Integrated circuit metrology, inspection, and process control IV: [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
Internat. Soc. for Optical Engineering
1990
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ...
1261 |
| Schlagworte: | |
| Beschreibung: | VIII, 528 S. graph. Darst. |
| ISBN: | 0819403083 |
Internformat
MARC
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Datensatz im Suchindex
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1990 San Jose Calif. gnd-content |
| genre_facet | Konferenzschrift 1990 San Jose Calif. |
| id | DE-604.BV008950454 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:19Z |
| institution | BVB |
| institution_GND | (DE-588)16131043-6 |
| isbn | 0819403083 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005906025 |
| oclc_num | 21961349 |
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| physical | VIII, 528 S. graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |
| spelling | Integrated circuit metrology, inspection, and process control IV [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California William H. Arnold chair/ed. Bellingham, Wash. Internat. Soc. for Optical Engineering 1990 VIII, 528 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... 1261 Integrated circuits Inspection Congresses Integrated circuits Measurement Congresses Messtechnik (DE-588)4114575-6 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1990 San Jose Calif. gnd-content Integrierte Schaltung (DE-588)4027242-4 s Messtechnik (DE-588)4114575-6 s DE-604 Arnold, William H. Sonstige oth Conference on Integrated Circuit Metrology, Inspection, and Process Control 4 1990 San José, Calif. Sonstige (DE-588)16131043-6 oth Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... 1261 (DE-604)BV000010887 1261 |
| spellingShingle | Integrated circuit metrology, inspection, and process control IV [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... Integrated circuits Inspection Congresses Integrated circuits Measurement Congresses Messtechnik (DE-588)4114575-6 gnd Integrierte Schaltung (DE-588)4027242-4 gnd |
| subject_GND | (DE-588)4114575-6 (DE-588)4027242-4 (DE-588)1071861417 |
| title | Integrated circuit metrology, inspection, and process control IV [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California |
| title_auth | Integrated circuit metrology, inspection, and process control IV [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California |
| title_exact_search | Integrated circuit metrology, inspection, and process control IV [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California |
| title_full | Integrated circuit metrology, inspection, and process control IV [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California William H. Arnold chair/ed. |
| title_fullStr | Integrated circuit metrology, inspection, and process control IV [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California William H. Arnold chair/ed. |
| title_full_unstemmed | Integrated circuit metrology, inspection, and process control IV [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California William H. Arnold chair/ed. |
| title_short | Integrated circuit metrology, inspection, and process control IV |
| title_sort | integrated circuit metrology inspection and process control iv papers presented at the fourth annual spie conference on integrated circuit metrology inspection and process control 5 6 march 1990 san jose california |
| title_sub | [... papers presented at the fourth annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control], 5 - 6 March 1990, San José, California |
| topic | Integrated circuits Inspection Congresses Integrated circuits Measurement Congresses Messtechnik (DE-588)4114575-6 gnd Integrierte Schaltung (DE-588)4027242-4 gnd |
| topic_facet | Integrated circuits Inspection Congresses Integrated circuits Measurement Congresses Messtechnik Integrierte Schaltung Konferenzschrift 1990 San Jose Calif. |
| volume_link | (DE-604)BV000010887 |
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