APA (7th ed.) Citation

(1993). Semiconductor materials analysis and fabrication process control: Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS spring conference ; Strasbourg, France, June 2 - 5, 1992. North-Holland.

Chicago Style (17th ed.) Citation

Semiconductor Materials Analysis and Fabrication Process Control: Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference ; Strasbourg, France, June 2 - 5, 1992. Amsterdam: North-Holland, 1993.

MLA (9th ed.) Citation

Semiconductor Materials Analysis and Fabrication Process Control: Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference ; Strasbourg, France, June 2 - 5, 1992. North-Holland, 1993.