Gettering and defect engineering in the semiconductor technology: proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989
Gespeichert in:
Format: | Tagungsbericht Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Vaduz
Sci-Tech Publ.
1989
|
Schriftenreihe: | Diffusion and defect data / B
6/7 (1989) |
Schlagworte: | |
Beschreibung: | Einzelaufnahme eines Zeitschriftenh. |
Beschreibung: | XI, 607 S. Ill., graph. Darst. |
ISBN: | 3908044049 |
Internformat
MARC
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245 | 1 | 0 | |a Gettering and defect engineering in the semiconductor technology |b proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |c ed. by M. Kittler |
264 | 1 | |a Vaduz |b Sci-Tech Publ. |c 1989 | |
300 | |a XI, 607 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 0 | |a Diffusion and defect data / B |v 6/7 (1989) | |
500 | |a Einzelaufnahme eines Zeitschriftenh. | ||
650 | 4 | |a Electrical engineering |x Materials |v Congresses | |
650 | 4 | |a Getters |v Congresses | |
650 | 4 | |a Semiconductors |v Congresses | |
650 | 4 | |a Silicon crystals |x Defects |v Congresses | |
650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1989 |z Garzau |2 gnd-content | |
689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
689 | 0 | 1 | |a Gitterbaufehler |0 (DE-588)4125030-8 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Kittler, Martin |e Sonstige |4 oth | |
711 | 2 | |a GADEST |n 3 |d 1989 |c Garzau |j Sonstige |0 (DE-588)5043024-5 |4 oth | |
999 | |a oai:aleph.bib-bvb.de:BVB01-006159962 |
Datensatz im Suchindex
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dewey-tens | 540 - Chemistry and allied sciences |
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format | Conference Proceeding Book |
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genre_facet | Konferenzschrift 1989 Garzau |
id | DE-604.BV009257840 |
illustrated | Illustrated |
indexdate | 2024-07-09T17:34:00Z |
institution | BVB |
institution_GND | (DE-588)5043024-5 |
isbn | 3908044049 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006159962 |
oclc_num | 21002992 |
open_access_boolean | |
owner | DE-29T |
owner_facet | DE-29T |
physical | XI, 607 S. Ill., graph. Darst. |
publishDate | 1989 |
publishDateSearch | 1989 |
publishDateSort | 1989 |
publisher | Sci-Tech Publ. |
record_format | marc |
series2 | Diffusion and defect data / B |
spelling | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 ed. by M. Kittler Vaduz Sci-Tech Publ. 1989 XI, 607 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data / B 6/7 (1989) Einzelaufnahme eines Zeitschriftenh. Electrical engineering Materials Congresses Getters Congresses Semiconductors Congresses Silicon crystals Defects Congresses Halbleiter (DE-588)4022993-2 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Garzau gnd-content Halbleiter (DE-588)4022993-2 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Kittler, Martin Sonstige oth GADEST 3 1989 Garzau Sonstige (DE-588)5043024-5 oth |
spellingShingle | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 Electrical engineering Materials Congresses Getters Congresses Semiconductors Congresses Silicon crystals Defects Congresses Halbleiter (DE-588)4022993-2 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
subject_GND | (DE-588)4022993-2 (DE-588)4125030-8 (DE-588)1071861417 |
title | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |
title_auth | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |
title_exact_search | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |
title_full | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 ed. by M. Kittler |
title_fullStr | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 ed. by M. Kittler |
title_full_unstemmed | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 ed. by M. Kittler |
title_short | Gettering and defect engineering in the semiconductor technology |
title_sort | gettering and defect engineering in the semiconductor technology proceedings of the 3rd international autumn meeting gadest 89 garzau german democratic republic october 8 13 1989 |
title_sub | proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |
topic | Electrical engineering Materials Congresses Getters Congresses Semiconductors Congresses Silicon crystals Defects Congresses Halbleiter (DE-588)4022993-2 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
topic_facet | Electrical engineering Materials Congresses Getters Congresses Semiconductors Congresses Silicon crystals Defects Congresses Halbleiter Gitterbaufehler Konferenzschrift 1989 Garzau |
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