Proceedings of the Symposium on Plasma Processing:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Pennington, NJ
Electrochemical Soc.
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| Schriftenreihe: | Electrochemical Society: Proceedings
... |
| Schlagworte: |
Internformat
MARC
| LEADER | 00000nam a2200000 ca4500 | ||
|---|---|---|---|
| 001 | BV009498102 | ||
| 003 | DE-604 | ||
| 005 | 19990816 | ||
| 007 | t | ||
| 008 | 940401nuuuuuuuu |||| 10||| und d | ||
| 035 | |a (DE-599)BVBBV009498102 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 110 | 2 | |a International Symposium on Plasma Processing |e Verfasser |0 (DE-588)16134890-7 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the Symposium on Plasma Processing |
| 246 | 1 | 3 | |a Plasma processing |
| 264 | 1 | |a Pennington, NJ |b Electrochemical Soc. | |
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Electrochemical Society: Proceedings |v ... | |
| 650 | 0 | 7 | |a Plasmaätzen |0 (DE-588)4174821-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasmatechnik |0 (DE-588)4140353-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Plasmatechnik |0 (DE-588)4140353-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Plasmaätzen |0 (DE-588)4174821-9 |D s |
| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-012520059 | ||
Datensatz im Suchindex
| _version_ | 1804132411903049728 |
|---|---|
| any_adam_object | |
| author_corporate | International Symposium on Plasma Processing |
| author_corporate_role | aut |
| author_facet | International Symposium on Plasma Processing |
| author_sort | International Symposium on Plasma Processing |
| building | Verbundindex |
| bvnumber | BV009498102 |
| ctrlnum | (DE-599)BVBBV009498102 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01054nam a2200313 ca4500</leader><controlfield tag="001">BV009498102</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19990816 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">940401nuuuuuuuu |||| 10||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV009498102</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="110" ind1="2" ind2=" "><subfield code="a">International Symposium on Plasma Processing</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)16134890-7</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Proceedings of the Symposium on Plasma Processing</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Plasma processing</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Pennington, NJ</subfield><subfield code="b">Electrochemical Soc.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Electrochemical Society: Proceedings</subfield><subfield code="v">...</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaätzen</subfield><subfield code="0">(DE-588)4174821-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Plasmaätzen</subfield><subfield code="0">(DE-588)4174821-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-012520059</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV009498102 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T19:52:24Z |
| institution | BVB |
| institution_GND | (DE-588)16134890-7 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012520059 |
| open_access_boolean | |
| publishDateSort | 0000 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series2 | Electrochemical Society: Proceedings |
| spelling | International Symposium on Plasma Processing Verfasser (DE-588)16134890-7 aut Proceedings of the Symposium on Plasma Processing Plasma processing Pennington, NJ Electrochemical Soc. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings ... Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Plasmatechnik (DE-588)4140353-8 s DE-604 Plasmaätzen (DE-588)4174821-9 s |
| spellingShingle | Proceedings of the Symposium on Plasma Processing Plasmaätzen (DE-588)4174821-9 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| subject_GND | (DE-588)4174821-9 (DE-588)4140353-8 (DE-588)1071861417 |
| title | Proceedings of the Symposium on Plasma Processing |
| title_alt | Plasma processing |
| title_auth | Proceedings of the Symposium on Plasma Processing |
| title_exact_search | Proceedings of the Symposium on Plasma Processing |
| title_full | Proceedings of the Symposium on Plasma Processing |
| title_fullStr | Proceedings of the Symposium on Plasma Processing |
| title_full_unstemmed | Proceedings of the Symposium on Plasma Processing |
| title_short | Proceedings of the Symposium on Plasma Processing |
| title_sort | proceedings of the symposium on plasma processing |
| topic | Plasmaätzen (DE-588)4174821-9 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| topic_facet | Plasmaätzen Plasmatechnik Konferenzschrift |
| work_keys_str_mv | AT internationalsymposiumonplasmaprocessing proceedingsofthesymposiumonplasmaprocessing AT internationalsymposiumonplasmaprocessing plasmaprocessing |