Excimer lasers and new trends in laser microtechnology:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bamberg
Meisenbach
1993
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | 192 S. zahlr. Ill. und graph. Darst. |
| ISBN: | 3875250605 |
Staff View
MARC
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| 245 | 1 | 0 | |a Excimer lasers and new trends in laser microtechnology |c ed. by S. Metev ... |
| 264 | 1 | |a Bamberg |b Meisenbach |c 1993 | |
| 300 | |a 192 S. |b zahlr. Ill. und graph. Darst. | ||
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Record in the Search Index
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| adam_text |
PARTI
Contents
Excimer
Lasers and Industrial Applications
State-of-the-Art of Excimer Laser Development
H. M.
von Bergmann
3
Laser Gases and Gas Supply Systems for Excimer Lasers
G.
Broden, W.
Schmidt
31
Optics for Excimer Laser Application
F. Goodal
43
Some Industrial Applications of Excimer Lasers
W. Zapka
51
Excimer Laser Ablation of Polymer in Manufacturing
G. Wolbold, Ch. Tessler, D. Tudryn
53
PART II
Laser Microtechnology
New Trends in Laser Microtechnology
S.Metev
73
New Trends in Laser Application to Microelectronics
M.Takai
95
Laser Selective Deposition and Ablation
M. Stake,
F. Foulon,
О.
Lehmann 107
Mechanism of Laser Ablation in Molecular Systems
R.
Braun,
L. Kukreja, P
Hess 119
Ar-Laser-
Assisted Wet
Chemical
Etching of
Metals
R.
Nowak,
S.Metev,
G.
Sepold
129
Excimer-Laser-Induced Synthesis and Surface Modifications of Materials
D.
Bäuerle,
E.
Arenholz,
E
FölserJ. Heitz,
A. Kochemasov,
P. Schwab
139
Laser Synthesis and Processing of Diamond and Diamond-Like Finns
V. S
Ageev, A. A. Gorbunov, V. I, Konov, T. V. Kononenko, A. V. Kusmichev,
S. M.
Pimenov,
V.G.Ralchenko.A.A.
Smolin
147
Irradiation of Polypropylene with Excimer Laser Light to Enhance Surface Activity
J.
Breuer,
S.Metev,
S. Sepold
169
Pulsed Laser Deposition
LW.Boyd
179
Laser Processing: For a better Transfer of Technology
L D.
Laude
189
PART III
Participants |
| any_adam_object | 1 |
| author_GND | (DE-588)120188252 |
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| discipline | Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik Maschinenbau |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1992 Bremen gnd-content |
| genre_facet | Konferenzschrift 1992 Bremen |
| id | DE-604.BV009663692 |
| illustrated | Illustrated |
| indexdate | 2024-08-21T00:10:58Z |
| institution | BVB |
| isbn | 3875250605 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006390106 |
| oclc_num | 645280230 |
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| owner_facet | DE-12 DE-22 DE-BY-UBG DE-29 DE-20 DE-91G DE-BY-TUM DE-210 DE-634 |
| physical | 192 S. zahlr. Ill. und graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Meisenbach |
| record_format | marc |
| spelling | Excimer lasers and new trends in laser microtechnology ed. by S. Metev ... Bamberg Meisenbach 1993 192 S. zahlr. Ill. und graph. Darst. txt rdacontent n rdamedia nc rdacarrier Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Excimerlaser (DE-588)4153300-8 gnd rswk-swf Laser (DE-588)4034610-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1992 Bremen gnd-content Excimerlaser (DE-588)4153300-8 s DE-604 Laser (DE-588)4034610-9 s Mikrosystemtechnik (DE-588)4221617-5 s Metev, Simeon M. 1947- Sonstige (DE-588)120188252 oth Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006390106&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Excimer lasers and new trends in laser microtechnology Mikrosystemtechnik (DE-588)4221617-5 gnd Excimerlaser (DE-588)4153300-8 gnd Laser (DE-588)4034610-9 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4153300-8 (DE-588)4034610-9 (DE-588)1071861417 |
| title | Excimer lasers and new trends in laser microtechnology |
| title_auth | Excimer lasers and new trends in laser microtechnology |
| title_exact_search | Excimer lasers and new trends in laser microtechnology |
| title_full | Excimer lasers and new trends in laser microtechnology ed. by S. Metev ... |
| title_fullStr | Excimer lasers and new trends in laser microtechnology ed. by S. Metev ... |
| title_full_unstemmed | Excimer lasers and new trends in laser microtechnology ed. by S. Metev ... |
| title_short | Excimer lasers and new trends in laser microtechnology |
| title_sort | excimer lasers and new trends in laser microtechnology |
| topic | Mikrosystemtechnik (DE-588)4221617-5 gnd Excimerlaser (DE-588)4153300-8 gnd Laser (DE-588)4034610-9 gnd |
| topic_facet | Mikrosystemtechnik Excimerlaser Laser Konferenzschrift 1992 Bremen |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006390106&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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