Vacuum, surfaces, and films: proceedings of the Topical Conference on Nanometer Scale Properties of Surfaces and Interfaces [23 - 26 Oct. 1989, Hynes Convention Center, Boston, Mass.] proceedings of the Topical Conference on Surface Microengineering [23 - 24 Oct. 1989 Hynes Convention Center, Boston, Mass.]
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Bibliographic Details
Format: Conference Proceeding Book
Language:Undetermined
Published: New York, NY Amer. Inst. of Physics 1990
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Item Description:In: Journal of vacuum science and technology / A ; 8 (1990) 4
Physical Description:XVIII S., S. 3103 - 3652

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