Particle formation in a laser-heated aerosol reactor: application to silicon and silicon nitride synthesis
Gespeichert in:
1. Verfasser: | |
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Format: | Buch |
Sprache: | Dutch English |
Veröffentlicht: |
1993
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Schlagworte: | |
Beschreibung: | Delft, Technische Univ., Diss., 1993 |
Beschreibung: | 124 S. Ill., graph. Darst. |
ISBN: | 9090061150 |
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Datensatz im Suchindex
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any_adam_object | |
author | Kruis, Frank Einar |
author_facet | Kruis, Frank Einar |
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discipline | Werkstoffwissenschaften Fertigungstechnik |
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genre_facet | Hochschulschrift |
id | DE-604.BV009532445 |
illustrated | Illustrated |
indexdate | 2024-07-09T17:36:38Z |
institution | BVB |
isbn | 9090061150 |
language | Dutch English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006294491 |
oclc_num | 66259757 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM |
owner_facet | DE-91 DE-BY-TUM |
physical | 124 S. Ill., graph. Darst. |
publishDate | 1993 |
publishDateSearch | 1993 |
publishDateSort | 1993 |
record_format | marc |
spelling | Kruis, Frank Einar Verfasser aut Particle formation in a laser-heated aerosol reactor application to silicon and silicon nitride synthesis door Frank Einar Kruis 1993 124 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Delft, Technische Univ., Diss., 1993 Silicone (DE-588)4127342-4 gnd rswk-swf Laser-CVD-Verfahren (DE-588)4276920-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Laser-CVD-Verfahren (DE-588)4276920-6 s Silicone (DE-588)4127342-4 s DE-604 |
spellingShingle | Kruis, Frank Einar Particle formation in a laser-heated aerosol reactor application to silicon and silicon nitride synthesis Silicone (DE-588)4127342-4 gnd Laser-CVD-Verfahren (DE-588)4276920-6 gnd |
subject_GND | (DE-588)4127342-4 (DE-588)4276920-6 (DE-588)4113937-9 |
title | Particle formation in a laser-heated aerosol reactor application to silicon and silicon nitride synthesis |
title_auth | Particle formation in a laser-heated aerosol reactor application to silicon and silicon nitride synthesis |
title_exact_search | Particle formation in a laser-heated aerosol reactor application to silicon and silicon nitride synthesis |
title_full | Particle formation in a laser-heated aerosol reactor application to silicon and silicon nitride synthesis door Frank Einar Kruis |
title_fullStr | Particle formation in a laser-heated aerosol reactor application to silicon and silicon nitride synthesis door Frank Einar Kruis |
title_full_unstemmed | Particle formation in a laser-heated aerosol reactor application to silicon and silicon nitride synthesis door Frank Einar Kruis |
title_short | Particle formation in a laser-heated aerosol reactor |
title_sort | particle formation in a laser heated aerosol reactor application to silicon and silicon nitride synthesis |
title_sub | application to silicon and silicon nitride synthesis |
topic | Silicone (DE-588)4127342-4 gnd Laser-CVD-Verfahren (DE-588)4276920-6 gnd |
topic_facet | Silicone Laser-CVD-Verfahren Hochschulschrift |
work_keys_str_mv | AT kruisfrankeinar particleformationinalaserheatedaerosolreactorapplicationtosiliconandsiliconnitridesynthesis |