Surface chemical cleaning and passivation for semiconductor processing: symposium held April 13-15, 1993, San Francisco, California, USA
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Pittsburgh
Materials Research Society
1993
|
| Series: | Materials Research Society: Materials Research Society symposia proceedings
315 |
| Subjects: | |
| Physical Description: | XI, 518 S. graph. Darst. |
| ISBN: | 1558992138 |
Staff View
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| genre | (DE-588)1071861417 Konferenzschrift 1993 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1993 San Francisco Calif. |
| id | DE-604.BV009660629 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:38:46Z |
| institution | BVB |
| isbn | 1558992138 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006387761 |
| oclc_num | 28583418 |
| open_access_boolean | |
| owner | DE-29T DE-83 |
| owner_facet | DE-29T DE-83 |
| physical | XI, 518 S. graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Materials Research Society |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Surface chemical cleaning and passivation for semiconductor processing symposium held April 13-15, 1993, San Francisco, California, USA eds.: Gregg S. Higashi ... Pittsburgh Materials Research Society 1993 XI, 518 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 315 Semiconductors Cleaning Congresses Semiconductors Design and construction Congresses Surface chemistry Congresses Surface preparation Congresses Chemische Reinigung (DE-588)4009855-2 gnd rswk-swf Halbleiteroberfläche (DE-588)4137418-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 San Francisco Calif. gnd-content Halbleiteroberfläche (DE-588)4137418-6 s Chemische Reinigung (DE-588)4009855-2 s DE-604 Higashi, Gregg S. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 315 (DE-604)BV001899105 315 |
| spellingShingle | Surface chemical cleaning and passivation for semiconductor processing symposium held April 13-15, 1993, San Francisco, California, USA Materials Research Society: Materials Research Society symposia proceedings Semiconductors Cleaning Congresses Semiconductors Design and construction Congresses Surface chemistry Congresses Surface preparation Congresses Chemische Reinigung (DE-588)4009855-2 gnd Halbleiteroberfläche (DE-588)4137418-6 gnd |
| subject_GND | (DE-588)4009855-2 (DE-588)4137418-6 (DE-588)1071861417 |
| title | Surface chemical cleaning and passivation for semiconductor processing symposium held April 13-15, 1993, San Francisco, California, USA |
| title_auth | Surface chemical cleaning and passivation for semiconductor processing symposium held April 13-15, 1993, San Francisco, California, USA |
| title_exact_search | Surface chemical cleaning and passivation for semiconductor processing symposium held April 13-15, 1993, San Francisco, California, USA |
| title_full | Surface chemical cleaning and passivation for semiconductor processing symposium held April 13-15, 1993, San Francisco, California, USA eds.: Gregg S. Higashi ... |
| title_fullStr | Surface chemical cleaning and passivation for semiconductor processing symposium held April 13-15, 1993, San Francisco, California, USA eds.: Gregg S. Higashi ... |
| title_full_unstemmed | Surface chemical cleaning and passivation for semiconductor processing symposium held April 13-15, 1993, San Francisco, California, USA eds.: Gregg S. Higashi ... |
| title_short | Surface chemical cleaning and passivation for semiconductor processing |
| title_sort | surface chemical cleaning and passivation for semiconductor processing symposium held april 13 15 1993 san francisco california usa |
| title_sub | symposium held April 13-15, 1993, San Francisco, California, USA |
| topic | Semiconductors Cleaning Congresses Semiconductors Design and construction Congresses Surface chemistry Congresses Surface preparation Congresses Chemische Reinigung (DE-588)4009855-2 gnd Halbleiteroberfläche (DE-588)4137418-6 gnd |
| topic_facet | Semiconductors Cleaning Congresses Semiconductors Design and construction Congresses Surface chemistry Congresses Surface preparation Congresses Chemische Reinigung Halbleiteroberfläche Konferenzschrift 1993 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT higashigreggs surfacechemicalcleaningandpassivationforsemiconductorprocessingsymposiumheldapril13151993sanfranciscocaliforniausa |