Plasma deposition, treatment, and etching of polymers:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Boston u.a.
Acad. Pr.
1990
|
| Series: | Plasma - materials interactions
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XIII, 528 S. Ill., graph. Darst. |
| ISBN: | 0122004302 |
Staff View
MARC
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| 245 | 1 | 0 | |a Plasma deposition, treatment, and etching of polymers |c ed. by Riccardo d'Agostino |
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Record in the Search Index
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| adam_text | Contents
Contributors xi
Preface xiii
1 An Introduction to Plasma Polymerization 1
Nicholas Morosoff
I. Introduction 1
II. Control of Plasma Polymer Thin Film Properties 9
III. Methods of Plasma Polymer Characterization 57
IV. Applications of Plasma Polymer Films 68
References 84
2 Plasma Polymerization of Fluorocarbons 95
Riccardo d Agostino, Francesco Cramarossa, Francesco Fracassi,
and Francesco Illuzzi
I. Comparison of Gas Feeds 96
II. Simplifying Parameters 97
III. Reactors 101
IV. Gas Phase Diagnostics 109
V. Mechanism of Deposition of PPFM Films 126
VI. Chemical Structure of PPFM Films and Their Correlation
to Gas Phase Species Distribution 143
3 Plasma Polymerized Organosilicones and Organometallics .... 163
A. M. Wrobel and M. R. Wertheimer
I. Introduction 164
II. Effect of Fabrication Variables 167
HI. Plasma Polymerization Mechanisms 173
vii
viii Contents
IV. The Structure of Plasma Polymer Films 187
V. Morphology of Plasma Polymer Films 211
VI. Properties of Plasma Polymer Films 219
VII. Applications of Plasma Polymer Films 242
VIII. Conclusions 252
IX. Addendum 252
Acknowledgments 255
References 255
4 Plasma Polymer Metal Composite Films 269
H. Biederman and L. Martinii
I. Introduction 270
II. Vacuum Techniques for Deposition of Polymer/Metal
Composite Films 271
III. Elementary Processes Involved in the Deposition 279
IV. Structure and Composition of Films 286
V. Optical Properties 295
VI. Electrical Properties 306
VII. Mechanical Properties 312
VIII. Aging Effects and Stability of the Films 314
IX. Applications 315
X. Conclusions 316
Acknowledgments 317
References 317
5 Plasma Etching of Organic Polymers 321
Frank D. Egitto, Vladimir Vukanovic, and Gary N. Taylor
I. Introduction 322
II. Plasma Sources and Diagnostics 323
III. Hydrocarbon Polymer Etching Using Oxygen Plasmas . . . 329
IV. Hydrocarbon Polymer Etching in Plasmas of Oxygen and
Fluorine Containing Gases 334
V. Fluoropolymer Etching 346
VI. Effect of Ion Bombardment 352
VII. Loading Effect 355
VIII. Temperature Dependence 358
IX. Other Gases Added to O2 361
X. Etch Products 366
XI. More on Polymer Structure 367
XII. Applications 373
Acknowledgments 412
References 412
Contents ix
6 Applications of Plasma Polymers 423
Shinzo Morita and Shuzo Hattori
I. Introduction 423
II. Plasma Polymerized Resists in Microfabrication Processes 424
III. Plasma Polymers in Electronic Elements 443
IV. Plasma Polymers in Optical Applications 451
V. Diamond and Amorphous Carbon Synthesis 454
References 458
7 Plasma Deposition and Treatment for Biomaterial Applications 463
Buddy D. Ratner, Ashutosh Chilkoti, and Gabriel P. Lopez
I. Introduction 464
II. Blood Compatibility of Plasma Deposited Films 475
III. Ophthalmological Applications 489
IV. Tissue Culture Applications 493
V. Membranes and Drug Delivery Devices 496
VI. Plasma Cleaning of Biomaterial Surfaces 498
VII. Plasma Sterilization 502
VIII. Biomedical Electrodes and Implanted Sensors 506
IX. Conclusions 510
Acknowledgments 511
References 511
Index 517
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| id | DE-604.BV008971363 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:42Z |
| institution | BVB |
| isbn | 0122004302 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005923233 |
| oclc_num | 20627604 |
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| owner | DE-29T DE-1102 |
| owner_facet | DE-29T DE-1102 |
| physical | XIII, 528 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Acad. Pr. |
| record_format | marc |
| series2 | Plasma - materials interactions |
| spelling | Plasma deposition, treatment, and etching of polymers ed. by Riccardo d'Agostino Boston u.a. Acad. Pr. 1990 XIII, 528 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Plasma - materials interactions Gravure par plasma Plasmas, Technique des Polymères Polymérisation sous plasma Plasma engineering Plasma etching Plasma polymerization Polymers Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Polymere (DE-588)4046699-1 gnd rswk-swf Polymere (DE-588)4046699-1 s Plasmaätzen (DE-588)4174821-9 s DE-604 Plasmatechnik (DE-588)4140353-8 s D'Agostino, Riccardo Sonstige (DE-588)129950971 oth HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005923233&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Plasma deposition, treatment, and etching of polymers Gravure par plasma Plasmas, Technique des Polymères Polymérisation sous plasma Plasma engineering Plasma etching Plasma polymerization Polymers Plasmatechnik (DE-588)4140353-8 gnd Plasmaätzen (DE-588)4174821-9 gnd Polymere (DE-588)4046699-1 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4174821-9 (DE-588)4046699-1 |
| title | Plasma deposition, treatment, and etching of polymers |
| title_auth | Plasma deposition, treatment, and etching of polymers |
| title_exact_search | Plasma deposition, treatment, and etching of polymers |
| title_full | Plasma deposition, treatment, and etching of polymers ed. by Riccardo d'Agostino |
| title_fullStr | Plasma deposition, treatment, and etching of polymers ed. by Riccardo d'Agostino |
| title_full_unstemmed | Plasma deposition, treatment, and etching of polymers ed. by Riccardo d'Agostino |
| title_short | Plasma deposition, treatment, and etching of polymers |
| title_sort | plasma deposition treatment and etching of polymers |
| topic | Gravure par plasma Plasmas, Technique des Polymères Polymérisation sous plasma Plasma engineering Plasma etching Plasma polymerization Polymers Plasmatechnik (DE-588)4140353-8 gnd Plasmaätzen (DE-588)4174821-9 gnd Polymere (DE-588)4046699-1 gnd |
| topic_facet | Gravure par plasma Plasmas, Technique des Polymères Polymérisation sous plasma Plasma engineering Plasma etching Plasma polymerization Polymers Plasmatechnik Plasmaätzen Polymere |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005923233&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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