Physical sputtering of elemental metals and semiconductors:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Jülich
1985
|
| Schriftenreihe: | Kernforschungsanlage <Jülich>: Berichte der Kernforschungsanlage Jülich
2028 |
| Schlagworte: | |
| Beschreibung: | 24 S. |
Internformat
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Datensatz im Suchindex
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| any_adam_object | |
| author | Hofer, Wolfgang O. 1941- |
| author_GND | (DE-588)129690635 |
| author_facet | Hofer, Wolfgang O. 1941- |
| author_role | aut |
| author_sort | Hofer, Wolfgang O. 1941- |
| author_variant | w o h wo woh |
| building | Verbundindex |
| bvnumber | BV009220254 |
| ctrlnum | (OCoLC)23158469 (DE-599)BVBBV009220254 |
| format | Book |
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| id | DE-604.BV009220254 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T17:33:20Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006129992 |
| oclc_num | 23158469 |
| open_access_boolean | |
| owner | DE-210 |
| owner_facet | DE-210 |
| physical | 24 S. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| record_format | marc |
| series | Kernforschungsanlage <Jülich>: Berichte der Kernforschungsanlage Jülich |
| series2 | Kernforschungsanlage <Jülich>: Berichte der Kernforschungsanlage Jülich |
| spelling | Hofer, Wolfgang O. 1941- Verfasser (DE-588)129690635 aut Physical sputtering of elemental metals and semiconductors Jülich 1985 24 S. txt rdacontent n rdamedia nc rdacarrier Kernforschungsanlage <Jülich>: Berichte der Kernforschungsanlage Jülich 2028 Sputtern (DE-588)4182614-0 gnd rswk-swf Metall (DE-588)4038860-8 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Sputtern (DE-588)4182614-0 s Halbleiter (DE-588)4022993-2 s DE-604 Metall (DE-588)4038860-8 s Kernforschungsanlage <Jülich>: Berichte der Kernforschungsanlage Jülich 2028 (DE-604)BV007933847 2028 |
| spellingShingle | Hofer, Wolfgang O. 1941- Physical sputtering of elemental metals and semiconductors Kernforschungsanlage <Jülich>: Berichte der Kernforschungsanlage Jülich Sputtern (DE-588)4182614-0 gnd Metall (DE-588)4038860-8 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4038860-8 (DE-588)4022993-2 |
| title | Physical sputtering of elemental metals and semiconductors |
| title_auth | Physical sputtering of elemental metals and semiconductors |
| title_exact_search | Physical sputtering of elemental metals and semiconductors |
| title_full | Physical sputtering of elemental metals and semiconductors |
| title_fullStr | Physical sputtering of elemental metals and semiconductors |
| title_full_unstemmed | Physical sputtering of elemental metals and semiconductors |
| title_short | Physical sputtering of elemental metals and semiconductors |
| title_sort | physical sputtering of elemental metals and semiconductors |
| topic | Sputtern (DE-588)4182614-0 gnd Metall (DE-588)4038860-8 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Sputtern Metall Halbleiter |
| volume_link | (DE-604)BV007933847 |
| work_keys_str_mv | AT hoferwolfgango physicalsputteringofelementalmetalsandsemiconductors |