Handbook of surface metrology:
Saved in:
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Bristol u.a.
Inst. of Physics Publ.
1994
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| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XXVI, 988 S. Ill., graph. Darst. |
| ISBN: | 0750300396 |
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| 100 | 1 | |a Whitehouse, David J. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Handbook of surface metrology |c David J. Whitehouse |
| 264 | 1 | |a Bristol u.a. |b Inst. of Physics Publ. |c 1994 | |
| 300 | |a XXVI, 988 S. |b Ill., graph. Darst. | ||
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| 650 | 4 | |a Surfaces (Technology) |x Measurement | |
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| adam_text | HANDBOOK OF SURFACE METROLOGY DAVID J WHITEHOUSE UNIVERSITY OF WARWICK
INSTITUTE OF PHYSICS PUBLISHING BRISTOL AND PHILADELPHIA CONTENTS
DEDICATION V FOREWORD BY PROFESSOR D DOWSON VII PREFACE XXIII
ACKNOWLEDGMENTS XX V 1. GENERAL PHILOSOPHY OF MEASUREMENT 1 1.1 WHERE
DOES SURFACE METROLOGY SST IN ENGINEERING METROLOGY? 1 1.2 IMPORTANCE OF
SURFACE METROLOGY -2 2. SURFACE CHARACTERIZATION THE NATURE OF SURFACES
AND THE SIGNALS OBTAINED FROM THEM 5 2.1 SURFACE ROUGHNESS
CHARACTERIZATION 7 2.1.1 PROFILE PARAMETERS 10 2.1.1.1 AMPLITUDE
PARAMETERS 12 2.1.1.2 SPATING PARAMETERS 16 2.1.1.3 HYBRID PARAMETERS 18
2.1.2 REFERENCE LINES 20 2.1.2.1 STRAIGHT LINES 21 2.1.2.2 POLYNOMIAL
FITTING 24 2.1.2.3 SPLINE FUNDIONS 27 2.1.2.4 FILTERING METHODS 27
2.1.2.5 ENVELOPE METHODS 40 2.1.2.6 SUMMARY 45 2.1.3 STATISTICAL
PARAMETERS OF SURFACE ROUGHNESS 45 2.1.3.1 AMPLITUDE PROBABILITY DENSITY
FUNDION (APDF) OR P(Z) 45 2.1.3.2 MATERIAL RATIO 4 6 2.1.3.3
AUTOCORRELATION FUNDION (ACF) AND POWER SPEDRAL DENSITY (PSD) 49 2.1.3.4
POWER SPECTRUM 58 2.1.3.5 HYBRID STATISTICAL PARAMETERS * PEAK AND
VALLEY CHARADERISTICS 60 2.1.4 AREAL TEXTURE PARAMETERS, ISOTROPY AND
LAY (CONTINUOUS SIGNAL) 63 2.1.4.1 DIRED METHODS OF STATISTICAL
ASSESSMENT OVER AN AREA 64 X CONTENTS -THE CHARACTERIZATION OF SPATIAL
2.1.5 DISCRETE CHARACTERIZATION 2.1.5.1 GENERAL 2.1.5.2 ALTERNATIVE
DISCRETE METHODS 2.1.6 ASSESSMENT OF ISOTROPY AND LAY 2.1. 7 POTENTIAL
METHODS OF CHARACTERIZATION 2.1.7.1 AMPLITUDE AND HYBRID PARAMETERS
2.1.7.2 SKEW AND KURTOSIS 2.1.7.3 BETA FUNCTION 2.1.7.4 CHEBYSHEV
FUNCTION AND LOG NORMAL FUNCTION 2.1.7.5 VARIATIONS ON MATERIAL RATIO
CURVE 2.1.7.6 TIME SERIES ANALYSIS METHODS OF CHARACTERIZATION-
INFORMATION 2.1.7.7 POSSIBLE METHODS OF CLASSIFICATION BASED ON A
FOURIER APPROACH 2.1.7.8 SPACE*FREQUENCY FUNCTIONS 2.1.8 FRACTALS 2.1.9
SURFACE TEXTURE AND NON-LINEAR DYNAMICS IN MACHINES 2.2 WAVINESS 2.3
ERRORS OF FORM 2.3.1 INTRODUCTION 2.3.2 STRAIGHTNESS AND RELATED TOPICS
2.3.3 GENERALIZED PROBE CONFIGURATIONS FOR VARIABLE ERRORS 2.3.4
ASSESSMENTS AND CLASSIFICATION 2.3.5 FLATNESS 2.3.6 ROUNDNESS 2.3.6.1
NATURE OF DEPARTURES FROM ROUNDNESS 2.3.6.2 CHORDAL METHODS 2.3.6.3
RADIAL METHODS 2.3.6.4 NATURE OF THE SIGNAL PRODUCED BY A RADIAL
DEPARTURE INSTRUMENT 2.3.6.5 RELATION BETWEEN THE CENTRED WORKPIECE
PROFILE AND THE RADIUS-SUPPRESSED POLAR PLOT 2.3.6.6 EFFECT OF IMPERFECT
CENTRING 2.3.6.7 ASSESSMENT OF RADIAL, DIAMETRAL AND ANGULAR VARIATIONS
2.3.6.8 ROUNDNESS ASSESSMENT 2.3.6.9 EFFECT OF IMPERFECT CENTRING ON THE
MINIMUM ZONE METHOD 2.3.6.10 EFFECT OF ANGULAR DISTORTION 2.3.6.11
EQUATION OF A REFERENCE LINE IO FIT A PARTIAL CIRCULAR ARC AS SEEN BY A
ROUNDNESS INSTRUMENT 2.3.6.12 LOBING COEFFICIENTS 2.3.6.13 ROUNDNESS
ASSESSMENT WITHOUT A FORMAL DATUM 2.3.6.14 ECCENTRICITY, CONCENTRICITY
2.3.6.15 SQUARENESS 2.3.6.16 CURVATURE MEASUREMENT FROM ROUNDNESS DATA
2.3.6.17 ESTIMATION OF CURVATURE IN THE PRESENCE OF NOISE 2.3.6.18
ESTIMATION OF RADIAL SLOPE 2.3.6.19 ASSESSMENT OF OVALITY AND OTHER
SHAPES 2.3.6.20 TWO-DIMENSIONAL MEASUREMENT * SPHERICITY 2.3.6.21
INTERPRETATION OF RESULTS OF EQUATIONS (2.354)*(2.362) 2.3.7
CYLINDRICITY 2.3.7.1 METHODS OF SPECIFYING CYLINDRICITY 2.3.7.2
ASSESSMENT OF CYLINDRICAL FORM 72 72 75 77 80 80 80 81 84 85 88 91 93 96
101 102 114 114 115 117 118 120 126 127 129 }31 132 134 135 137 139 143
143 146 150 152 156 159 159 162 172 173 175 179 181 183 184 CONTENTS XI
2.3.7.3 REFERENCE FIGURES FOR CYLINDER MEASUREMENT 190 2.3.7.4 PRACTICAL
CONSIDERATIONS OF CYLINDROID REFERENCES 193 2.3.7.5 LIMACON CYLINDRICAL
REFERENCES 193 2.3.7.6 CONICITY I96 2.4 COMPARISON OF DESSNITIONS FOR
SURFACE METROLOGY AND COORDINATE-MEASURING MACHINES 196 2.4.1 OTHER
DIFFERENCES 198 2.5 CHARACTERIZATION OF DEFECT SHAPES ON THE SURFACE 200
2.5.1 GENERAL 200 2.5.2 DIMENSIONAL CHARACTERISTICS OF DEFECTS 200 2.5.3
TYPES OF DEFECT 200 2.6 SUMMARY 202 REFERENCES 202 3. PROCESSING 209 3.1
DIGITAL METHODS 21 3.1.1 SAMPLING 210 3.1.2 QUANTIZATION 213 3.1.3
NUMERICAL ANALYSIS * THE DIGITAL MODEL 214 3.1.3.1 DIFFERENTIATION 214
3.1.3.2 INTEGRATION 215 3.1.3.3 INTERPOLATION, EXTRAPOLATION 217 3.2
DIGITAL PROPERTIES OF RANDOM SURFACES 218 3.2.1 SOME NUMERICAL PROBLEMS
ENCOUNTERED IN SURFACE METROLOGY 218 3.2.2 DEFINITIONS OF A PEAK AND
DENSITY OF PEAKS 218 3.2.3 EFFECT OF QUANTIZATION 219 3.2.4 EFFECT OF
NUMERICAL MODEL 221 3.2.5 EFFECT OF DISTANCE BETWEEN SAMPLES ON PEAK
DENSITY VALUE 222 3.2.6 DIGITAL EVALUATION OF OTHER IMPORTANT PEAK
PARAMETERS 226 3.2.6.1 PEAK HEIGHL MEASUREMENT 226 3.2.6.2 PEAK
CURVATURE 227 3.2.6.3 PROFILE SLOPES 229 3.2.6.4 SUMMARY 232 3.2.7 AREAL
(TWO-DIMENSIONAL) DIGITAL MEASUREMENT OF SURFACE ROUGHNESS PARAMETERS
233 3.2.7.1 GENERAL 233 3.2.7.2 THE EXPECTED SUMMIT DENSITY AND THE
DISTRIBUTIONS OF SUMMIT HEIGHT AND CURVATURE 3.2.7.3 THE EFFECI OF THE
SAMPLING INTERVAL AND LIMITING RESULTS FOR THE DISCRETE SURFACE 236
3.2.8 PATTERNS OF SAMPLING AND THEIR EFFECTS ON DISCRETE PROPERTIES 240
3.2.8.1 COMPARISON OF THREE-, FOUR-, FIVE- AND SEVEN-POINT ANALYSIS OF
SURFACES 240 3.2.8.2 FOUR-POINT SAMPLING SCHEME IN A PLANE 240 3.2.8.3
THE EFFECT OF SAMPLING INTERVAL AND LIMITING RESULTS ON SAMPLE PATTERNS
245 3.2.8.4 DISCUSSION 248 3.3 FOURIER TRANSFORM AND THE FAST FOURIER
TRANSFORM 251 3.3.1 GENERAL PROPERTIES OF THE FOURIER TRANSFORM 251
3.3.2 FAST FOURIER TRANSFORM ROUTINE 252 3.3.2.1 FAST FOURIER TRANSFORM
ANALYTIC FORM 253 3.3.3 A PRACTICAL REALIZATION OF THE FAST FOURIER
TRANSFORM 256 3.3.4 GENERAL CONSIDERATIONS 258 3.3.4.1 THE FOURIER
SERIES OF REAL DATA 259 234 XLL CONTENTS 3.3.5 APPLICATIONS OF FOURIER
TRANSFORMS WITH PARTICULAR REFERENCE TO THE FFT 259 3.3.5.1 USE OF
FOURIER TRANSFORM FOR NON-RECURSIVE FILTERING 259 3.3.5.2 POWER SPECTRAL
ANALYSIS 260 3.3.5.3 CORRELATION 260 3.3.5.4 OTHER CONVOLUTIONS 260
3.3.5.5 INTERPOLATION 261 3.3.5.6 OTHER ANALYSIS 261 3.3.5.7 ROUNDNESS
ANALYSIS 261 3.4 STATISTICAL PARAMETERS IN DIGITAL FORM 262 3.4.1
AMPLITUDE PROBDBILITY DENSITY FUNCTION 262 3.4.2 STATISTICAL MOMENIS OF
THE APDF 263 3.4.3 AUTOCORRELAIION FUNCTION (ACT) 263 3.4.4
AUTOCORRELATION MEASUREMENT USING FFT 264 3.4.5 MEASUREMENT OF POWER
SPECTRAL DENSITY (PSD) 264 3.5 PROPERTIES AND IMPLEMENTATION OF THE
AMBIGUITY FUNCTION AND WIGNER DISTRIBUTION FUNCTION 267 3.5.1 GENERAL
267 3.5.2 AMBIGUITY FUNCTION 267 3.5.2.1 SPATIAL SHIFT 268 3.5.2.2
FREQUENCY SHIFT 268 SPATIAL-LIMILED SIGNALS 268 FREQUENCY-LIMITED
SIGNALS 268 CONCENTRATION OF ENERGY 268 TOTAL ENERGY 268 CONVOLUTION 268
MODULATION 268 DISCRETE AMBIGUITY FUNCTION 268 3.5.2.10 COMPUTATION OF
DAF 269 3.5.3 THE WIGNER DISTRIBUTION FUNCTION 270 3.5.3.1 PROPERTIES
270 SYMMETRY 270 REALNESS 270 SPATIAL SHIFTING 270 FREQUENCY SHIFTING
270 SPATIAL-LIMITED SIGNAL 270 FREQUENCY LIMITING 270 SPATIAL ENERGY 270
FREQUENCY ENERGY 270 3.5.3.10 TOTAL ENERGY 270 3.5.3.11 CONVOLUTION 270
3.5.3.12 MODULATION 271 3.5.3.13 ANALYTIC SIGNALS 271 3.5.3.14 MOMENIS
271 3.5.4. SOME EXAMPLES OF WIGNER DISTRIBUTION: APPLICATION TO SIGNALS
* WAVINESS 273 3.5.5 COMPARISON OF THE FOURIER TRANSFORM, THE AMBIGUITY
FUNCTION AND THE WIGNER DISTRIBUTION FUNCTION 274 3.6 DIGITAL ESTIMATION
OF REFERENCE LINES FOR SURFACE METROLOGY 275 3.6.1 NUMERICAL FILTERING
MEIHODS FOR ESTABLISHING MEAN LINES FOR ROUGHNESS AND WAVINESS PROFILES
275 3.6.2 CONVOLUTION FILTERING 275 3.5.2.3 3.5.2.4 3.5.2.5 3.5.2.6
3.5.2.7 3.5.2.8 3.5.2.9 3.5.3.2 3.5.3.3 3.5.3.4 3.5.3.5 3.5.3.6 3.5.3.7
3.5.3.8 3.5.3.9 CONTENTS 3.6.3 STANDARD FILIER 3.6.4 PHASE-CORREDED
(LINEAR PHASE) FILTERS, OTHER FILTERS AND FILIERING ISSUES 3.6.5
GAUSSIAN FILIER 3.6.6 BOX FUNDIONS 3.6.7 TRUNCATION 3.6.8 ALTERNATIVE
METHODS OF COMPUTATION 3.6.9 EQUAL-WEIGHT LECHNIQUES 3.6.10 RECURSIVE
FILTERS 3.6.11 THE DISCRETE IRANSFER FUNDION 3.6.12 THE ICK FILIER
3.6.13 USE OF THE FFT IN SURFACE MEIROLOGY FILIERING * AREAL CASE 3.6.14
EXAMPLES OF NUMERICAL PROBLEMS IN STRAIGHTNESS AND FLATNESS 3.6.15
EFFECT OF COMPUTER WARD FORMAT 3.7 ALGORITHMS 3.7.1 DIFFERENCES BETWEEN
SURFACE AND DIMENSIONAL MEIROLOGY ALGORILHMS: LEASL-SQUARES EVALUATION
OF GEOMETRIC ELEMENTS 3.7.1.1 OPLIMIMLION 3.7.1.2 LINEAR LEASL SQUARES
3.7.1.3 EIGENVECTORS AND SINGULAR VALUE DECOMPOSITION 3.7.2 BEST-FIT
SHAPES 3.7.2.1 BEST-FIT PLANE 3.7.2.2 CIRCLES, SPHERES, ETC 3.7.2.3
CYLINDERS AND CONES 3.7.3 OTHER METHODS 3.7.3.1 MINIMUM ZONE METHOD
3.7.4 MINIMAX METHODS * CONSTRAINED OPTIMIZATION 3.7.5 SIMPLEX METHODS
3.7.6 BASIC CONCEPTS IN LINEAR PROGRAMMING 3.7.6.1 GENERAL 3.7.6.2 DUAL
LINEAR PROGRAMMES IN SURFACE MEIROLOGY 3.7.6.3 MINIMUM RADIUS
CIRCUMSCRIBING LIMACON 3.7.6.4 MINIMUM ZONE, STRAIGHL LINES AND PLANES
3.7.6.5 MINIMAX PROBLEMS 3.8 TRANSFORMATIONS IN SURFACE METROLOGY 3.8.1
GENERAL 3.8.2 HARTLEY IRANSFORM 3.8.3 SQUARE WAVE FUNDIONS * WALSH
FUNDIONS 3.8.4 SPACE*FREQUENCY FUNDIONS 3.8.5 GABOR TRANSFORMS 3.9
GRAPHICAL METHODS 3.9.1 THE PLANIMETER AND ITS USES IN SURFACE METROLOGY
3.9.2 GRAPHICAL WAYS OF ESTIMATING RANDOM PROCESS PARAMETERS 3.9.2.1
AUTOCORRELATION FUNDION 3.9.2.2 HARMONIE ANALYSIS 3.10 OTHER METHODS OF
PROCESSING 3.10.1 CORRELATION 3.10.1.1 REAL-TIME MAGNETIC TAPE
CORRELATOR 3.10.1.2 OPTICAL ANALOGUE METHOD (SIMULTANEOUS METHOD)
3.10.1.3 OPTICAL ANALOGUE METHOD (SEQUENTIAL METHOD) 3.10.1.4 STYLUS
METHOD * SEQUENTIAL OPERATION 275 280 282 283 284 286 287 289 289 293
294 295 297 299 299 300 300 301 301 301 301 304 310 310 311 311 314 314
314 315 317 319 321 321 322 323 325 327 328 328 331 331 332 337 337 338
338 339 339 XIV CONTENTS 3.10.2 QUANTIZATION CORRELATORS 340 3.10.2.1
SAMPLED AND CLIPPED SIGNALS INVOLUING DIGITAL URNE COMPRESSION 341
3.10.2.2 POWER SPECTRA 341 3.11 SURFACE GENER MAN 343 3.11.1 PROFILE
GENERATION 343 3.11.2 TWO-DIMENSIONAL SURFACE GENERATION 347 3.12
SUMMARY 351 REFERENCES 351 4. INSTRUMENTATION 355 4.1 INTRODUCTION AND
HISTORICAL 355 4.1.1 HISTORICAL DETAILS 355 4.1.2 SOME EARLY DATES OF
IMPORTANCE IN THE METROLOGY AND PRODUDION OF SURFACES 356 4.1.3
SPECIFICATION 358 4.1.4 DESIGN CRITERIA FOR INSTRUMENTATION 359 4.1.5
KINEMATICS 359 4.1.6 PSEUDO-KINEMATIC DESIGN 362 4.1.7 MOBILITY 362
4.1.8 LINEAR HINGE MECHANISMS 364 4.1.9 ANGULAR MOTION FLEXURES 367
4.1.10 MEASUREMENT AND FORCE LOOPS 368 4.1.11 ALIGNMENT ERRORS 369
4.1.11.1 ABBE OFFSET 369 4.1.12 OTHER MECHANICAL CONSIDERATIONS *
BALANCE OF FORCES 370 4.1.13 SYSTEMATIC ERRORS AND NON-LINEARIIIES 371
4.1.14 MATERIAL SELECTION 372 4.1.15 DRIVE SYSTEMS 3 73 4.2 MEASUREMENT
SYSTEMS 376 4.2.1 GENERAL STYLUS SYSTEMS 376 4.2.2 STYLUS
CHARACTERISTICS 378 4.1.2.1 TACTILE CONSIDERATIONS 378 4.2.2.2 PICK-UP
DYNAMICS 383 4.2.2.3 CONCLUSIONS ABOUT MECHANICAL PICK-UPS OF
INSTRUMENTS USING THE CONVENTIONAL APPROACH 389 4.2.2.4 RELATIONSHIP
BETWEEN STATIC AND DYNAMIC FORCES 391 4.2.2.5 ALTERNATIVE STYLUS SYSTEMS
AND EFFECT ON REACTION/RANDOM SURFACE 396 4.2.2.6 CRITERIA FOR SCANNING
SURFACE INSTRUMENTS 397 4.2.2.7 FORMS OF THE PICK-UP EAUALION 398
4.2.2.8 MEASUREMENT SYSTEMS 402 4.2.2.9 SPATIAL DOMAIN INSTRUMENTS 406
4.2.2.10 OPEN- AND CLOSED-LOOP CONSIDERATIONS 408 4.2.3 SCANNING
MICROSCOPES 409 4.2.3.1 SCANNING TUNNELLING MICROSCOPE (STM) 409 4.2.3.2
OTHER SCANNING MICROSCOPES 410 4.2.3.3 OPERATION AND THEORY OF THE STM
412 4.2.3.4 SPEDROSCOPY 414 4.2.3.5 SOME SIMPLE SCANNING SYSTEMS 415
4.2.3.6 THE ATOMIC FORCE MICROSCOPE 418 4.2.4 ASPECTS OF STYLUS
INSTRUMENTS 421 CONTENTS 4.2.4.1 PICK-UP CONFIGURATION 421 4.2.4.2
GENERATION OF THE SKID DATUM 423 4.2.4.3 STYLUS INSTRUMENTS WHERE THE
STYLUS INTEGRATES 432 4.2.4.4 ALIGNMENT OF THE STYLUS SYSTEM 433 4.2.4.5
LIMITATIONS OF REFERENCES USED IN ROUNDNESS MEASUREMENT 434 4.2.4.6
OTHER STYLUS METHODS 436 4.2.4.7 REPLICATION 440 4.2.5 AREAL (3D)
MAPPING OF SURFAAS USING STYLUS METHODS 441 4.2.5.1 GENERAL PROBLEM 441
4.2.5.2 MAPPING 442 4.2.5.3 CRITERIA FOR AREAL MAPPING 443 4.2.5.4
MOVEMENT POSITIONS ON SURFACE AND SAMPLING PATTERNS 446 4.2:5.5 CONTOUR
AND OTHER MAPS OF SURFACES 452 4.3 OPTICAL TECHNIQUES FOR THE
MEASUREMENT OF SURFACES 453 4.3.1 GENERAL 453 4.3.2 PROPERTIES OF THE
FOCUSED SPOT 455 4.3.3 OPTICAL FOLLOWERS 457 4.3.4 HYBRID MICROSCOPES
463 4.3.5 OBLIQUE ANGLE METHODS 466 4.3.6 PHASE DETECTION SYSTEMS 468
4.3.6.1 SPATIAL AND TEMPORAL COHERENCE 468 4.3.6.2 INTERFEROMETRY AND
SURFACE METROLOGY 469 4.3.7 HETERODYNE METHODS 471 4.3.7.1
FREQUENCY-SPLITTING METHOD 471 4.3.7.2 OTHER METHODS IN INTERFEROMETRY
COMPARABLE WITH HETERODYNE METHODS 475 4.3.7.3 RELATIVE MERITS OF
DIFFERENT NANOMETRE INSTRUMENTS 476 4.3.7.4 HIGH-PRECISION
NON-CONTACTING METROLOGY USING SHORT COHERENCE INTERFEROMETRY 479 4.3.8
MOIRE METHODS 481 4.3.8.1 GENERAL 481 4.3.8.2 STRAIN MEASUREMENT 483
4.3.8.3 MOIRE CONTOURING 483 4.3.8.4 SHADOW MOIRE 484 4.3.8.5 PROJECTION
MOIRE 484 4.3.8.6 SUMMARY 486 4.3.9 HOLOGRAPHIE TECHNIQUES 486 5.3.9.1
INTRODUCTION 486 4.3.10 SPECKLE METHODS 491 4.3.11 DIFFRACTION METHODS
501 4.3.12 SCATTEROMETERS (GLOSSMETERS) 512 4.3.13 FLAW DETECTION 517
4.3.13.1 GENERAL 517 4.3.13.2 TRANSFORM PLANE METHODS 518 4.3.13.3 IMAGE
PLANE DETECTION 522 4.3.13.4 WHOLE-FIELD MEASUREMENT * PLANE DETECTION
525 4.3.13.5 COMMENT 526 4.3.14 COMPARISON OF OPTICAL TECHNIQUES 527
4.3.14.1 GENERAL OPTICAL COMPARISON 528 4.4 CAPACITANCE TECHNIQUES FOR
MEASURING SURFACES 532 4.4.1 GENERAL 532 4.4.2 SCANNING CAPACILATIVE
MICROSCOPES 534 XVI CONTENTS 4,4.3 CAPACITANCE AS A PROXIMITY GAUGE 535
4.5 INDUCTANCE TECHNIQUE FOR MEASURING SURFACES 535 4.6 IMPEDANCE
TECHNIQUE*SKIN EFFECT 535 4.7 OTHER NON-STANDARD TECHNIQUES 536 4.7.1
GENERAL 536 4.7.2 FRIDION DEUICES 536 4.7.2.1 THE FRIDION DYNAMOMETER
536 4.7.3 ROLLING-BALL DEVICE 536 4.7.4 LIQUID METHODS * WATER 536 4.7.5
LIQUID METHODS * OIK 537 4.7.6 PNEUMATIC METHODS 537 4.7.7 THERMAL
METHOD 538 4.7.8 ULTRASONICS 538 4.7.9 SUMMARY 540 4.8 ELECTRON
MICROSCOPY 540 4.8.1 GENERAL 540 4.8.2 READION OF ELEDRONS VOITH SOLIDS
543 4.8.3 SCANNING ELECTRON MICROSCOPE 544 4.8.4 TRANSMISSION ELEDRON
MICROSCOPE 546 4.9 MERIT OF TRANSDUCERS 547 4.9.1 COMPARISON OF
TRANSDUCER SYSTEMS 547 4.9.2 TYPES OF CONVERSION AND TRANSDUCER NOISE
553 4.9.2.1 LIMITATION 553 4.9.2.2 RANDOM NOISE LIMITATION 554 4.9.3
TYPES OF CONVERSION AND TYPES OF TRANSDUCER 555 4.9.3.1 GENERAL 555
4.9.3.2 VARIABLE RESISTANCE 55$ 4.9.3.3 VARIABLE INDUCTANCE 555 4.9.3.4
VARIABLE RELUDANCE 557 4.9.3.5 VOLTAGE OR CURRENT GENERATORS 558 4.9.3.6
VARIABLE CAPACITANCE 558 4.9.3.7 SELF-GENERATION VOLTAGE OR CIRCUII 558
4.9.3.8 PHOTODETECTORS 558 4.9.4 MERIT AND COSL 559 4.9.5 EXAMPLES OF
TRANSDUCER PROPERTIES 561 4.9.5.1 INDUCIIVE 561 4.9.5.2 CAPACITATIVE
TRANSDUCER 563 4.9.5.3 OPTICAL LATERAL POSITIONAL SENSOR 564 4.9.5.4
OPTICAL AREA PATTERN PHOIODIODES, TRANSDUCER FOR LATERAL DISPLACEMENT
565 4.9.6 TALYSTEP 565 4.9.7 COMPARISON OF TECHNIQUES * GENERAL SUMMARY
570 REFERENCES 572 5. TRACEABILITY*STANDARDIZATION*VARIABILITY 579 5.1
INTRODUCTION 579 5.2 NATURE OF ERRORS 580 5.2.1 SYSTEMATIC ERRORS 580
5.2.2 RANDOM ERRORS 580 5.3 DETERMINISTIC OR SYSTEMATIC ERROR MODEL 580
CONTENTS XVII 5.4 BASIC COMPONENTS OF ACCURACY EVALUATION 5S1 5.5 BASIC
ERROR THEORY FOR A SYSTEM 582 5.6 PROPAGATION OF ERRORS 5S3 5.6.1
DETERMINISTIC ERRORS 583 5.6.2 RANDOM ERRORS 584 5.7 SOME USEFUL
STATISTICAL TESTS FOR SURFACE METROLOGY 585 5.7.1 CONFIDENCE INTERVALS
FOR ANY PARAMETER 585 5.7.2 TESTS FOR THE MEAN VALUE OF A SURFACE * THE
STUDENT T TEST 585 5.7.3 TESTS FOR THE STANDARD DEVIATION * THE J 2 TEST
587 5.7.4 GOODNESS OFFIT 588 5.7.5 TESTS FOR VARIANCE * THE F TEST 588
5.7.6 MEASUREMENT OF RELEVANCE * FACTORIAL DESIGN 588 5.7.6.1 THE
INTERACTIONS 590 5.7.7 LINES OF REGRESSION 592 5.7.8 METHODS OF
DISCRIMINATION 593 5.8 UNCERTAINTY IN INSTRUMENTS * CALIBRATION IN
GENERAL 593 5.9 THE CALIBRATION OF STYLUS INSTRUMENTS 595 5.9.1 STYLUS
CALIBRATION 596 5.9.2 CALIBRATION OF AMPLIFICATION 599 5.9.3 X-RAY
METHODS 603 5.9.4 PRACTICAL STANDARDS 605 5.9.5 CALIBRATION OF
TRANSMISSION CHARACTERISTICS 607 5.9.6 FILTER CALIBRATION STANDARDS 610
5.10 CALIBRATION OF FORM INSTRUMENTS 612 5.10.1 MAGNITUDE 612 5.10.1.1
MAGNITUDE OF DIAMETRAL CHANGE 613 5.10.2 SEPARATION OF ERRORS *
CALIBRATION OF ROUNDNESS AND FORM 613 5.10.3 GENERAL ERRORS DUE TO
MOTION 620 5.10.3.1 RADIAL MOTION 621 5.10.3.2 FACE MOTION 622 5.10.3.3
ERROR MOTION * GENERAL CASE 622 5.10.3.4 FUNDAMENTAL AND RESIDUAL ERROR
MOTION 623 5.10.3.5 ERROR MOTION VERSUS RUN-OUT (OR TIR) 624 5.10.3.6
FIXED SENSITIVE DIRECTION MEASUREMENTS 625 5.10.3.7 CONSIDERATIONS ON
THE USE OF THE TWO-GAUGEHEAD SYSTEM FOR A FIXED SENSITIVE DIRECTION 626
5.10.3.8 OTHER RADIAL ERROR METHODS 627 5.11 VARIABILITY OF SURFACE
PARAMETERS 6 28 5.12 NATIONAL AND INTERNATIONAL STANDARDS 632 5.12.1
SELECTED LIST OF STANDARDS APPLICABLE TO SURFACE ROUGHNESS MEASUREMENT
632 5.13 SPECISSCATION ON DRAWINGS 6 36 5.13.1 SURFACE ROUGHNESS 636
5.13.1.1 INDICATIONS GENERALLY * MULTIPLE SYMBOLS 640 5.13.1.2 READING
THE SYMBOLS 640 5.13.1.3 GENERAL POINTS 641 5.13.1.4 OTHER POINTS 644
5.14 SUMMARY $44 REFERENCES &45 XVIII CONTENTS 6. SURFACE METROLOGY IN
MANUFACTWE 647 6.1 INTRODUCTION 647 6.2 MANUFACTURING PROCESSES 648
6.2.1 GENERAL 648 6.3 CUTTING 649 6.3.1 TURNING 649 6.3.1.1 GENERAL 649
6.3.1.2 FINISH MACHINING 650 6.3.1.3 EFFECT OF IOOL GEOMETRY *
THEORETICAL SURFACE FINISH * SECONDARY CUTTING EDGE 650 6.3.1.4 PRIMARY
CUTTING EDGE FINISH 654 6.3.1.5 FRACTURE ROUGHNESS 655 6.3.1.6 BUILT-UP
EDGE 655 6.3.1.7 OTHER SURFACE ROUGHNESS EFFECTS IN FINISH MACHINING 657
6.3.1.8 TOOL WEAR 659 6.3.2 DIAMOND TUMING 660 6.3.3 MILLING AND
BROACHING 661 6.3.3.1 GENERAL 661 6.3.3.2 ROUGHNESS ON THE SURFACE 664
6.3.3.3 THEORETICAL MILLING FINISH 665 6.4 ABRASIVE PROCESSES 666 6.4.1
GENERAL 666 6.4.2 TYPES OF GRINDING 671 6.4.3 COMMENTS ON GRINDING 671
6.4.4 NATURE OF THE GUIDING PROCESS 672 6.4.4.1 GENERAL 672 6.4.4.2
FACTORIAL EXPERIMENT 613 6.4.5 CENTRELESS GRINDING 674 6.4.5.1 GENERAL
674 6.4.5.2 IMPORTANI PARAMETERS FOR ROUGHNESS AND ROUNDNESS 675 6.4.5.3
ROUNDNESS CONSIDERATIONS 677 6.4.6 CYLINDRICAL GRINDING 678 6.4.6.1
SPARK-OUT 678 6.4.6.2 ELASTIC EFFECTS 679 6.4.6.3 TEXTURE GENERATED IN
GRINDING 681 6.4.6.4 CHATTER 682 6.4.6.5 OTHER TYPES OF GRINDING 683
6.4.7 GENERAL COMMENTS ON GRINDING 684 6.4.8 NANOGRINDING 686 6.4.9
GENERAL COMMENTS ON ROUGHNESS 690 6.4.10 HONING 694 6.4.11 POLISHING
(LAPPING) 696 6.5 UNCONVENTIONAL MACHINING 699 6.5.1 ULTRASONIC
MACHINING 699 6.5.2 MAGNELIC FLOAT POLISHING 699 6.5.3 PHYSICAL AND
CHEMICAL MACHINING 700 6.5.3.1 ELECTROCHEMICAL MACHINING (ECM) 700
6.5.3.2 ELECTROLYTIC GRINDING 701 6.5.3.3 ELECTRODISCHARGE MACHINING
(EDM) 702 CONTENTS 6.5.4 FORMING PROCESSES 703 6.5.4.1 GENERAL 703
6.5.4.2 BALLIZING 703 6.5.5 MICRO- AND NANOMACHINING 703 6.5.5.1 GENERAL
703 6.5.5.2 MICROPOLISHING 704 6.5.6 ATOMIC-SCALE MACHINING 708 6.5.6.1
GENERAL 708 6.5.6.2 ELECTRON BEAM MACHINING 708 6.5.6.3 ION BEAM
MACHINING 711 6.5.6.4 GENERAL COMMENT ON ATOMIC-TYPE PROCESSES 714 6.6
SURFACE ROUGHNESS PRODUCED BY MACHINING DIFSSCULT MATERIALS 716 6.7
SURFACE EFFECTS OTHER THAN GEOMETRY 716 6.7.1 SURFACE EFFECTS RESULTING
FROM THE MACHINING PROCESS 716 6.7.2 SURFACE ALTERATIONS 717 6.7.3
RESIDUAL STRESS 717 6.7.3.1 GENERAL 717 6.7.3.2 GRINDING 723 6.7.3.3
TURNING 725 6.7.3.4 MILLING 725 6.7.3.5 SHAPING 725 I 6.7.3.6 GENERAL
COMMENT 725 6.7.4 MEASUREMENT OF STRESSES 726 6.7.4.1 GENERAL 726
6.7.4.2 INDIRECT METHODS 726 6.7.4.3 DIRECT METHODS 727 6.7.5 SUBSURFACE
PROPERIIES INFLUENCING FUNCTION 729 6.7.5.1 GENERAL 729 6.7.5.2
INFLUENCES OF RESIDUAL STRESS 729 6.8 SURFACE GEOMETRY * A SSNGERPRINT OF
MANUFACTURE 732 6.8.1 GENERAL 732 6.8.2 USE OF RANDOM PROCESS ANALYSIS
733 6.8.2.1 ON TURNED PARTS * SINGLE-POINT MACHINING 733 6.8.2.2
ABRASIVE MACHINING 735 6.8.3 SPACE-FREAUENCY FUNCTIONS (THE WIGNER
FUNCTION) 737 6.8.4 NON-LINEAR DYNAMICS 738 6.9 SUMMARY 742 REFERENCES
743 7. SURFACE GEOMETRY AND ITS IMPORTANCE IN FUNCTION 749 7.1
INTRODUCTION 749 7.2 TWO-BODY INTERACTION * THE STATIC SITUATION 751
7.2.1 CONTACT 751 7.2.1.1 POINT CONTACT 753 7.2.2 MACROSCOPIC BEHAVIOUR
754 7.2.2.1 TWO SPHERES IN CONTACT 756 7.2.2.2 TWO CYLINDERS IN CONTACT
757 7.2.2.3 CROSSED CYLINDERS AT ANY ANGLE 758 CONTENTS 7.2.2.4 SPHERE
ON A CYLINDER 758 7.2.2.4 SPHERE INSIDE A CYLINDER 759 7.2.3 MICROSCOPIC
BEHAVIOUR * NUMBER OF ASPERITY CONTADS AND BEHAVIOUR UNDER LOAD 759
7.2.3.1 GENERAL 759 7.2.3.2 MICROCONTAD UNDER LOAD 760 7.2.3.3
ELASTIC/PLASTK BALANCE * PLASTICUEY INDEX 762 7.2.3.4 CONTADS AND AREAS,
PROFILES AND MAPS 775 7.2.4 EFFECT OF WAVINESS ON CONTACT 778 7.3
FUNCTIONAL PROPERTIES OF CONTACT 77S 7.3.1 GENERAL 779 7.3.2 SLIFFNESS
781 7.3.3 MECHANICAL SEALS 787 7.3.4 ADHESION 787 7.3.5 THERMAL
CONDUDIVITY 792 7.3.6 RELATIONSHIP BETWEEN ELEDRICAL AND THERMAL
CONDUDIVITY 796 7.3.7 SUMMARY 800 7.4 TWO-BODY INTERACTIONS * DYNAMIC
EFFECT 800 7.4.1 GENERAL 800 7.4.2 FRIDION 800 7.4.2.1 MECHANISMS *
GENERAL 800 7.4.2.2 FRIDION * WEAR, DRY CONDITIONS * 805 7.4.3 WEAR
CLASSIFICATION 805 7.4.4 LUBRICATION 809 7.4.4.1 GENERAL 809 7.4.4.2
HYDRODYNAMIC LUBRICATION AND SURFACE GEOMEIRY 811 7.4.5 CONTACT BETWEEN
TWO SURFACES VIA A THIRD BODY 824 7.4.5.1 GENERAL 824 7.4.5.2 EHD
LUBRICATION AND THE INFLUENCE OF ROUGHNESS 824 7.4.6 BOUNDARY
LUBRICATION 831 7.4.6.1 GENERAL 831 7.4.6.2 MECHANICAL PROPERTIES OF
THIN BOUNDARY LAYER FILMS 834 7.6.4.3 BREAKDOION OF BOUNDARY LUBRICATION
834 7.5 SURFACE ROUGHNESS AND MECHANICAL SYSTEM LIFE 835 7.5.1 WEIBULL
AND DUAL-FREQUENCY * SPACE FUNCTIONS 835 7.5.2 RUNNING-IN PROCESS 836
7.5.3 SURFACE ROUGHNESS ONE-NUMBER SPEDFICATION AND RUNNING-IN 837
7.5.4 INFLUENCE OF ROUGHNESS ON SCUFFING FAILURE 838 7.5.5 ROLLING
FATIGUE FAILURE (PITTING, SPALLING) 844 7.5.5.1 ROLLING FAILURE 845
7.5.5.2 ROUGHNESS EFFECTS ON 3D BODY MOTION 847 7.5.5.3 ROUGH SURFACES
AND ROLLING 853 7.5.5.4 PITTING DUE TO DEBRIS AND SUBSEQUENT SURFACE
EFFECTS 856 7.5.6 VIBRATING EFFECTS 856 7.5.6.1 DYNAMIC EFFECTS 856
7.5.6.2 SQUEEZE FILMS AND ROUGHNESS 857 7.5.6.3 FRETTING AND FRETTING
FATIGUE 859 7.6 ONE-BODY INTERACTIONS 861 7.6.1 GENERAL 861 7.6.2
FATIGUE 861 * CONTENTS 7.6.3 CORROSION AND CORROSION FATIGUE ON THE
EFFECT OF ROUGHNESS 867 7.6.3.1 CORROSION FATIGUE * GENERAL 86S 7.6.4
CORROSION 810 7.6.4.1 GENERAL 870 7.6.4.2 LOCALIZED ATTACK *
ELECTROMECHANICAL 871 7.6.4.3 HETEROGENEITIES 87 * 7.6.4.4 LOCALIZED
ATTACK * ELECTROCHEMICAL 872 7.7 ONE BODY WITH RADIATION (OPTICAL). THE
EFFECT OF ROUGHNESS ON THE SCATTERING OF ELECTROMAGNETIC AND OTHER
RADIATION S73 7.7.1 OPTICAL SCATIER * GENERAL 873 7.7.1.1 MODELS 873
7.7.2 GENERAL OPTICAL 874 7.7.3 SMOOTH RANDOM SURFACE 879 7.7.4
GEOMETRIE RAY-TRACING CRITERION * ROUGH RANDOM SURFACES 879 7.7.4.1
EFFECT OF SURFACE CURVATURE 881 7.7.4.2 ESTIMATION OF L, THE FACET
LENGTH 882 7.7.5 SCATTER FROM DETERMINISTIC SURF ACES 883 7.7.6 SMOOTH
DETERMINISTIC SIGNAL 883 7.7.7 GEOMETRIE RAY CONDITION, ROUGH
DETERMINISTIC SURF ACES 884 7.7.8 SUMMARY OF RESULTS, SCALAR AND
GEOMETRICAL 884 7.7.9 MIXTURE OF TWO RANDOM COMPONENTS 885 7.7.10 OTHER
CONSIDERATIONS ON LIGHT SCATTER 886 7.7.10.1 ANGLE EFFECTS 887 7.7.10.2
MULTIPLE REFLECTIONS 888 7.7.10.3 SHADOWING 89Z 7.7.11 SCATTERING FROM
NON-GAUSSIAN SURF ACES 897 7.7.11.1 FRESNEL SCATTERING 898 7.7.11.2
CAUSTICS 898 7.7.11.3 FRACTAL SURF ACES 8 7.7.11.4 FRACTAL SLOPES:
SUBFRACTAL MODEL 902 7.8 SCATTERING BY DIFFERENT WORTS OF WAVES 904
7.8.1 GENERAL 904 7.8.1.1 EM WAVES 904 7.8.1.2 ELASTIC, ULTRASONIC AND
ACOUSTIC SCATTERING 905 7.8.2 SCATTERING FROM PARTICKS AND INFLUENCE OF
SURFACE ROUGHNESS 905 7.8.2.1 RAYLEIGH SCATTERING 905 7.8.3 BRAGG
SCATTERING 905 7.8.3.1 NON-ELASTIC SCATTERING 906 . 7.8.3.2 INFLUENCE OF
ROUGHNESS * THIN-FILM MEASUREMENT 907 7.9 SYSTEM FUNETION 910 7.9.1
SURFACE GEOMETRY AND TOLERANCES AND FITS 91 7.9.2 TOLERANCES 91 7.10
SUMMARY AND CONCLUSIONS 914 917 REFERENCES 8. SUMMARY AND CONCLUSIONS
929 8.1 GENERAL 929 8.2 CHARACTERIZATION AND NATURE OF SIGNALS 930 8.3
DATA PROCESSMG XXII PREFACE 8.4 MEASUREMENT TRENDS 937 8.5 CALIBRATION
940 8.6 MANUFACTWE 941 8.7 FUNCTION 942 8.8 OVERVIEW 944 INDEX
|
| any_adam_object | 1 |
| author | Whitehouse, David J. |
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| dewey-sort | 3620.0044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Fertigungstechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik |
| format | Book |
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| id | DE-604.BV009746199 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:40:10Z |
| institution | BVB |
| isbn | 0750300396 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006446254 |
| oclc_num | 29876928 |
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| owner_facet | DE-384 DE-91 DE-BY-TUM DE-29T DE-703 DE-634 DE-83 |
| physical | XXVI, 988 S. Ill., graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
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| publisher | Inst. of Physics Publ. |
| record_format | marc |
| spelling | Whitehouse, David J. Verfasser aut Handbook of surface metrology David J. Whitehouse Bristol u.a. Inst. of Physics Publ. 1994 XXVI, 988 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Surfaces (Technology) Measurement Oberflächenmessung (DE-588)4172249-8 gnd rswk-swf Oberflächenmessung (DE-588)4172249-8 s DE-604 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006446254&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Whitehouse, David J. Handbook of surface metrology Surfaces (Technology) Measurement Oberflächenmessung (DE-588)4172249-8 gnd |
| subject_GND | (DE-588)4172249-8 |
| title | Handbook of surface metrology |
| title_auth | Handbook of surface metrology |
| title_exact_search | Handbook of surface metrology |
| title_full | Handbook of surface metrology David J. Whitehouse |
| title_fullStr | Handbook of surface metrology David J. Whitehouse |
| title_full_unstemmed | Handbook of surface metrology David J. Whitehouse |
| title_short | Handbook of surface metrology |
| title_sort | handbook of surface metrology |
| topic | Surfaces (Technology) Measurement Oberflächenmessung (DE-588)4172249-8 gnd |
| topic_facet | Surfaces (Technology) Measurement Oberflächenmessung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006446254&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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