Proceedings of the Symposium on Plasma Processing:
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Book |
| Language: | Undetermined |
| Published: |
Pennington, NJ
Electrochemical Soc.
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| Series: | Electrochemical Society: Proceedings
... |
| Subjects: |
Staff View
MARC
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Record in the Search Index
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| author_corporate_role | aut |
| author_facet | International Symposium on Plasma Processing |
| author_sort | International Symposium on Plasma Processing |
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| indexdate | 2024-07-09T19:52:24Z |
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| publisher | Electrochemical Soc. |
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| series2 | Electrochemical Society: Proceedings |
| spelling | International Symposium on Plasma Processing Verfasser (DE-588)16134890-7 aut Proceedings of the Symposium on Plasma Processing Plasma processing Pennington, NJ Electrochemical Soc. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings ... Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Plasmatechnik (DE-588)4140353-8 s DE-604 Plasmaätzen (DE-588)4174821-9 s |
| spellingShingle | Proceedings of the Symposium on Plasma Processing Plasmaätzen (DE-588)4174821-9 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| subject_GND | (DE-588)4174821-9 (DE-588)4140353-8 (DE-588)1071861417 |
| title | Proceedings of the Symposium on Plasma Processing |
| title_alt | Plasma processing |
| title_auth | Proceedings of the Symposium on Plasma Processing |
| title_exact_search | Proceedings of the Symposium on Plasma Processing |
| title_full | Proceedings of the Symposium on Plasma Processing |
| title_fullStr | Proceedings of the Symposium on Plasma Processing |
| title_full_unstemmed | Proceedings of the Symposium on Plasma Processing |
| title_short | Proceedings of the Symposium on Plasma Processing |
| title_sort | proceedings of the symposium on plasma processing |
| topic | Plasmaätzen (DE-588)4174821-9 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| topic_facet | Plasmaätzen Plasmatechnik Konferenzschrift |
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