Ion implantation technology: selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994
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| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Amsterdam
North-Holland
1995
|
| Series: | Nuclear instruments and methods in physics research / B
96,1/2 |
| Subjects: | |
| Item Description: | Stücktitelaufnahme zu e. Zeitschriftenheft |
| Physical Description: | XIII, 439 S. Ill., graph. Darst. |
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| physical | XIII, 439 S. Ill., graph. Darst. |
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| spelling | Ion implantation technology selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 eds. Salvatore Coffa ... Amsterdam North-Holland 1995 XIII, 439 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nuclear instruments and methods in physics research / B 96,1/2 Stücktitelaufnahme zu e. Zeitschriftenheft Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1994 Catania gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Coffa, Salvatore Sonstige oth International Conference on Ion Implantation Technology 10 1994 Catania Sonstige (DE-588)5155059-3 oth |
| spellingShingle | Ion implantation technology selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation technology selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 |
| title_auth | Ion implantation technology selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 |
| title_exact_search | Ion implantation technology selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 |
| title_full | Ion implantation technology selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 eds. Salvatore Coffa ... |
| title_fullStr | Ion implantation technology selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 eds. Salvatore Coffa ... |
| title_full_unstemmed | Ion implantation technology selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 eds. Salvatore Coffa ... |
| title_short | Ion implantation technology |
| title_sort | ion implantation technology selected papers of the tenth international conference on ion implantation technology catania italy june 13 17 1994 |
| title_sub | selected papers of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13 - 17, 1994 |
| topic | Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ionenimplantation Konferenzschrift 1994 Catania |
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