Polymeric materials for microelectronic applications: science and technology ; developed from a symposium sponsored by the Polymers for Microelectronics and Photonics Group of the Society of Polymer Science, Japan, and the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society, at the Polymers for Microelectronics 1993 Meeting, Kawasaki, Japan, November 15 - 19, 1993
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Bibliographic Details
Format: Book
Language:English
Published: Washington, DC American Chemical Soc. 1994
Series:American Chemical Society: ACS symposium series 579
Subjects:
Physical Description:IX, 468 S. Ill., zahlr. graph. Darst.
ISBN:0841230552

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