Etching of III-V semiconductors: an electrochemical approach
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Oxford u.a.
Elsevier
1991
|
| Series: | Elsevier advanced technology
|
| Subjects: | |
| Physical Description: | XIV, 349 S. graph. Darst. |
| ISBN: | 0946395845 |
Staff View
MARC
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| author | Notten, Peter H. Meerakker, Jan E. van den Kelly, John J. |
| author_facet | Notten, Peter H. Meerakker, Jan E. van den Kelly, John J. |
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV008979340 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:52Z |
| institution | BVB |
| isbn | 0946395845 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005930060 |
| oclc_num | 22005857 |
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| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XIV, 349 S. graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Elsevier |
| record_format | marc |
| series2 | Elsevier advanced technology |
| spelling | Notten, Peter H. Verfasser aut Etching of III-V semiconductors an electrochemical approach P. H. L. Notten ; J. E. A. M. van den Meerakker ; J. J. Kelly Oxford u.a. Elsevier 1991 XIV, 349 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Elsevier advanced technology Electrochemistry Semiconductors Etching Ätzen (DE-588)4000648-7 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Ätzen (DE-588)4000648-7 s DE-604 Meerakker, Jan E. van den Verfasser aut Kelly, John J. Verfasser aut |
| spellingShingle | Notten, Peter H. Meerakker, Jan E. van den Kelly, John J. Etching of III-V semiconductors an electrochemical approach Electrochemistry Semiconductors Etching Ätzen (DE-588)4000648-7 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4000648-7 (DE-588)4022993-2 |
| title | Etching of III-V semiconductors an electrochemical approach |
| title_auth | Etching of III-V semiconductors an electrochemical approach |
| title_exact_search | Etching of III-V semiconductors an electrochemical approach |
| title_full | Etching of III-V semiconductors an electrochemical approach P. H. L. Notten ; J. E. A. M. van den Meerakker ; J. J. Kelly |
| title_fullStr | Etching of III-V semiconductors an electrochemical approach P. H. L. Notten ; J. E. A. M. van den Meerakker ; J. J. Kelly |
| title_full_unstemmed | Etching of III-V semiconductors an electrochemical approach P. H. L. Notten ; J. E. A. M. van den Meerakker ; J. J. Kelly |
| title_short | Etching of III-V semiconductors |
| title_sort | etching of iii v semiconductors an electrochemical approach |
| title_sub | an electrochemical approach |
| topic | Electrochemistry Semiconductors Etching Ätzen (DE-588)4000648-7 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Electrochemistry Semiconductors Etching Ätzen Halbleiter |
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