Proceedings of the Tutorial Symposium on Semiconductor Technology:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pennington, NJ
1982
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| Schriftenreihe: | Electrochemical Society: Proceedings
82,5 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VI, 258 S. graph. Darst. |
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Datensatz im Suchindex
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| adam_text | IMAGE 1
PROCEEDINGS OF THE TUTORIAL SYMPOSIUM ON
SEMICONDUCTORTECHNOLOGY
EDITED BY
DARYL ANN DOANE
DAVID B. FRASER
BELL LABORATORIES BELL LABORATORIES
MURRAY HILL, NEW JERSEY MURRAY HILL, NEW JERSEY
DENNIS W. HESS
DEPARTMENT OF CHEMICAL ENGINEERING UNIVERSITY OF CALIFORNIA
BERKELEY, CALIFORNIA
ELECTRONICS AND DIELECTRICS AND INSULATION DIVISIONS
PROCEEDINGS VOLUME 82-5
THE ELECTROCHEMICAL SOCIETY, INC., 10 SOUTH MAIN ST., PENNINGTON, NJ
08534
TIB/UB HANNOVER 89 129 939 730
?Q
IMAGE 2
TABLE OF CONTENTS
PREFACE
I - INTRODUCTORY REMARKS
SEMICONDUCTOR DEVICE PROCESSING TECHNOLOGY D. A. DOANE, D. B. FRASER AND
D. W. HESS
II - SEMICONDUCTOR MATERIALS PROCESSING 13
T. D. CALLINEN AWARD ADDRESS: THE THERMAL OXIDATION OF SILICON B. E.
DEAL 15
PROCESSES FOR THIN FILM PREPARATION J. J. CUOMO 43
III-V MATERIALS TECHNOLOGY J. M. WOODALL 45
ION IMPLANTATION PROCESSING M. I. CURRENT AND K. A. PICKAR 65
III - PATTERN DEFINITION TECHNOLOGIES 89
MATERIALS AND PROCESSES IN LITHOGRAPHY L. F. THOMPSON 91
A TUTORIAL ON OPTICAL LITHOGRAPHY J. H. BRUNING 119
ELECTRON BEAM LITHOGRAPHY D. R. HERRIOTT 139
DEVELOPMENTS IN X-RAY LITHOGRAPHY H. J. LEVINSTEIN 155
IV - PATTERN TRANSFER PROCESSES 171
CHEMICAL ETCHING - A TUTORIAL REVIEW J. S. JUDGE 173
V
IMAGE 3
TABLE OF CONTENTS
PLASMA-ASSISTED ETCHING J. W. COBURN 177
V - GLOBAL VIEW: SEMICONDUCTOR DEVICE MANUFACTURING 219
THE TECHNOLOGY AND ENGINEERING CHALLENGES POSED BY VERY LARGE SCALE
INTEGRATION
A. REISMAN 221
VI
|
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| spelling | Tutorial Symposium on Semiconductor Technology 1982 Montréal Verfasser (DE-588)5237929-2 aut Proceedings of the Tutorial Symposium on Semiconductor Technology Hrsg. von Daryl A. Doane* Pennington, NJ 1982 VI, 258 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 82,5 Circuits intégrés - Congrès Integrated circuits Congresses Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Montréal gnd-content Halbleiter (DE-588)4022993-2 s DE-604 Doane, Daryl A. Sonstige oth Electrochemical Society: Proceedings 82,5 (DE-604)BV001900941 82,5 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006009758&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Proceedings of the Tutorial Symposium on Semiconductor Technology Electrochemical Society: Proceedings Circuits intégrés - Congrès Integrated circuits Congresses Halbleiter (DE-588)4022993-2 gnd |
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| title | Proceedings of the Tutorial Symposium on Semiconductor Technology |
| title_auth | Proceedings of the Tutorial Symposium on Semiconductor Technology |
| title_exact_search | Proceedings of the Tutorial Symposium on Semiconductor Technology |
| title_full | Proceedings of the Tutorial Symposium on Semiconductor Technology Hrsg. von Daryl A. Doane* |
| title_fullStr | Proceedings of the Tutorial Symposium on Semiconductor Technology Hrsg. von Daryl A. Doane* |
| title_full_unstemmed | Proceedings of the Tutorial Symposium on Semiconductor Technology Hrsg. von Daryl A. Doane* |
| title_short | Proceedings of the Tutorial Symposium on Semiconductor Technology |
| title_sort | proceedings of the tutorial symposium on semiconductor technology |
| topic | Circuits intégrés - Congrès Integrated circuits Congresses Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Circuits intégrés - Congrès Integrated circuits Congresses Halbleiter Konferenzschrift 1982 Montréal |
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