Plasma synthesis and etching of electronic materials: symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A.
Saved in:
| Other Authors: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Pittsburgh, Pa.
Materials Research Soc.
1985
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| Series: | Materials Research Society: Materials Research Society symposia proceedings
38 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XV, 522 S. graph. Darst., Ill. |
| ISBN: | 0931837030 |
Staff View
MARC
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| 245 | 1 | 0 | |a Plasma synthesis and etching of electronic materials |b symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. |c ed. by Robert P. Chang |
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Record in the Search Index
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| genre | (DE-588)1071861417 Konferenzschrift 1984 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1984 Boston Mass. |
| id | DE-604.BV009075029 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:30:34Z |
| institution | BVB |
| institution_GND | (DE-588)5026038-8 |
| isbn | 0931837030 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006012406 |
| oclc_num | 632338294 |
| open_access_boolean | |
| owner | DE-29T DE-83 DE-11 |
| owner_facet | DE-29T DE-83 DE-11 |
| physical | XV, 522 S. graph. Darst., Ill. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Plasma synthesis and etching of electronic materials symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. ed. by Robert P. Chang Pittsburgh, Pa. Materials Research Soc. 1985 XV, 522 S. graph. Darst., Ill. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 38 Halbleiter (DE-588)4022993-2 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1984 Boston Mass. gnd-content Plasmatechnik (DE-588)4140353-8 s Halbleiter (DE-588)4022993-2 s DE-604 Plasmaätzen (DE-588)4174821-9 s Chang, Robert P. edt Symposium on Plasma Synthesis and Etching of Electronic Materials 1984 Boston, Mass. Sonstige (DE-588)5026038-8 oth Materials Research Society: Materials Research Society symposia proceedings 38 (DE-604)BV001899105 38 http://www.gbv.de/dms/tib-ub-hannover/017850460.pdf Inhaltsverzeichnis |
| spellingShingle | Plasma synthesis and etching of electronic materials symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. Materials Research Society: Materials Research Society symposia proceedings Halbleiter (DE-588)4022993-2 gnd Plasmatechnik (DE-588)4140353-8 gnd Plasmaätzen (DE-588)4174821-9 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4140353-8 (DE-588)4174821-9 (DE-588)1071861417 |
| title | Plasma synthesis and etching of electronic materials symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. |
| title_auth | Plasma synthesis and etching of electronic materials symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. |
| title_exact_search | Plasma synthesis and etching of electronic materials symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. |
| title_full | Plasma synthesis and etching of electronic materials symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. ed. by Robert P. Chang |
| title_fullStr | Plasma synthesis and etching of electronic materials symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. ed. by Robert P. Chang |
| title_full_unstemmed | Plasma synthesis and etching of electronic materials symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. ed. by Robert P. Chang |
| title_short | Plasma synthesis and etching of electronic materials |
| title_sort | plasma synthesis and etching of electronic materials symposium held nov 27 30 1984 boston mass u s a |
| title_sub | symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. |
| topic | Halbleiter (DE-588)4022993-2 gnd Plasmatechnik (DE-588)4140353-8 gnd Plasmaätzen (DE-588)4174821-9 gnd |
| topic_facet | Halbleiter Plasmatechnik Plasmaätzen Konferenzschrift 1984 Boston Mass. |
| url | http://www.gbv.de/dms/tib-ub-hannover/017850460.pdf |
| volume_link | (DE-604)BV001899105 |
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