Atomic layer growth and processing: symposium held April 29 - May 1, 1991, Anaheim, California, USA
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Bibliographic Details
Format: Book
Language:Undetermined
Published: Pittsburgh, Pa. Materials Research Society 1993
Series:Materials Research Society: Materials Research Society symposia proceedings 222
Subjects:
Physical Description:XIII, 360 S. graph. Darst.
ISBN:1558991166

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