Optical laser microlithography III: [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
Internat. Soc. for Optical Engineering
1990
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ...
1264 |
| Schlagworte: | |
| Beschreibung: | X, 586 S. Ill., graph. Darst. |
| ISBN: | 0819403113 |
Internformat
MARC
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| 245 | 1 | 0 | |a Optical laser microlithography III |b [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |c Victor Pol chair/ed. |
| 246 | 1 | 3 | |a Optical/laser microlithography III |
| 264 | 1 | |a Bellingham, Wash. |b Internat. Soc. for Optical Engineering |c 1990 | |
| 300 | |a X, 586 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |v 1264 | |
| 650 | 4 | |a Lasers |x Industrial applications |v Congresses | |
| 650 | 4 | |a Microlithography |v Congresses | |
| 650 | 4 | |a Optical instruments |v Congresses | |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1990 |z San Jose Calif. |2 gnd-content | |
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| 689 | 0 | 1 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Pol, Victor |e Sonstige |4 oth | |
| 710 | 2 | |a Symposium on Microlithography (3, 1990, San José, Calif.) |e Sonstige |0 (DE-588)16131041-2 |4 oth | |
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Datensatz im Suchindex
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1990 San Jose Calif. gnd-content |
| genre_facet | Konferenzschrift 1990 San Jose Calif. |
| id | DE-604.BV008950452 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:27:19Z |
| institution | BVB |
| institution_GND | (DE-588)16131041-2 |
| isbn | 0819403113 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005906023 |
| oclc_num | 25027371 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | X, 586 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... |
| spelling | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Victor Pol chair/ed. Optical/laser microlithography III Bellingham, Wash. Internat. Soc. for Optical Engineering 1990 X, 586 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... 1264 Lasers Industrial applications Congresses Microlithography Congresses Optical instruments Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1990 San Jose Calif. gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Pol, Victor Sonstige oth Symposium on Microlithography (3, 1990, San José, Calif.) Sonstige (DE-588)16131041-2 oth Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... 1264 (DE-604)BV000010887 1264 |
| spellingShingle | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... Lasers Industrial applications Congresses Microlithography Congresses Optical instruments Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4174516-4 (DE-588)4191584-7 (DE-588)1071861417 |
| title | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |
| title_alt | Optical/laser microlithography III |
| title_auth | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |
| title_exact_search | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |
| title_full | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Victor Pol chair/ed. |
| title_fullStr | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Victor Pol chair/ed. |
| title_full_unstemmed | Optical laser microlithography III [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California Victor Pol chair/ed. |
| title_short | Optical laser microlithography III |
| title_sort | optical laser microlithography iii the 1990 spie symposium on microlithography 7 9 march 1990 san jose california |
| title_sub | [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California |
| topic | Lasers Industrial applications Congresses Microlithography Congresses Optical instruments Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lasers Industrial applications Congresses Microlithography Congresses Optical instruments Congresses Fotolithografie Halbleitertechnologie Lithografie Halbleitertechnologie Konferenzschrift 1990 San Jose Calif. |
| volume_link | (DE-604)BV000010887 |
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