Optical laser microlithography III: [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
Internat. Soc. for Optical Engineering
1990
|
| Series: | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ...
1264 |
| Subjects: | |
| Physical Description: | X, 586 S. Ill., graph. Darst. |
| ISBN: | 0819403113 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV008950452 | ||
| 003 | DE-604 | ||
| 005 | 19960506 | ||
| 007 | t | ||
| 008 | 940206s1990 ad|| |||| 10||| eng d | ||
| 020 | |a 0819403113 |9 0-8194-0311-3 | ||
| 035 | |a (OCoLC)25027371 | ||
| 035 | |a (DE-599)BVBBV008950452 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T | ||
| 050 | 0 | |a TA1677 | |
| 050 | 0 | |a TS510 | |
| 082 | 0 | |a 621.36/6 |2 20 | |
| 245 | 1 | 0 | |a Optical laser microlithography III |b [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |c Victor Pol chair/ed. |
| 246 | 1 | 3 | |a Optical/laser microlithography III |
| 264 | 1 | |a Bellingham, Wash. |b Internat. Soc. for Optical Engineering |c 1990 | |
| 300 | |a X, 586 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |v 1264 | |
| 650 | 4 | |a Lasers |x Industrial applications |v Congresses | |
| 650 | 4 | |a Microlithography |v Congresses | |
| 650 | 4 | |a Optical instruments |v Congresses | |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1990 |z San Jose Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | 1 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Pol, Victor |e Sonstige |4 oth | |
| 710 | 2 | |a Symposium on Microlithography (3, 1990, San José, Calif.) |e Sonstige |0 (DE-588)16131041-2 |4 oth | |
| 830 | 0 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |v 1264 |w (DE-604)BV000010887 |9 1264 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-005906023 | ||
Record in the Search Index
| _version_ | 1804123283856031744 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV008950452 |
| callnumber-first | T - Technology |
| callnumber-label | TA1677 |
| callnumber-raw | TA1677 TS510 |
| callnumber-search | TA1677 TS510 |
| callnumber-sort | TA 41677 |
| callnumber-subject | TA - General and Civil Engineering |
| ctrlnum | (OCoLC)25027371 (DE-599)BVBBV008950452 |
| dewey-full | 621.36/6 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.36/6 |
| dewey-search | 621.36/6 |
| dewey-sort | 3621.36 16 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01879nam a2200445 cb4500</leader><controlfield tag="001">BV008950452</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19960506 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">940206s1990 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0819403113</subfield><subfield code="9">0-8194-0311-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)25027371</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV008950452</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA1677</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TS510</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.36/6</subfield><subfield code="2">20</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Optical laser microlithography III</subfield><subfield code="b">[the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California</subfield><subfield code="c">Victor Pol chair/ed.</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Optical/laser microlithography III</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash.</subfield><subfield code="b">Internat. Soc. for Optical Engineering</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 586 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Society of Photo-Optical Instrumentation Engineers: Proceedings of the ...</subfield><subfield code="v">1264</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Lasers</subfield><subfield code="x">Industrial applications</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microlithography</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical instruments</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Lithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4191584-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1990</subfield><subfield code="z">San Jose Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Lithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4191584-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Pol, Victor</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Symposium on Microlithography (3, 1990, San José, Calif.)</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)16131041-2</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Society of Photo-Optical Instrumentation Engineers: Proceedings of the ...</subfield><subfield code="v">1264</subfield><subfield code="w">(DE-604)BV000010887</subfield><subfield code="9">1264</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-005906023</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1990 San Jose Calif. gnd-content |
| genre_facet | Konferenzschrift 1990 San Jose Calif. |
| id | DE-604.BV008950452 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:19Z |
| institution | BVB |
| institution_GND | (DE-588)16131041-2 |
| isbn | 0819403113 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005906023 |
| oclc_num | 25027371 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | X, 586 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |
| spelling | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Victor Pol chair/ed. Optical/laser microlithography III Bellingham, Wash. Internat. Soc. for Optical Engineering 1990 X, 586 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... 1264 Lasers Industrial applications Congresses Microlithography Congresses Optical instruments Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1990 San Jose Calif. gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Pol, Victor Sonstige oth Symposium on Microlithography (3, 1990, San José, Calif.) Sonstige (DE-588)16131041-2 oth Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... 1264 (DE-604)BV000010887 1264 |
| spellingShingle | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... Lasers Industrial applications Congresses Microlithography Congresses Optical instruments Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4174516-4 (DE-588)4191584-7 (DE-588)1071861417 |
| title | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |
| title_alt | Optical/laser microlithography III |
| title_auth | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |
| title_exact_search | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |
| title_full | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Victor Pol chair/ed. |
| title_fullStr | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Victor Pol chair/ed. |
| title_full_unstemmed | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Victor Pol chair/ed. |
| title_short | Optical laser microlithography III |
| title_sort | optical laser microlithography iii the 1990 spie symposium on microlithography 7 9 march 1990 san jose california |
| title_sub | [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |
| topic | Lasers Industrial applications Congresses Microlithography Congresses Optical instruments Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lasers Industrial applications Congresses Microlithography Congresses Optical instruments Congresses Fotolithografie Halbleitertechnologie Lithografie Halbleitertechnologie Konferenzschrift 1990 San Jose Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT polvictor opticallasermicrolithographyiiithe1990spiesymposiumonmicrolithography79march1990sanjosecalifornia AT symposiumonmicrolithography31990sanjosecalif opticallasermicrolithographyiiithe1990spiesymposiumonmicrolithography79march1990sanjosecalifornia AT polvictor opticallasermicrolithographyiii AT symposiumonmicrolithography31990sanjosecalif opticallasermicrolithographyiii |