Process engineering analysis in semiconductor device fabrication:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York, NY u.a.
McGraw-Hill
1993
|
| Series: | McGraw-Hill chemical engineering series
|
| Subjects: | |
| Physical Description: | XVII, 774 S. graph. Darst. |
| ISBN: | 0070418535 |
Staff View
MARC
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV009469359 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:36:00Z |
| institution | BVB |
| isbn | 0070418535 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006263476 |
| oclc_num | 25964090 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-634 DE-20 |
| owner_facet | DE-91 DE-BY-TUM DE-634 DE-20 |
| physical | XVII, 774 S. graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | McGraw-Hill |
| record_format | marc |
| series2 | McGraw-Hill chemical engineering series |
| spelling | Middleman, Stanley Verfasser aut Process engineering analysis in semiconductor device fabrication Stanley Middleman ; Arthur K. Hochberg New York, NY u.a. McGraw-Hill 1993 XVII, 774 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier McGraw-Hill chemical engineering series Semiconductors Design and construction Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 s Fertigung (DE-588)4016899-2 s DE-604 Hochberg, Arthur K. Verfasser aut |
| spellingShingle | Middleman, Stanley Hochberg, Arthur K. Process engineering analysis in semiconductor device fabrication Semiconductors Design and construction Halbleiterbauelement (DE-588)4113826-0 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4113826-0 (DE-588)4016899-2 |
| title | Process engineering analysis in semiconductor device fabrication |
| title_auth | Process engineering analysis in semiconductor device fabrication |
| title_exact_search | Process engineering analysis in semiconductor device fabrication |
| title_full | Process engineering analysis in semiconductor device fabrication Stanley Middleman ; Arthur K. Hochberg |
| title_fullStr | Process engineering analysis in semiconductor device fabrication Stanley Middleman ; Arthur K. Hochberg |
| title_full_unstemmed | Process engineering analysis in semiconductor device fabrication Stanley Middleman ; Arthur K. Hochberg |
| title_short | Process engineering analysis in semiconductor device fabrication |
| title_sort | process engineering analysis in semiconductor device fabrication |
| topic | Semiconductors Design and construction Halbleiterbauelement (DE-588)4113826-0 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Semiconductors Design and construction Halbleiterbauelement Fertigung |
| work_keys_str_mv | AT middlemanstanley processengineeringanalysisinsemiconductordevicefabrication AT hochbergarthurk processengineeringanalysisinsemiconductordevicefabrication |