Invited Paper
TETRAGONAL Au-Ni
(001)
SOLID SOLUTIONS GROWN BY MBE
...............169
A. Marty, M. Dynna, B.
Gilles,
G.
Patrat,
and A. Chamberod
MICROSTRUCTURE
AND RECONSTRUCTION OF LaAIO,
{100}
AND
{110}
SURFACES
......................... . 175
Z.L. Wang and A.J. Shapiro
•ATOMIC IMAGING OF METAL-SEMICONDUCTOR SURFACES USING
UHV-HREM AND DIFFRACTION
.....................................181
L.D. Marks, G. Jay
aram,
R.
Plass, and
N.
Doraiswamy
NANOFABRICATION OF MATERIALS WITH A SCANNING TUNNELING
MICROSCOPE
.................................................191
Seiichi Kondo, Seiji
Heike,
Mark Lutwyche, and Yasuo
Wada
SURFACE AND DEFECT STRUCTURE OF EPITAXIAL GALLIUM
PHOSPHIDE ON Si(001)
...........................................197
A.E. Miller, J.T. Kelliher,
N.
Dietz, and
K.J. Bachmann
STEP-STEP INTERACTIONS ON THE VICINAL Ge(001) SURFACE
...............203
Bart A.
Kersten,
Lianda Sjerps-Koomen, Harold J.W. Zandvliet,
Dave
H.A.
Blank, and
Arend
van Silfhout
CHARACTERIZATION OF SPUTTERED CERIUM DIOXIDE THIN FILMS
...........209
Shuwen Guo, S.N. Jacobsen, U.
Helmersson, K. Järrendahl,
L.D. Madsen, P. Tengvall, and H. Arwin
CRYSTALLINE PERFECTION OF SEMICONDUCTOR SURFACES BY
X-RAY MULTIPLE DIFFRACTION
....................................215
S.L. Morelhao, L.H.
Avanci,
and L.P. Cardoso
SFM STUDIES OF THE SURFACE MORPHOLOGY OF ICE
....................221
Oleg
Nickolayev and Victor Petrenko
MOLECULAR DYNAMICS STUDY OF DISORDERING AND PREMELTING
OF THE Pb(110) SURFACE
.........................................227
A. Landa,
H.
Häkkinen, R.N. Barnett,
P. Wynblatt, and U.
Landman
PART III: IN-SITU STUDIES OF SURFACE STRUCTURE
•ROLE OF SURFACE STEPS IN THIN FILM GROWTH AND
PROPERTIES STUDIED BY
LEEM
....................................235
M.S.
Altman, Q.
Cai,
W.F.
Chung,
E.Z. Luo,
H. Pinkvos,
and E.
Bauer
IN-SITU
SCANNING PROBE
MICROSCOPY OF SOLID-LIQUID
INTERFACES: ROLE OF EPITAXIAL OXIDE ADLAYERS ON Cu
ELECTRODEPOSmON
............................................247
John R. LaGraff and Andrew A. Gewirth
PROBING
BIOPOLYMER
FILMS WITH SCANNING FORCE METHODS
............253
Greg Haugstad, Wayne L. Gladfelter, Elizabeth B. Weberg,
Rolf T. Weberg, and Timothy D. Wealherill
RECONSTRUCTION FROM AN OXIDIZED Siflll) SURFACE STUDIED
BY HIGH-TEMPERATURE STM
......................................259
T. Sato, T. Sueyoshi, M. Iwatsuki, and M. Kersker
•Invited Paper
MONTE
CARLO SIMULATION OF A GROWING Pb-FILM ON Cu
(100)
AND (111) SURFACES
............................................263
W. Bauer, G. Bete, H.
Bangert,
A. Bergauer, and
C. Eisenmenger-Sittner
INTERFACE MORPHOLOGY OF RF-SPUTTERED Nb/A^O,
MULTILAYERS STUDIED BY X-RAY REFLECTIVITY AND
DIFFUSE SCATTERING
...........................................269
Tim
Saldi«, Т.Н. Meteger,
J.
Peisl,
Ch.
Morawe, and
H.
Zabel
STRUCTURE OF THE ANNEALED
Au-Si(100)
SYSTEM:
A UHV-HREM STUDY
............................................275
G. Jayaram and L.D. Marks
ATOMIC STRUCTURE OF ULTRATH1N ERBIUM SIUCIDES
ON Si(lll)
....................................................281
M. Lohmeier, W.J.
Huisman,
G.
Ter Horst,
P.M. Zagwijn,
A. Nishiyama, CL. Nicklin, T.S.
Turner, and E. Vlieg
AMBIENT AND HIGH TEMPERATURE STM INVESTIGATIONS
OF THE GROWTH OF TITANIUM
SUICIDE
ON SILICON SUBSTRATES
...........287
Andrew W. Stepbenson, Timothy M.H. Wong, and
Mark
E. Weiland
STRUCTURAL CHARACTERIZATION OF Ga ON Si(112) BY
AUGER ELECTRON DIFFRACTION
...................................293
I.E. Yater, A. Shih, and Y.U. Idzerda
PART IV: THIN FILMS: STRUCTURE/MORPHOLOGY
•ROUGHNESS ANALYSIS OF Si,_xGe. FILMS
.............................301
R.M. Feenstra, M.A. Lute, and M.
Copel
•MAGNETIC FORCE MICROSCOPY: RECENT ADVANCES
AND APPLICATIONS
............................................311
Ken Babcock, Matthew
Dugas,
Scott Manalis, and Virgil Elings
STEP COVERAGE AND MATERIAL PROPERTIES OF CVD
TITANIUM NITRIDE FILMS FROM TDMAT AND TDEAT
ORGANIC PRECURSORS
..........................................323
Anthony
J.
Toprac, Shi-Qing Wang, Joshua Musher, and
Roy G. Gordon
VALIDATION OF THE MODELLING OF A SOLID-LIQUID
REACTION BY A SOLID-VAPOR REACTION
.............................329
Guy Reumont, Pierre Perrot, and
Jacques
Foct
ORIENTATION SELECTION AND MCROSTRUCTURAL EVOLUTION
OF EPITAXIAL Pt FILMS ON
(001)
MgO
..........................335
Paul
С
Mclttyre, Carl J.
Maggiore,
and Michael Nastasi
COMPARISON OF PROPERTIES OF CVD COPPER FILMS
DEPOSITED ON DIFFERENT SUBSTRATE MATERIALS
......................341
Chong
Mu Lee
and Sung
Нее
Han
PREFERRED ORIENTATION AND MAGNETIC PROPERTIES OF
BARIUM HEXAFERRITE THIN FILMS DEVTTRIFIED FROM
THE GLASS
.................................... 347
Gaurav Agtrwal, Robert F. Speyer, Chung-kook Lee, and
Geoffrey
Spratt
Invited Paper
Vi
EVALUATION
OF SURFACE CHARACTERISTICS OF ZnS AND ZiuSiO.
POWDERS BY SFM
........... 353
G. Li
A COMPARISON OF THE PHYSICAL PROPERTIES OF CLUSTER-BASED
AND VACUUM-EVAPORATED THIN METAL FILMS
................. 359
I.D.
Bielefeld, R.G. Osifchin, and R.P. Andres
EVOLUTION OF
MICROSTRUCTURE
DURING LOW-TEMPERATURE
SOLID PHASE EPITAXIAL GROWTH OF SixGe,_, ON Si(OOl)
..................365
G. Ramanath, H.Z. Xiao, S.L. Lai, Z. Via, and L.H. Allen
part v: surface roughness/wear/tribology
•spectral sensitivities of x-ray diffraction and atomic
:e microscopy to the roughness
K.W. Evans-Lutterodt and Mau-Tsu Tang
FORCE MICROSCOPY TO THE ROUGHNESS OF Si/SiO2 INTERFACES
............373
SURFACE ROUGHNESS INVESTIGATION OF THIN SiO, FILMS
DEPOSITED FROM N2O AND S1H4
....................................377
V.H.C.
Watt, M. Moinpour, R. Sadjadi, W.
Lu, G.
Neubauer,
and
R.
Bower
WEAR RESISTANCE OF PEARLITIC STEEL
MICROSTRUCTURES
...............383
Alberto J. Perez-Unzueta
SURFACE ROUGHNESS AND SPECIFIC CONTACT RESISTANCE
OF AuGeNi/InP OHMIC CONTACTS
...................................389
Thomas Clausen and Otto Leistiko
DYNAMIC SURFACE EVOLUTION OF SPUTTERED Cu-COATINGS:
A QUANTIFICATION OF SURFACE DIFFUSION EFFECTS BY AFM
..............395
С
Eisenmenger-Sittner, H.
Bangert,
A. Bergauer, and W. Bauer
STUDY OF SURFACE STRUCTURE, MORPHOLOGY AND HARDNESS
OF SEVERAL DIFFERENT DIAMOND-LIKE CARBON FILMS
..................401
Pearl W.
Гір,
Alex Hsieh, and Peter G. Dehmer
PART VI:
INTERFACIAL
REACTIONS
DISSOLUTION OF CaCOjOOM) SURFACE
...............................409
Y. Liang, D.R. Baer, and A.S. Lea
TUNGSTEN
ЅПЈСГОЕ
STABILITY AND INTERFACE REACTION
DETERMINED BY MODELING AND EXPERIMENTS
........................415
Ting Feng and
Aris
Christou
A MODEL FOR OXIDE FILM EVOLUTION ON ALLOYS AND
PREDICTION OF RESULTING LAYER STRUCTURE
........................421
David L.
Соске, К.
Dorris, Donald G. Naugie, and
Thomas R. Hess
PHASE TRANSFORMATIONS IN a-Si/Ni/c-Si STRUCTURES
WITH DIFFERENT
INTERFACIAL
Ni
LAYER THICKNESSES
..................427
A.Yu. Kuznetsov, I.I.
Rhodos,
I. liimros, B. Mohadjeri,
E.V.
Monakhov, and B.G.
Svensson
Invited Paper
AN HREM STUDY OF THE
MICROSTRUCTURE
OF
Al
CONTACT
ON GaN/AlN/SiC THIN FILMS
.......................................433
Y. Huang, L. Smith, M.J.
Ют,
R.W.
Carpenter, and R.F. Davis
COMPARISON OF AMORPHOUS AND POLYCRYSTALUNE TUNGSTEN
NITRIDE DIFFUSION BARRIER FOR MOCVD-Cu METALLIZATION
..............441
Chul
Soon Kwon, Dong
Joon
Kim, Chang Woo Lee, Yong
Тае Ют,
and In-Hoon Choi
CHARACTERIZATION AND ANNEALING OF SPUTTERED A1N
FILMS FOR PIEZOELECTRIC RESONATORS
.............................447
Mark R.
Schade,
Thomas Anderson, Paul W. Deal, Keenan Evans,
Roland Fischer, Naresh Saha, Wayne A. Cronin, Nigel Cave,
Hang M. Liaw, Jong K. Lin, and Harland G. Tompkins
MECHANISM OF FACET FORMATION DURING EPITAXIAL CoS^
GROWTH USING Co/REFRACTORY BILAYERS
...........................453
Jeong S. Byun, Kwan G. Rha, Woo S.
Ют,
and
Hyeong J. Kim
AMORPHOUS Ti-Si-N BARRIER METAL FOR Cu METALLIZATION
ON ULSIs
....................................................459
Tadashi lijima, Yoshiaki Shimooka, and Kyoichi Suguro
EPITAXIAL TiSi2 GROWTH ON Si(100) FROM REACTIVE
SPUTTERED TiNx AND SUBSEQUENT ANNEALING
........................465
Jeong S. Byun, Kwan G. Rha, and Woo S.
Ют
MICROSTRUCTURE
AND
INTERFACIAL
REACTIONS IN
RuO/TajN PRECISION THIN FILM RESISTORS
...........................471
Erming Ma, Rick L. Wallace, and Wayne A. Anderson
HIGH RESOLUTION MICROSCOPY OF Pd/InP INTERFACES
...................477
J.W. Palmer, W.A. Anderson, and D.T. Hoelzer
CHARACTERIZATION OF TANTALUM OXIDE THIN FILM AND
ITS ELECTRODES FOR DRAM s CAPACITOR APPLICATION
..................483
Jong-Wan Park, Seok-Ryong Jeon, Jae-Suk Lee,
and Jeong-Youb Lee
PART
VII:
THIN FILMS:
GENERAŁ
MICROSTRUCTURES
OF TUNGSTEN SILICIDE FILMS DEPOSITED
BY CVD AND BY SPUTTERING
.....................................491
Young-Wug Kim, Nae-In Lee, and Moon-Han Park
STRUCTURAL-CHEMICAL PROPERTIES OF InP OWN OXIDES
.................497
Gemady S. Korotchenkov and
Valéry
A. Skryshevsky
CONDITION OF INTERFACE: ANODIC OXIDE
-
aV
SEMICONDUCTOR
................................. ... 503
Gennady S. Korotchenkov and Victor A. Michailov
SURFACE STRUCTURE AND MORPHOLOGY OF CdS THIN FILMS
DEPOSTTED BY SPRAY PYROLYSB
............................ 507
V. Gotovanov,
V. Lanttö,
S.
Lenp&vuofi, A. Uusbnakt,
J.
Remes,
and J.
Franiti
EPITAXIAL FORMATION AND CHARACTERIZATION OF CeO, FILMS
......... 513
Chunyan Turn,
Yang Du,
and Siu-Wai Chan
XPS STUDY OF SUB-MONOLAYER NATIVE OXIDE ON HF-TREATED
Si SURFACES
.................................................519
F. Yano, A. Hiraoka, T. Itoga, H.
Kojima,
К.
Kanehori,
and Y. Mitsui
CHARACTERIZATION OF THE DEGRADATION PROCESSES IN THE
BURIED HETEROSTRUCTURE QUANTUM WELL LASER DIODES
USING INTERNAL SECOND HARMONIC EMISSION
........................525
A.T.
Lupu,
A.V. Syrbu,
A.Z.
Mereutza, V.P. Yakovlev,
I.V.
Kravetsky, and L.L. Kulyuk
SURFACE ALLOY PHASES OF IMMISCIBLE METALS: A
SEMŒMPIRICAL
STUDY OF
Au
GROWTH ON Ni(llO)
......................531
Guillermo
Bozzolo,
Rodrigo Ibañez-Meier, and John Ferrante
A MODEL FOR LOW-RESISTIVITY TiSi, FORMATION ON
NARROW
POLYSILICON
LINES
.....................................539
Pushkar P.
Apte
and Gordon Pollack
INFLUENCE OF INTERFACE ROUGHNESS SCATTERING ON
ELECTRON MOBILITY IN
GaAs-AL
jGa,,
7As TWO DIMENSIONAL
ELECTRON
GAS (2DEG)
HETEROSTRUCTURES
...........................545
Bin Yang, Yong-Hai Cheng, Zhan-Guo Wang, Ji-Ben Liang,
Qi-Wei Liao, Lan-Ying Lin, Zhan-Ping Zhu, Bo Xu, and Wei Li
CERAMIC COATINGS IN PUMP MANUFACTURING
........................551
Andreas
Kühl,
Helmut
Riegger, Keim
T.
Scott, A. McCabe,
and Ph. Maurin-Perrier
ZrOi AND
ZrQz-YîOj
PHASE STRUCTURE IN FILMS
AND POWDERS
................................................557
R. Caruso,
N.
Pellegri, O.
De
Sanctis, M.C. Caracoche,
and
P.C. Rivas
RF
AEROSOL MIST PLASMA DEPOSITION OF OXIDE FILMS
..................563
J.A.A. Williams, C.Q. Shen, K.D. Vuong, E. Tenpas,
R.A. Condrate, Sr.,
D.H.
Lee,
H. Wang, J.
Fagan,
X.W.
Wang,
J.
Stuckey,
M.
DeMarco,
W. Yu, and A.
Petrou
ELASTIC MISFIT STRAIN RELAXATION IN HIGHLY STRAINED InAs
DOTS ON GaAs AS STUDIED BY
ТЕМ,
AFM AND VFF ATOMISTIC
CALCULATIONS
...............................................569
Y. Androussi, P. Francois, A. Lefebvre,
С
Priester,
I. Lefebvre, G. Allan, M. Lannoo, J.M. Moison,
N.
Lebouche, and
F. Barme
MODELING OF COLLIMATED TITANIUM NITRIDE PHYSICAL
VAPOR DEPOSITION USING A COMBINED SPECULAR-DIFFUSE
FORMULATION
................................................575
A.J. Toprac, B.P. Jones, J. Schlueter, and T.S.
Cale
VERY LOW TEMPERATURE DEPOSITION OF POLYCRYSTALLINE
SILICON FILMS WITH MICRO-METER-ORDER GRAINS ON SiOj
................581
Kun-Chih Wang, Tri-Rung Yew, and Huey-Liang Hwang
ZnO:In THIN FILMS PREPARED WITH DIFFERENT PRECURSOR
SALTS BY SPRAY PYROLYSIS AND STUDIED BY ELECTRON
MICROSCOPY
.................................................587
D.R.
Acosta,
О.
Lovera,
A. MaJdonado, R. Asomoza,
H.
Gomez,
A. Palafox, M. de la L. CH vera, and J. Palacios-Gomez
CAPILLARY INSTABILITIES IN COBALT
ЅПЈСШЕ
THIN FILMS
................593
Shekhar Pramanick, Bijoy Patraik, and George A. Rozgonyi
SURFACE
TOPOGRAPHY OF COCONDENSED AMORPHOUS ZrCo-ALLOY
FILMS INVESTIGATED
Ш
SITU BY UHV-STM
............................601
B. Reinker, M. Moske, H.
Geisler,
and K. Samwer
GRAIN GROWTH BEHAVIOR OF BISMUTH TITANATE THIN FILM
ON METALLIC SILICON SUBSTRATES
.................................607
Yanxia
Lu,
Walter A.
Schulze,
and David T. Hoelzer
MICROSTRUCTURE
AND SURFACE MORPHOLOGY OF Ag AND
Au
FILMS GROWN ON HYDROGEN-TERMINATED Si(lll)
SUBSTRATES
.................................................613
R. Naik, G.W. Auner, S. Gebremariam, A. Tatham, B.U.M. Rao,
Y.S.
Lu,
Z.L. Wu, and P.K. Kuo
STRUCTURAL EVOLUTION OF HIGHLY CROSSLINKED POLYMER
NETWORKS
..................................................619
Kristi
S. Anseth
and Christopher
N.
Bowman
DIRECT SUB-LATTICE IMAGING OF INTERFACE DISLOCATION
STRUCTURES IN CdTe/GaAsiOOl)
....................................625
A.J. McGibbon, S.J. Pennycook, J.E.
Angelo,
and
M.J. Mills
THE EFFECT OF Si ON TiAl3 FORMATION IN
Ti/Al
ALLOY BILAYERS
...........631
Paul R.
Besser,
John E. Sanchez, Jr., and Roger Alvis
EFFECTS OF RAPID THERMAL ANNEALING ON HEAVILY
BORON DOPED SILICON EPITAXIAL LAYERS
...........................637
Jianbao Wang, Qiang Xu, Fang
Lu,
Henghui Sun,
and Xun Wang
COMPUTER SIMULATION OF SURFACE DIFFUSION OF COPPER
ON COPPER (111) AND
(100)
SURFACES
...............................643
J.
Takáno,
M.
Mochizuki, and Masao Doyama
REDUCTION OF DEFECTS IN HIGHLY LATTICE MISMATCHED
InGaAs GROWN ON GaAs BY MOCVD
.................................649
Bun Lee, Meeyoung Yoon, Jong-Hyeob Baek, El-Hang Lee,
and Jeong Yong Lee
DEFECT-FREE GaAs CAP LAYER ON ALUMINUM OXIDE
GENERATED BY THERMAL OXIDATION OF AlAs
.........................655
Bun Lee, Meeyoung Yoon, Jong-Hyeob Baek,
and El-Hang Lee
AUTHOR INDEX
...............................................661
SUBJECT INDEX
............................................. .665
Xl
|
| any_adam_object | 1 |
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| bvnumber | BV010393615 |
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| classification_tum | PHY 650f |
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| dewey-ones | 530 - Physics |
| dewey-raw | 530.4/175 |
| dewey-search | 530.4/175 |
| dewey-sort | 3530.4 3175 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1994 Boston Mass. gnd-content Festkörperfläche gnd |
| genre_facet | Konferenzschrift 1994 Boston Mass. Festkörperfläche |
| id | DE-604.BV010393615 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:51:44Z |
| institution | BVB |
| isbn | 1558992561 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006921135 |
| oclc_num | 32389702 |
| open_access_boolean | |
| owner | DE-384 DE-19 DE-BY-UBM DE-355 DE-BY-UBR DE-91G DE-BY-TUM DE-703 DE-83 |
| owner_facet | DE-384 DE-19 DE-BY-UBM DE-355 DE-BY-UBR DE-91G DE-BY-TUM DE-703 DE-83 |
| physical | XV, 668 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Evolution of thin film and surface structure and morphology symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. ed.: B. G. Demczyk ... Pittsburgh, Pa. Materials Research Soc. 1995 XV, 668 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 355 Thin films Congresses Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Festkörperoberfläche (DE-588)4127823-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1994 Boston Mass. gnd-content Festkörperfläche gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s DE-604 Festkörperfläche f Festkörperoberfläche (DE-588)4127823-9 s Demczyk, B. G. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 355 (DE-604)BV001899105 355 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006921135&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Evolution of thin film and surface structure and morphology symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Thin films Congresses Dünne Schicht (DE-588)4136925-7 gnd Festkörperoberfläche (DE-588)4127823-9 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4127823-9 (DE-588)1071861417 |
| title | Evolution of thin film and surface structure and morphology symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_auth | Evolution of thin film and surface structure and morphology symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_exact_search | Evolution of thin film and surface structure and morphology symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_full | Evolution of thin film and surface structure and morphology symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. ed.: B. G. Demczyk ... |
| title_fullStr | Evolution of thin film and surface structure and morphology symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. ed.: B. G. Demczyk ... |
| title_full_unstemmed | Evolution of thin film and surface structure and morphology symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. ed.: B. G. Demczyk ... |
| title_short | Evolution of thin film and surface structure and morphology |
| title_sort | evolution of thin film and surface structure and morphology symposium held november 28 december 2 1994 boston massachusetts u s a |
| title_sub | symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| topic | Thin films Congresses Dünne Schicht (DE-588)4136925-7 gnd Festkörperoberfläche (DE-588)4127823-9 gnd |
| topic_facet | Thin films Congresses Dünne Schicht Festkörperoberfläche Konferenzschrift 1994 Boston Mass. Festkörperfläche |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006921135&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT demczykbg evolutionofthinfilmandsurfacestructureandmorphologysymposiumheldnovember28december21994bostonmassachusettsusa |