Gettering and defect engineering in the semiconductor technology: proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Vaduz
Sci-Tech Publ.
1989
|
| Series: | Diffusion and defect data / B
6/7 (1989) |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschriftenh. |
| Physical Description: | XI, 607 S. Ill., graph. Darst. |
| ISBN: | 3908044049 |
Staff View
MARC
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| 245 | 1 | 0 | |a Gettering and defect engineering in the semiconductor technology |b proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |c ed. by M. Kittler |
| 264 | 1 | |a Vaduz |b Sci-Tech Publ. |c 1989 | |
| 300 | |a XI, 607 S. |b Ill., graph. Darst. | ||
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| 490 | 0 | |a Diffusion and defect data / B |v 6/7 (1989) | |
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| 700 | 1 | |a Kittler, Martin |e Sonstige |4 oth | |
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| genre | (DE-588)1071861417 Konferenzschrift 1989 Garzau gnd-content |
| genre_facet | Konferenzschrift 1989 Garzau |
| id | DE-604.BV009257840 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:34:00Z |
| institution | BVB |
| institution_GND | (DE-588)5043024-5 |
| isbn | 3908044049 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006159962 |
| oclc_num | 21002992 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XI, 607 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Sci-Tech Publ. |
| record_format | marc |
| series2 | Diffusion and defect data / B |
| spelling | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 ed. by M. Kittler Vaduz Sci-Tech Publ. 1989 XI, 607 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data / B 6/7 (1989) Einzelaufnahme eines Zeitschriftenh. Electrical engineering Materials Congresses Getters Congresses Semiconductors Congresses Silicon crystals Defects Congresses Halbleiter (DE-588)4022993-2 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Garzau gnd-content Halbleiter (DE-588)4022993-2 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Kittler, Martin Sonstige oth GADEST 3 1989 Garzau Sonstige (DE-588)5043024-5 oth |
| spellingShingle | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 Electrical engineering Materials Congresses Getters Congresses Semiconductors Congresses Silicon crystals Defects Congresses Halbleiter (DE-588)4022993-2 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4125030-8 (DE-588)1071861417 |
| title | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_auth | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_exact_search | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_full | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 ed. by M. Kittler |
| title_fullStr | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 ed. by M. Kittler |
| title_full_unstemmed | Gettering and defect engineering in the semiconductor technology proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 ed. by M. Kittler |
| title_short | Gettering and defect engineering in the semiconductor technology |
| title_sort | gettering and defect engineering in the semiconductor technology proceedings of the 3rd international autumn meeting gadest 89 garzau german democratic republic october 8 13 1989 |
| title_sub | proceedings of the 3rd International Autumn Meeting ... GADEST '89 ; Garzau, German Democratic Republic, October 8 - 13, 1989 |
| topic | Electrical engineering Materials Congresses Getters Congresses Semiconductors Congresses Silicon crystals Defects Congresses Halbleiter (DE-588)4022993-2 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| topic_facet | Electrical engineering Materials Congresses Getters Congresses Semiconductors Congresses Silicon crystals Defects Congresses Halbleiter Gitterbaufehler Konferenzschrift 1989 Garzau |
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