APA (7th ed.) Citation

(1992). Rapid thermal and integrated processing: 10 - 11 September 1991, San Jose, California. SPIE.

Chicago Style (17th ed.) Citation

Rapid Thermal and Integrated Processing: 10 - 11 September 1991, San Jose, California. Bellingham, Wash: SPIE, 1992.

MLA (9th ed.) Citation

Rapid Thermal and Integrated Processing: 10 - 11 September 1991, San Jose, California. SPIE, 1992.

Warning: These citations may not always be 100% accurate.