APA (7th ed.) Citation

(1993). Surface chemical cleaning and passivation for semiconductor processing: Symposium held April 13-15, 1993, San Francisco, California, USA. Materials Research Society.

Chicago Style (17th ed.) Citation

Surface Chemical Cleaning and Passivation for Semiconductor Processing: Symposium Held April 13-15, 1993, San Francisco, California, USA. Pittsburgh: Materials Research Society, 1993.

MLA (9th ed.) Citation

Surface Chemical Cleaning and Passivation for Semiconductor Processing: Symposium Held April 13-15, 1993, San Francisco, California, USA. Materials Research Society, 1993.