APA (7th ed.) Citation

(1991). Rapid thermal and related processing techniques: 2 - 3 October 1990, Santa Clara, California. SPIE.

Chicago Style (17th ed.) Citation

Rapid Thermal and Related Processing Techniques: 2 - 3 October 1990, Santa Clara, California. Bellingham, Washington, USA: SPIE, 1991.

MLA (9th ed.) Citation

Rapid Thermal and Related Processing Techniques: 2 - 3 October 1990, Santa Clara, California. SPIE, 1991.

Warning: These citations may not always be 100% accurate.