ULSI science and technology 1993: proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Pennington, NJ
Electrochemical Soc.
1993
|
| Series: | Electrochemical Society: Proceedings
1993,13 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | VII, 306 S. Ill., graph. Darst. |
| ISBN: | 1566770637 |
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MARC
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| 245 | 1 | 0 | |a ULSI science and technology 1993 |b proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology |c ed. by George K. Celler ... |
| 264 | 1 | |a Pennington, NJ |b Electrochemical Soc. |c 1993 | |
| 300 | |a VII, 306 S. |b Ill., graph. Darst. | ||
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Record in the Search Index
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| adam_text | TABLE
OF
CONTENTS
Preface iii
ULSI Research
and Development in the
United States: Status and
Outlook, P. K. Chatterjee and G. B. Larrabee
1
ULSI Technology
and Semiconductor Industry in Taiwan
-
Prospects and
Challenges,
С
Y. Lu
21
ULSI Research and Development in Japan, K. Hashimoto
and M. Kashiwagi
30
SOI Technology for Deep-Submicron CMOS Applications,
J.-P.
Colinge
39
Bipolar and BiCMOS Devices and Circuits for ULSI,
T. Nakamura
55
Advanced Device Structures and Technology Issues for Deep
Submicron
CMOS, J. R. Pfiester
72
Process Simulation in
Submicron
Silicon Structures, J. D.
Plummer 93
Silicon Materials for the Mega-IC Era, H. R. Huff
103
Total Single-Wafer Processing for
0.35-μΐη
Flexible Manufacturing
R. R. Doering
133
Ultra Shallow Junctions: Formation, Characterization, and Modeling,
C. M.
Osburn,
S. Chevacharœnkul,
Q. F.
Wang,
J. Y. Tsai, A.
Cowen, J. Rose, X. Zhang, and
M.
Kellam
146
Towards ULSI Reliability by
Design,
C. Hu
158
Reliable Thin-Gate Oxide Films Formed After UV Cleaning, T.
Ito,
R.
Sugino, and Y. Sato
163
Insulator Defects: Where? What? How Many? How Big?, A. Reisman
172
The Influence of HF, OH~, and Dissolved O2 on Silicon Surface Chemical
Cleaning, G. S. Higashi, Y. J. Chabal, K. Raghavachari,
R. S.
Becker,
M. P. Green, K. Hanson, T. Boone,
J. H.
Eisenberg,
S. F. Shive,
G.
N.
DiBello, and K. L. Fulford
189
Advanced Wet
Cleaning
Technology
For Highly Reliable Thin Oxides,
S. Verhaverbeke, M. Meuris, P. Mertens, H. Schmidt,
M. M.
Heyns,
A. Philipossian, D. Graf, and K.
Dillenbeck 199
Stress Voiding and Electromigration Failure in Multilevel Interconnect
Metallization, P. S. Ho, S. G. H. Anderson, I. S. Yeo, and
C. K. Hu
220
Excimer Laser Lithography,
N.
Nomura, K. Yamashita, M. Endo,
and M. Sasago
238
Х
-Ray Lithography: An Update and Recent Results, R. Viswanathan,
A. Bright, D. Seeger, T. Bucelot, M. Polcari, and J. Warlaumont
255
Issues and Future Trends For Advanced Dry Etching, Y. Horiike
263
Plasma Etching for Ultra Large Scale Integrated Circuit
Manufacturing, R. A. Gottscho
283
Author Index
296
Subject Index
298
|
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| genre | (DE-588)1071861417 Konferenzschrift 1993 Honolulu Hawaii gnd-content |
| genre_facet | Konferenzschrift 1993 Honolulu Hawaii |
| id | DE-604.BV010086884 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:46:14Z |
| institution | BVB |
| institution_GND | (DE-588)5163072-2 |
| isbn | 1566770637 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006693893 |
| oclc_num | 29482678 |
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| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | VII, 306 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | ULSI science and technology 1993 proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology ed. by George K. Celler ... Pennington, NJ Electrochemical Soc. 1993 VII, 306 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 1993,13 Circuits intégrés à très grande échelle ram Integrated circuits Ultra large scale integration Congresses ULSI (DE-588)4226286-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Honolulu Hawaii gnd-content ULSI (DE-588)4226286-0 s DE-604 Celler, George K. Sonstige oth International Symposium on Ultra Large Scale Integration Science and Technology 4 1993 Honolulu, Hawaii Sonstige (DE-588)5163072-2 oth Electrochemical Society: Proceedings 1993,13 (DE-604)BV001900941 1993,13 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006693893&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | ULSI science and technology 1993 proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology Electrochemical Society: Proceedings Circuits intégrés à très grande échelle ram Integrated circuits Ultra large scale integration Congresses ULSI (DE-588)4226286-0 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)1071861417 |
| title | ULSI science and technology 1993 proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology |
| title_auth | ULSI science and technology 1993 proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology |
| title_exact_search | ULSI science and technology 1993 proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology |
| title_full | ULSI science and technology 1993 proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology ed. by George K. Celler ... |
| title_fullStr | ULSI science and technology 1993 proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology ed. by George K. Celler ... |
| title_full_unstemmed | ULSI science and technology 1993 proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology ed. by George K. Celler ... |
| title_short | ULSI science and technology 1993 |
| title_sort | ulsi science and technology 1993 proceedings of the fourth international symposium on ultra large scale integration science and technology |
| title_sub | proceedings of the Fourth International Symposium on Ultra Large Scale Integration Science and Technology |
| topic | Circuits intégrés à très grande échelle ram Integrated circuits Ultra large scale integration Congresses ULSI (DE-588)4226286-0 gnd |
| topic_facet | Circuits intégrés à très grande échelle Integrated circuits Ultra large scale integration Congresses ULSI Konferenzschrift 1993 Honolulu Hawaii |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006693893&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001900941 |
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