Gettering and defect engineering in the semiconductor technology: GADEST '93 ; proceedings of the 5. international Autumn meeting held in Chossewitz near Frankfurt (Oder), Germany, October 09 - 14, 1993
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Bibliographic Details
Format: Conference Proceeding Book
Language:Undetermined
Published: Vaduz Sci-Tech Publ. 1993
Series:Diffusion and defect data / B 32/33 (1993)
Subjects:
Item Description:Stücktitelaufnahme zu e. Zeitschriftenheft
Physical Description:XVII, 630 S. Ill., graph. Darst.
ISBN:3908450004

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Interlibrary loan Place Request Caution: Not in THWS collection!