Aggregation phenomena of point defects in silicon: proceedings of the Satellite Symposium to ESSDERC '82 Munich
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Pennington, NJ
1983
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| Series: | Electrochemical Society: Proceedings
83,4 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | VI, 216 S. zahlr. graph. Darst. |
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| adam_text | IMAGE 1
PROCEEDINGS OF THE SATELLITE SYMPOSIUM TO ESSDERC 82, MUNICH
AGGREGATION PHENOMENA OF POINT DEFECTS IN SILICON
EDITED BY
ERHARD SIRTL
HELIOTRONIC GMBH
BURGHAUSEN, W. GERMANY
JAN GOORISSEN
PHILIPS RESEARCH CENTER
EINDHOVEN, NETHERLANDS
ASSISTANT EDITOR
P, WAGNER
UB/TIB HANNOVER 89 103 005 080
RN 6950(83-4)
ELECTRONICS DIVISION
PROCEEDINGS VOLUME 83-4
THE ELECTROCHEMICAL SOCIETY, INC., 10 SOUTH MAIN ST., PENNINGTON, NJ
08534-2896
IMAGE 2
IW 6TLO FJ? CONTENTS
PREFACE III
MODELLING OF IMPURITY DIFFUSION IN SILICON DURING OXYDATION BASED ON
POINT DEFECT KINETICS D. A. ANTONIADIS, I. MOSKOWITZ 1
T
THE ROLE OF VACANCIES AND SELF-INTERSTITIALS IN DIFFUSION AND
AGGLOMERATION PHENOMENA IN SILICON U. GOSELE, T. Y. TAN 17
DOUBLE DONORS AND COMPLEXES IN SILICON H. G. GRIMMEISS 37
OXYGEN-RELATED MICRODEFECT FORMATION IN CZ-SILICON DURING HEAT
TREATMENTS A. J. R. DE KOCK 58
KINETICS OF PROCESS-INDUCED DEFECT COMPLEXES IN SILICON C. CLAEYS, H.
BENDER, G. DECLERCK, J. VAN LANDUYT, R. VAN OVERSTRAETEN, S. AMELINCKX
74
OXYGEN IN SILICON AND ITS PREPARATIVE ASPECTS W. ZULEHNER 89
EARLY STAGES OF OXYGEN PRECIPITATION IN CZ-SILICON D. HUBER, J. REFFLE,
P. STALLHOFER, CH. WEIGEL 111
THE PRECIPITATION OF TRANSITION METALS IN SILICON CRYSTAL WAFERS K.
GRAFF 121
DEFECT REACTIONS OF TRANSITION METALS IN SILICON STUDIED BY EPR AND HALL
EFFECT H. FEICHTLNGER, R. CZAPUTA 134
SOURCE, TRANSPORT AND PRECIPITATION OF METALLIC IMPURITIES IN SI-EPITAXY
C.J. WERKHOVEN 144
Y CARBON IN SILICON B. 0. KOLBESEN 155
CONTROL OF FOREIGN POINT DEFECTS DURING CZOCHRALSKI SILICON CRYSTAL
GROWTH K. G. BARRACLOUGH 176
IMAGE 3
COHERENT PRECIPITATION AND SOLUBILITY OF PHOSPHOROUS AND ARSENIC IN
SILICON D. NOBLLI 189
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| physical | VI, 216 S. zahlr. graph. Darst. |
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| spelling | Aggregation phenomena of point defects in silicon proceedings of the Satellite Symposium to ESSDERC '82 Munich ed. by Erhard Sirtl ... Pennington, NJ 1983 VI, 216 S. zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 83,4 Roosterfouten gtt Silicium gtt Point defects Congresses Silicon crystals Congresses Silicium (DE-588)4077445-4 gnd rswk-swf Störstelle (DE-588)4193400-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 München gnd-content Störstelle (DE-588)4193400-3 s Silicium (DE-588)4077445-4 s DE-604 Sirtl, Erhard 1928-2006 Sonstige (DE-588)105258555 oth ESSDERC 12 1982 München Sonstige (DE-588)2075124-2 oth Electrochemical Society: Proceedings 83,4 (DE-604)BV001900941 83,4 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006131113&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Aggregation phenomena of point defects in silicon proceedings of the Satellite Symposium to ESSDERC '82 Munich Electrochemical Society: Proceedings Roosterfouten gtt Silicium gtt Point defects Congresses Silicon crystals Congresses Silicium (DE-588)4077445-4 gnd Störstelle (DE-588)4193400-3 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4193400-3 (DE-588)1071861417 |
| title | Aggregation phenomena of point defects in silicon proceedings of the Satellite Symposium to ESSDERC '82 Munich |
| title_auth | Aggregation phenomena of point defects in silicon proceedings of the Satellite Symposium to ESSDERC '82 Munich |
| title_exact_search | Aggregation phenomena of point defects in silicon proceedings of the Satellite Symposium to ESSDERC '82 Munich |
| title_full | Aggregation phenomena of point defects in silicon proceedings of the Satellite Symposium to ESSDERC '82 Munich ed. by Erhard Sirtl ... |
| title_fullStr | Aggregation phenomena of point defects in silicon proceedings of the Satellite Symposium to ESSDERC '82 Munich ed. by Erhard Sirtl ... |
| title_full_unstemmed | Aggregation phenomena of point defects in silicon proceedings of the Satellite Symposium to ESSDERC '82 Munich ed. by Erhard Sirtl ... |
| title_short | Aggregation phenomena of point defects in silicon |
| title_sort | aggregation phenomena of point defects in silicon proceedings of the satellite symposium to essderc 82 munich |
| title_sub | proceedings of the Satellite Symposium to ESSDERC '82 Munich |
| topic | Roosterfouten gtt Silicium gtt Point defects Congresses Silicon crystals Congresses Silicium (DE-588)4077445-4 gnd Störstelle (DE-588)4193400-3 gnd |
| topic_facet | Roosterfouten Silicium Point defects Congresses Silicon crystals Congresses Störstelle Konferenzschrift 1982 München |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006131113&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001900941 |
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