APA (7th ed.) Citation

(1990). Optical laser microlithography III: [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California. Internat. Soc. for Optical Engineering.

Chicago Style (17th ed.) Citation

Optical Laser Microlithography III: [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California. Bellingham, Wash: Internat. Soc. for Optical Engineering, 1990.

MLA (9th ed.) Citation

Optical Laser Microlithography III: [the 1990 SPIE Symposium on Microlithography ...] 7 - 9 March 1990, San Jose, California. Internat. Soc. for Optical Engineering, 1990.