Chang, R. P. (1985). Plasma synthesis and etching of electronic materials: Symposium held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. Materials Research Soc.
Chicago Style (17th ed.) CitationChang, Robert P. Plasma Synthesis and Etching of Electronic Materials: Symposium Held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. Pittsburgh, Pa: Materials Research Soc, 1985.
MLA (9th ed.) CitationChang, Robert P. Plasma Synthesis and Etching of Electronic Materials: Symposium Held Nov. 27 - 30, 1984, Boston, Mass., U.S.A. Materials Research Soc, 1985.
Warning: These citations may not always be 100% accurate.