Semiconductor materials analysis and fabrication process control: proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam
North-Holland
1993
|
| Schriftenreihe: | Applied surface science
63 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. e. Zeitschr.-Bandes |
| Beschreibung: | XIV, 338 S. Ill., graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Semiconductor materials analysis and fabrication process control |b proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 |c ed. by: G. M. Crean ... |
| 264 | 1 | |a Amsterdam |b North-Holland |c 1993 | |
| 300 | |a XIV, 338 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 0 | |a Applied surface science |v 63 | |
| 500 | |a Einzelaufn. e. Zeitschr.-Bandes | ||
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Datensatz im Suchindex
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| dewey-ones | 621 - Applied physics |
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| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1992 Straßburg gnd-content |
| genre_facet | Konferenzschrift 1992 Straßburg |
| id | DE-604.BV007710783 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:08:08Z |
| institution | BVB |
| institution_GND | (DE-588)5000064-0 (DE-588)3015101-6 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005064988 |
| oclc_num | 27719072 |
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| owner | DE-355 DE-BY-UBR DE-384 DE-706 |
| owner_facet | DE-355 DE-BY-UBR DE-384 DE-706 |
| physical | XIV, 338 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | North-Holland |
| record_format | marc |
| series2 | Applied surface science |
| spelling | Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 ed. by: G. M. Crean ... Amsterdam North-Holland 1993 XIV, 338 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Applied surface science 63 Einzelaufn. e. Zeitschr.-Bandes Semiconducteurs ram Halbleiterwerkstoff (DE-588)4158817-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1992 Straßburg gnd-content Halbleiterwerkstoff (DE-588)4158817-4 s DE-604 Crean, G. M. Sonstige oth European Materials Research Society Sonstige (DE-588)5000064-0 oth Symposium on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control 1992 Straßburg Sonstige (DE-588)3015101-6 oth |
| spellingShingle | Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 Semiconducteurs ram Halbleiterwerkstoff (DE-588)4158817-4 gnd |
| subject_GND | (DE-588)4158817-4 (DE-588)1071861417 |
| title | Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 |
| title_auth | Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 |
| title_exact_search | Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 |
| title_full | Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 ed. by: G. M. Crean ... |
| title_fullStr | Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 ed. by: G. M. Crean ... |
| title_full_unstemmed | Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 ed. by: G. M. Crean ... |
| title_short | Semiconductor materials analysis and fabrication process control |
| title_sort | semiconductor materials analysis and fabrication process control proceedings of symposium d on diagnostic techniques for semiconductor materials analysis and fabrication process control of the 1992 e mrs spring conference strasbourg france june 2 5 1992 |
| title_sub | proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992 |
| topic | Semiconducteurs ram Halbleiterwerkstoff (DE-588)4158817-4 gnd |
| topic_facet | Semiconducteurs Halbleiterwerkstoff Konferenzschrift 1992 Straßburg |
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