APA (7th ed.) Citation

(1993). Atomic layer growth and processing: Symposium held April 29 - May 1, 1991, Anaheim, California, USA. Materials Research Society.

Chicago Style (17th ed.) Citation

Atomic Layer Growth and Processing: Symposium Held April 29 - May 1, 1991, Anaheim, California, USA. Pittsburgh, Pa: Materials Research Society, 1993.

MLA (9th ed.) Citation

Atomic Layer Growth and Processing: Symposium Held April 29 - May 1, 1991, Anaheim, California, USA. Materials Research Society, 1993.